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1177 results about "Electron beam irradiation" patented technology

Rapid treatment method for fracturing flowback fluid

The invention discloses a rapid treatment method for a fracturing flowback fluid. The rapid treatment method comprises: (1) pumping a fracturing flowback fluid into an electron beam irradiation chamber, and staying for 20-120 s in the electron beam irradiation chamber; (2) adding a coagulant and a flocculant into the sewage treated by the electron beam irradiation chamber, and clarifying in a flocculation precipitation pool; (3) feeding the water treated by the flocculation precipitation a precision filtration pool, and carrying out fine filtration; and (4) collecting the water filtered by theprecision filtration pool in a clear water pool. According to the present invention, the gel breaking stage uses physical gel breaking so as to achieve clean gel breaking and greatly reduce the sideeffects of external agents, such that the reuse quality of the fracturing flowback fluid is good, and the fracturing flowback fluid is safe; the gel breaking time is shortened from 5-120 min to 20-120s so as to greatly improve the gel breaking speed; and compared with the traditional chemical gel breaking method and the biological gel breaking method, the method of the present invention simplifyfeeding equipment and other supporting equipment, reduces the occupation area, and reduces the complexity of manual operation.
Owner:RUIJIE ENVIRONMENTAL PROTECTION TECH CO LTD

Apparatus for inspecting a substrate, a method of inspecting a substrate, a scanning electron microscope, and a method of producing an image using a scanning electron microscope

InactiveUS20090309022A1Excellent substrate inspectionSensitive defect detecting capabilityStability-of-path spectrometersMaterial analysis using wave/particle radiationScanning tunneling microscopeScanning electron microscope
An object of the present invention provides an inspection apparatus and an inspection method which use an electron beam image to accurately detect a defect that is difficult to detect in an optical image, the apparatus and method also enabling prevention of a possible decrease in focus accuracy of an inspection image which affect the defect detection. To accomplish the object, the present invention includes a height measurement section which measures height of the electron beam irradiation position on the substrate after the substrate is loaded onto a movable stage, a height correction processing section which corrects the measured height, and a control section which adjusts a focus of the electron beam according to the height corrected by the height correction processing section, wherein a stage position set when the height measurement section measures the height differs from a stage position set when the substrate is irradiated with the electron beam, and the height correction processing section corrects a possible deviation in height resulting from movement from the stage position for the height measurement to the stage position for the electron beam irradiation.
Owner:HITACHI HIGH-TECH CORP
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