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Carbon nano-fibre/carbon nano-tube heterogeneous nano-array for field electronic emitter and manufacturing technology thereof

A technology of carbon nanotube arrays and carbon nanofibers, which is applied in the direction of nanotechnology, nanotechnology, and nanostructure manufacturing, can solve the problems of harsh process conditions and poor controllability of carbon nanotube heterostructures, and achieve field emission Excellent performance and improved stability

Inactive Publication Date: 2009-08-19
BEIJING NORMAL UNIVERSITY
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Problems solved by technology

[0005] The carbon nanotube heterostructures prepared by the above methods have relatively strict requirements on the preparation process conditions, requiring high temperature, high vacuum and other experimental configurations, and the process controllability is poor.

Method used

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  • Carbon nano-fibre/carbon nano-tube heterogeneous nano-array for field electronic emitter and manufacturing technology thereof
  • Carbon nano-fibre/carbon nano-tube heterogeneous nano-array for field electronic emitter and manufacturing technology thereof
  • Carbon nano-fibre/carbon nano-tube heterogeneous nano-array for field electronic emitter and manufacturing technology thereof

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specific Embodiment approach 2

[0032] use figure 2 The carbon nanofiber / carbon nanotube heterogeneous nanoarrays shown can be used to fabricate field electron emitters with bipolar or tripolar structures, respectively. The field electron emitter with bipolar structure uses carbon nanofiber / carbon nanotube heterogeneous nanoarray as the cathode to apply negative voltage, and the anode is an open metal electrode grounded, and field emission electrons can be drawn out from the opening; between the cathode and the anode The rings processed by high insulating materials are isolated and supported each other. The height of the insulating rings is determined according to the working electric field of the field electron emitter. The working distance between the anode and the cathode is generally 100 μm to 2000 μm, and the working electric field is generally 0.8V / μm~4.0V / μm, the induced field emission current density is tens of μA / cm 2 ~tens of mA / cm 2 , The field emission current density stability is better than...

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Abstract

The invention discloses a carbon nano fiber / carbon nanotube heterogenous nano array capable of being used for a field electronic emitter and a preparation method thereof. The preparation method mainly comprises the following steps: (1) taking a silicon single-crystal chip or a glass sheet or a ceramic chip, and the like as a substrate; (2) utilizing magnetic filtration vacuum vapor arc plasma deposition technology or magnetron sputtering technology to deposit a catalyst film on the substrate; (3) performing high-temperature heat treatment on the catalyst film in an ammonia gas reaction chamber; (4) introducing working mixture taking hydrogen as carrier gas and acetylene as reaction gas at high temperature, and synthesizing a directional carbon nanotube array on the substrate subjected to heat treatment; (5) adopting an energy-carrying ion beam or a plasma to process the carbon nanotube, and forming the carbon nano fiber / carbon nanotube heterogenous nano array; and (6) using the carbon nano fiber / carbon nanotube heterogenous nano array to process the field electronic emitter.

Description

technical field [0001] The invention relates to a heterogeneous nano-array suitable for field electron emission devices and a preparation method thereof, in particular to a new method for preparing nano-materials and field emission devices by combining energetic ion processing technology and nano-material preparation technology craft. It belongs to the field of nanomaterial preparation and application. Background technique [0002] In 1991, Iijima of NEC Corporation discovered carbon nanotubes, the fourth allotrope of carbon after graphite, diamond and fullerene, which set off an upsurge of research on this quasi-one-dimensional nanomaterial. Studies have shown that due to the special structure of carbon nanotubes, they have some unique physical and chemical properties. Theory predicts that its strength is about 100 times that of steel, its density is only 1 / 6 of that of steel, and it has good toughness. In addition, carbon nanotubes have a large specific surface area and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B82B3/00B82B1/00H01J31/12H01J29/04H01J1/304H01J9/02C01B31/02
Inventor 程国安赵飞陈科帆邓建华
Owner BEIJING NORMAL UNIVERSITY
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