Method for preparing nano composite diamond coating

A diamond coating and nano-composite technology, applied in metal material coating technology, coating, gaseous chemical plating, etc., can solve the problems of reduced coating deposition rate, complex equipment structure, unfavorable mass production, etc., to achieve low coating Effect of layer stress, high carbon ionization rate, and high hardness

Inactive Publication Date: 2008-01-30
WUHAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The use of elbows greatly reduces the deposition rate of the coating, the equipment structure is complex, the stability is poor, and maintenance is difficult, which is not conducive to industrial mass production
[0004] Target poisoning is a problem that needs to be

Method used

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  • Method for preparing nano composite diamond coating
  • Method for preparing nano composite diamond coating
  • Method for preparing nano composite diamond coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Example 1: Under the conditions of 2.5Pa and negative 100V bias, a Ti metal transition layer was prepared by arc discharge of a Ti metal target controlled by a magnetic field; then acetylene gas was introduced, and the acetylene and the surface of the Ti metal target reacted to form titanium carbide. Drag the arc to move on the target surface. When the arc moves on the target surface, metal carbides are evaporated from the target surface; the strong plasma ionization of acetylene gas generated by the arc discharge on the target surface produces highly ionized carbon ions; The metal titanium carbide evaporated on the target surface and the carbon ions produced by acetylene form a carbide-doped nanocomposite diamond-like carbon coating on the surface of the workpiece. The flow rate of the acetylene gas is 80-600 sccm; the current of the metal target is 180 amperes.

[0024] The above-mentioned magnetic field for controlling arc movement is generated by energizing a coil p...

Embodiment 2

[0027] Example 2: Under the conditions of 0.1Pa and negative 80V bias, the Cr metal transition layer was prepared by arc discharge of the Cr metal target controlled by the magnetic field; then acetylene gas was passed through, and the acetylene and the surface of the Cr metal target reacted to form chromium carbide. Drag the arc to move on the target surface, when the arc moves on the target surface, chromium carbide is evaporated from the target surface; use the strong plasma ionization acetylene gas generated by the arc discharge on the target surface to produce highly ionized carbon ions; The surface-evaporated chromium carbide and carbon ions produced by acetylene form a chromium carbide-doped nanocomposite diamond-like coating on the surface of the workpiece. The flow rate of the acetylene gas is 80-600 sccm; the current of the Cr target is 130 amperes.

[0028]The above-mentioned glow discharge cleaning is carried out at 150-200°C in an argon environment; after the glow ...

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Abstract

The invention discloses a preparation method of a nano complex diamond-like coating layer. The method utilizes the cathode arc discharge controlled by a magnetic field, and excessive ethyne gas is introduced to the front of a metal target, and a metal carbide layer is formed on the target surface, metal carbide can be steamed from the target surface while the arc moves; furthermore, under the function of an auxiliary magnetic field, the front of the arc target utilizes the arc discharge to generate strong plasma ionized ethyne gas, and generate high ionized carbon ions; under the function of bias, the metal carbide steamed from the target surface and carbon ions generated by ethyne form a carbide doped nano complex diamond-like coating layer. The diamond-like coating layer prepared by the invention has the advantages of high coating hardness, strong adhesive force, high coating growing speed and production efficiency, low production cost and simple equipment structure, etc.; the invention can be applied to preparing the diamond-like coating layer of different thickness on all kinds of workpieces such as hard alloy, high speed steel, stainless steel, carbon steel, die steel, etc. according to different using requirements.

Description

technical field [0001] The invention relates to a method for preparing a nanocomposite diamond-like coating, which belongs to the field of thin film materials. Background technique [0002] The diamond-like film is a kind mainly composed of sp 2 key and sp 3 The mixed disordered metastable amorphous carbon film composed of bonds can be divided into hydrogen-containing amorphous carbon film (a-C:H) and hydrogen-free amorphous carbon film (a-C). It has a series of unique properties such as low friction coefficient, high hardness, high elastic modulus, high wear resistance and thermal conductivity, good chemical stability and corrosion resistance. Since the 1980s, it has been a research hotspot all over the world. DLC preparation technology includes two kinds of CVD (chemical vapor deposition) and PVD (physical vapor deposition). Hydrogen is contained in the layer, the stress of the coating is high, and the growth rate is low, so the requirements for the base material are h...

Claims

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Application Information

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IPC IPC(8): C23C16/50C23C16/27C23C16/448C23C16/52C23C16/22
Inventor 杨兵丁辉付德君
Owner WUHAN UNIV
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