Composite thick film based on diamond-like carbon thin film and coating method of composite thick film

Abstract

The invention discloses a composite thick film based on a diamond-like carbon thin film and a coating method of the composite thick film. The composite thick film comprises a metal base layer, a transition layer and a diamond-like carbon layer which are successively formed from the surface of a substrate to the outside, wherein the transition layer is a mixture layer which is formed by stacking two film layers in a staggered manner by simultaneously using a magnetron sputtering technology and an enhanced type cathode arc technology; and the thickness of the diamond-like carbon layer is between 1 mu m and 10 mu m. The composite thick film is exquisite in design and simple in structure; the transition layer has the structure which is formed by stacking the two film layers in the staggered manner, the advantages of small internal stress of a magnetron sputtering film layer and large hardness of an enhanced type cathode arc film layer are played fully, large hardness and small internal stress of the transition layer are combined effectively, large hardness and small stress facilitate increasing of the thickness of the diamond-like carbon layer, and the thickness of the finally formed composite thick film reaches 20 mu m or above; and moreover, huge stress caused by a thick film function layer can be buffered effectively, therefore, the binding force of the composite thick film and the substrate is guaranteed, and meanwhile, surface defects of the composite thick film can be reduced effectively.

Description

technical field [0001] The invention relates to a composite thick film and a coating method thereof, in particular to a composite thick film based on a diamond-like carbon film and a coating method thereof. Background technique [0002] The diamond-like carbon film is a metastable amorphous carbon film containing a large number of sp3 bonds. The carbon atoms are mainly bonded by sp3 and sp2 hybrid bonds. The performance is close to that of diamond. Diamond-like carbon has almost the same characteristics as diamond. Due to its high Hardness and high elastic modulus, low friction coefficient, wear resistance and good vacuum tribological properties, it is very suitable as a wear-resistant coating, so the diamond-like carbon film obtained by vapor deposition process is used in many wear-resistant and hardness requirements parts are widely used. [0003] Conventional diamond-like film preparation often adopts a single arc technology, magnetron sputtering technology or ion beam a...

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Problems solved by technology

[0003] Conventional diamond-like film preparation often adopts a single arc technology, magnetron sputtering technology or ion beam assisted deposition technology, and a single technology has certain defects in the preparation of diamond-like coatings, mainly showing that the prepared diamond-like coatings The thickness can only be between 2~4μm

[0004] However, no matter what kind of parts it is used on, generally speaking, under the premise of meeting the size requirements of the parts, the thickness of the entire coating, especially the thickness of the diamond-like film, is often as thick as possible, so that the durability of the parts However, when a single process is used to prepare, once the thickness of the entire coating increases, especially the thickness of the diamond-like film, it will lead to an increase in the internal stress of the entire coating, affecting the coating and the substrate. Therefore, the reconciliation of the contradiction between the thickness of the coating and the bonding force of the film base has become an urgent problem to be solved.

[0005] At the same time, as the thickness of the coating and the diamond-like carbon film increase, the number of defects on the coating surface will increase, the roughness of the coating surface will increase, and the friction coefficient will also increase.

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