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370 results about "Barium strontium titanate" patented technology

Method of patterning lead zirconium titanate and barium strontium titanate

In an embodiment of the present invention, a method is provided of patterning PZT layers or BST layers. For example, a PZT layer or a BST layer is plasma etched through a high-temperature-compatible mask such as a titanium nitride (TiN) mask, using a plasma feed gas comprising as a primary etchant boron trichloride (BCl3) or silicon tetrachloride (SiCi4). Although BCl3 or SiCl4 may be used alone as the etchant plasma source gas, it is typically used in combination with an essentially inert gas. Preferably the essentially inert gas is argon. Other potential essentially inert gases which may be used include xenon, krypton, and helium. In some instances O2 or N2, or Cl2, or a combination thereof may be added to the primary etchant to increase the etch rate of PZT or BST relative to adjacent materials, such as the high-temperature-compatible masking material. A TiN masking material can easily be removed without damaging underlying oxides. The selectivity of PZT or BST relative to TiN is very good, with the ratio of the etch rate of the PZT film to the etch rate of the TiN mask typically being better than 20:1. In addition, the etch rate for PZT using a BCl3-comprising plasma source gas is typically in excess of 2,000 Å per minute. A substrate bias power is applied to direct ions produced from the BCl3 or SiCl4 toward the surface to be etched. The bias power is controlled to avoid sputtering of a conductive layer or layers in contact with the PZT layer, so that the surface of the etched PZT is not contaminated by a conductive material, which can cause the semiconductor device which includes the patterned PZT to short out.
Owner:APPLIED MATERIALS INC

Method for preparing nano-crystalline BST film

The invention discloses a method for preparing a nano-crystalline barium-strontium titanate film, belongs to the technical field of functional materials, and relates to a method for preparing a nano-crystalline BST film. A pre-crystallization treatment step is added between cooling step and crystallization step of the conventional sol-gel method for preparing the BST film. The nano-crystalline BST film can be grown internally and externally under atmospheric environment, and the obtained film is smooth and compact, and has no crack or shrinkage hole. The method can greatly improve the comprehensive dielectric tuning performance of the nano-crystalline BST film, the capacitance of the obtained nano-crystalline BST film is 58 to 1,840pF, the dielectric tuning rate is over 20.0 percent, the dielectric loss is less than 3.0 percent, the K factor is more than 15.0, and the nano-crystalline BST film has the advantages of high dielectric strength and stable frequency characteristic and temperature characteristic. The nano-crystalline BST film prepared by the method can replace ferrite and semiconductors for preparing a microwave tuning device (such as a phase shifter) so as to remarkably reduce the manufacturing cost of the microwave tuning device; in addition, the nano-crystalline BST film prepared by the method can also be used for magnetic recording, pyroelectric focal plane array and the like.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Method for preparing tricalcium phosphate/barium strontium titanate composite biological ceramic with minimum curved surface structures on basis of 3D (three-dimensional) printing technologies

The invention discloses a method for preparing tricalcium phosphate/barium strontium titanate composite ceramic with minimum curved surface structures by means of 3D (three-dimensional) printing, andbelongs to the field of 3D printing technologies and biological ceramic. Compositions for the tricalcium phosphate/barium strontium titanate composite ceramic mainly include 35-70 vol% of tricalcium phosphate/barium strontium titanate composite ceramic powder and 30-65 vol% of photosensitive resin premixed liquid. The method has the advantages that DLP (digital light processing) (digital light curing) 3D printing technologies are high in forming speed and printing model precision and low in cost; Rhino software designs are used, minimum curved surface models are optimized, models are importedinto Q3DP software, scanning data are sliced and exported, slurry is prepared according to certain proportions, ball-milling is carried out, the slurry is led into resin grooves of BESK printers, printing is started, printed bodies are further placed into medium-sized furnaces to be degreased and sintered, accordingly, the tricalcium phosphate/barium strontium titanate composite ceramic with the stable structure, excellent mechanical properties, piezoelectric properties and biocompatibility can be ultimately obtained, and the like.
Owner:BEIJING UNIV OF TECH
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