The invention relates to the technical field of
wafer test equipment, in particular to a heating
aging test tool which comprises a storage rack and further comprises a
wafer clamp placed on the storage rack. The detection
assembly comprises a plurality of elastic probes located on one side of the storage rack and a heating disc; and the hot air guide
assembly comprises a ventilation male head arranged on one side of the heating disc, an air guide
pipe is arranged on the side, away from the ventilation male head, of the heat conduction cover, the air amount in the cavity is gradually decreased from near to far away from the air guide
pipe, and the air flow speed is gradually decreased. A hot air flow guide
assembly is arranged on a conveying frame, heat of a heating disc is guided to the position above a
wafer through
airflow through a heat conduction cover, the space above the wafer is divided into a plurality of cavities, the space size and the space shape of each cavity are set, the air flow speed and the contained hot air amount of each space are adjusted, and therefore the heat conduction efficiency of the wafer is improved. The influence of heat loss in the air flow process is reduced, so that the heating effects of all parts of the wafer are similar, and the detection effect is improved.