Production method of alloy oxide thin-film transistor
An oxide thin film and transistor technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of device integration, reliability and lifespan, leakage current and high power consumption, etc., and achieve excellent deposition uniformity and consistency, improved flatness, and high deposition rate
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[0024] This embodiment prepares a bottom gate structure based on Al 2 O 3 The specific process of the quaternary alloy oxide thin film transistor is:
[0025] (1) Using laser pulse deposition technology (PLD) to prepare Al 2 O 3 High-k dielectric film:
[0026] Step 1: Choose P-type silicon (100) as the substrate, and wash with acetone with a purity of more than 99% and alcohol with a purity of more than 99% in sequence for 5 minutes by ultrasonic vibration, and then repeatedly rinse with deionized water, and then blow dry with high purity nitrogen;
[0027] Step 2: Put the P-type silicon substrate and alumina ceramic target into the pulsed laser (PLD) reaction chamber, adjust the distance between the alumina ceramic target and the substrate to 40mm, and then extract to high vacuum (10 -5 Pa) After passing in high-purity oxygen, keeping the working pressure of the reaction chamber at 60mTorr, perform pulse laser ablation on the alumina target for 5 minutes, and the l...
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