Miniature electromagnetic type vibration energy collector and manufacturing method thereof
An energy harvester and electromagnetic vibration technology, applied in the direction of electromechanical devices, electrical components, microstructure technology, etc., can solve the problems of large volume, poor stability, poor manufacturing precision, etc., and achieve small size, repeatability and reliability Good performance and improved output performance
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[0038] Embodiments of the present invention relate to energy harvester structures, combined with the attached figure 1 and 2 illustrate.
[0039] The top view of the structure of the energy harvester (without the upper cover and permanent magnet) is as follows figure 1 As shown, it mainly includes an external support frame 1, a planar spiral coil 2, electrodes 5, a central mass 3, and a folded elastic beam 4. The planar helical coil 2 is fabricated on the upper surface of the central mass 3 , and the central mass 3 is connected to the external support frame 1 through two folded elastic beams 4 . The structural section of the energy harvester is shown in figure 2 As shown, it mainly includes an upper cover silicon wafer 14, two permanent magnets 6, a vibration structure silicon wafer 15, and a substrate silicon wafer 16. Two permanent magnets 6 are placed side by side in the pits on the upper surface of the upper cover silicon wafer 14, and the directions of the magnetic p...
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