Metal microstructure electric field sensor

Abstract

The invention provides a metal microstructure electric field sensor which comprises a shielding electrode, a substrate, a first driving structure, a second driving structure and an induction electrode. The first driving structure, the second driving structure and the induction electrode are arranged on the substrate. The first driving structure and the second driving structure are symmetrically arranged at the two sides of the induction electrode. In this way, the shielding electrode is clamped between the first driving structure and the second driving structure which drive the shielding electrode to move periodically in response to the induction electrode. The shielding electrode, the first driving structure, the second driving structure, and the induction electrode are all made from metal materials. According to the invention, metal materials are adopted for the making of the sensor with greater electrode elasticity, enhanced resolution and sensitivity for electric field measurement and an enlarged effective charge induction area. The vertical vibration mode adopted by the electrode sensor greatly raises the resolution and sensitivity for electric field measurement. The damping holes opened on the surface of a moving electrode cut down driving voltage and noise caused by the driving voltage, but on contrary, increase the ratio of signal to noise.

Description

technical field [0001] The invention relates to the technical field of electric field sensors, in particular to a metal microstructure electric field sensor. Background technique [0002] During the formation of extreme weather such as thunderstorms and sandstorms, the atmospheric electric field changes drastically. Using electric field sensors to detect the atmospheric electric field plays an important role in extreme weather forecasts. It can also be used for atmospheric circulation research in the geological field, air pollution detection, and industrial production. Monitoring and protection of medium static electricity, analysis of discharge phenomena in power systems, measurement of electric field distribution of high-voltage equipment and high-voltage lines, testing of insulation performance of insulators, etc. [0003] The research on electric field sensors has been carried out for many years. Traditional mechanical electric field sensors based on the principle of cha...

AI Technical Summary

Problems solved by technology

However, since the silicon surface processing technology is not easy to process complex multi-layer three-dimensional microstructures, the vibration mode is generally horizontal vibration, and the vibration amplitude is small, which is not conducive to further improving the sensitivity and electric field resolution of the sensor.

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