The invention discloses a preparation method of a rare earth barium copper oxygen high-temperature superconducting film. The preparation method comprises the following steps: a) weighing rare earth metal salt, barium salt, copper salt and a doping element compound according to a ratio, and dispersing the earth metal salt, the barium salt, the copper salt and the doping element compound into a solvent to obtain a precursor, wherein the doping element compound can generate doping element oxide at 300 to 650 DEG C and under the oxygen atmosphere; b) coating the precursor on a substrate to form a precursor film; c) placing the precursor film into a heat treatment furnace, introducing oxygen, heating the furnace to 300 to 650 DEG C, preserving heat for 0 to 5 hours, and introducing water vapor when the furnace temperature reaches 80 to 120 DEG C until thermal decomposition is finished; d) introducing oxygen nitrogen mixed gas and water vapor, heating the furnace to 700 to 825 DEC C, preserving heat for 20 to 250 DEG C, and stopping introducing the water vapor at the last 1 to 30 percent of time of heat preservation; and e) cooling the furnace to 400 to 500 DEG C and preserving heat for 0 to 240 minutes to obtain a product. According to the rare earth barium copper oxygen high-temperature superconducting film obtained by the preparation method, the thickness is more than 300 nm, the superconduction critical temperature is more than 90 K, and the critical current density at the temperature of 77 K and under the self-field condition is more than 1 mA / cm<2>.