High-performance REBCO multilayer film, application and preparation method for high-performance REBCO multilayer film
A multi-layer, high-performance technology, applied in coatings, metal material coating processes, ion implantation plating, etc., can solve problems such as affecting film performance and current inability to conduct, and achieve high critical current density, high shape The effect of morphology stability and repeatability, and simple preparation method
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[0053] Example 1
[0054] This embodiment provides a method for preparing a REBCO multilayer film on an IBAD-MgO substrate, including the following steps:
[0055] Step 1. Mount the REBCO and STO targets prepared by high-temperature sintering in the target holder in the cavity;
[0056] Step 2. Wrap the IBAD-MgO base tape coated with the isolation layer in the multi-channel pulsed laser deposition system;
[0057] Step 3. Close the door of the coating system and vacuum to the required vacuum level of 1×10 -7 , And then start the heater and heat up to the required temperature value of REBCO thin film process, the temperature is 750℃;
[0058] Step 4. Fill in oxygen, adjust the gas pressure to the pressure value required by the REBCO thin film coating process, the pressure is 200mTorr;
[0059] Step 5. Start the laser target rotation and scanning system, start the excimer laser energy and frequency to the value required by the REBCO thin film coating process, the laser energy is 250mJ, an...
Example Embodiment
[0073] Example 2
[0074] This embodiment provides a method for preparing a REBCO multilayer film on an IBAD-MgO substrate, including the following steps:
[0075] Step 1. Mount the REBCO and STO targets prepared by high-temperature sintering in the target holder in the cavity;
[0076] Step 2. Wrap the IBAD-MgO base tape coated with the isolation layer in the multi-channel pulsed laser deposition system;
[0077] Step 3. Close the door of the coating system and vacuum to the required vacuum level of 1×10 -6 , And then start the heater and heat up to the required temperature value of REBCO thin film process, the temperature is 800℃;
[0078] Step 4. Fill in oxygen, adjust the gas pressure to the pressure required by the REBCO thin film coating process, and the pressure is 300mTorr;
[0079] Step 5. Start the laser target rotation and scanning system, start the excimer laser energy and frequency to the value required by the REBCO thin film coating process, the laser energy is 350mJ, and ...
Example Embodiment
[0093] Example 3
[0094] This embodiment provides a method for preparing a REBCO multilayer film on an IBAD-MgO substrate, including the following steps:
[0095] Step 1. Mount the REBCO and STO targets prepared by high-temperature sintering in the target holder in the cavity;
[0096] Step 2. Wrap the IBAD-MgO base tape coated with the isolation layer in the multi-channel pulsed laser deposition system;
[0097] Step 3. Close the door of the coating system and vacuum to the required vacuum level of 1×10 -5 , And then start the heater and heat up to the required temperature value of REBCO thin film process, the temperature is 800℃;
[0098] Step 4. Fill in oxygen, adjust the gas pressure to the pressure required by the REBCO thin film coating process, and the pressure is 400mTorr;
[0099] Step 5. Start the laser target rotation and scanning system, start the excimer laser energy and frequency to the value required by the REBCO thin film coating process, the laser energy is 450mJ, and ...
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