Metal microstructure electric field sensor

An electric field sensor, metal microstructure technology, applied in electrostatic field measurement, electromagnetic field characteristics and other directions, can solve the problems of unfavorable sensor sensitivity and electric field resolution, small vibration amplitude, etc., to improve the resolution and sensitivity, electrode elasticity, structure simple effect

Inactive Publication Date: 2016-08-31
INST OF ELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

However, since the silicon surface processing technology is not easy to process complex multi-layer three-dimensional microstructures, the vibration mode is generall

Method used

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  • Metal microstructure electric field sensor
  • Metal microstructure electric field sensor
  • Metal microstructure electric field sensor

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Embodiment Construction

[0029] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0030] With the development of MEMS technology, metal microstructures have gradually aroused people's research interest. Using metal microdevices to replace part or all of silicon structures can further improve the performance of microstructures. At present, microsprings, microgears, microfuses, and metal microfluidic sensors based on metal materials have been researched at home and abroad, and have been initially applied in related fields. Therefore, the research on microstructure electric field sensors based on metal materials is of great significance. , the present invention just proposes a metal microstructure electric field sensor.

[0031] A metal microstructure electric field sensor according to the first embodimen...

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Abstract

The invention provides a metal microstructure electric field sensor which comprises a shielding electrode, a substrate, a first driving structure, a second driving structure and an induction electrode. The first driving structure, the second driving structure and the induction electrode are arranged on the substrate. The first driving structure and the second driving structure are symmetrically arranged at the two sides of the induction electrode. In this way, the shielding electrode is clamped between the first driving structure and the second driving structure which drive the shielding electrode to move periodically in response to the induction electrode. The shielding electrode, the first driving structure, the second driving structure, and the induction electrode are all made from metal materials. According to the invention, metal materials are adopted for the making of the sensor with greater electrode elasticity, enhanced resolution and sensitivity for electric field measurement and an enlarged effective charge induction area. The vertical vibration mode adopted by the electrode sensor greatly raises the resolution and sensitivity for electric field measurement. The damping holes opened on the surface of a moving electrode cut down driving voltage and noise caused by the driving voltage, but on contrary, increase the ratio of signal to noise.

Description

technical field [0001] The invention relates to the technical field of electric field sensors, in particular to a metal microstructure electric field sensor. Background technique [0002] During the formation of extreme weather such as thunderstorms and sandstorms, the atmospheric electric field changes drastically. Using electric field sensors to detect the atmospheric electric field plays an important role in extreme weather forecasts. It can also be used for atmospheric circulation research in the geological field, air pollution detection, and industrial production. Monitoring and protection of medium static electricity, analysis of discharge phenomena in power systems, measurement of electric field distribution of high-voltage equipment and high-voltage lines, testing of insulation performance of insulators, etc. [0003] The research on electric field sensors has been carried out for many years. Traditional mechanical electric field sensors based on the principle of cha...

Claims

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Application Information

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IPC IPC(8): G01R29/12
CPCG01R29/08G01R29/12
Inventor 郑凤杰夏善红彭春荣
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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