The invention relates to the technical field of defect detection, in particular to a full-field
optical coherence tomography three-dimensional industrial defect detection
system and method suitable for a large-size sample, and interference fringes generated by a full-field interference imaging
system illuminate the sample; the three-dimensional displacement platform is controlled to transversely move the sample for multiple times according to a preset track, and the
wavelength tunable laser is synchronously controlled to complete
wavelength scanning within the
exposure time of the area-array camera after each time of movement of the sample is completed; the area-array camera transmits three-dimensional data collected at each position of the sample to the controller; and the controller performs image reconstruction, splicing fusion and rendering display on the three-dimensional
original data. According to the method, the full-field OCT technology of
surface scanning and the
laser frequency sweeping technology are integrated, local three-dimensional structure information of a large-size sample is obtained according to the principle of full-
field frequency sweeping OCT, local reconstruction results of adjacent areas are spliced and fused by means of an
image splicing algorithm, a complete three-dimensional imaging result is presented, and the three-dimensional imaging precision is improved. Therefore, defects on the upper surface, the lower surface and the interior of the whole large-size sample can be detected.