The invention discloses a periodic bowl-shaped structural template and a preparation method thereof. The preparation method comprises the following steps: depositing a
silicon dioxide
mask layer on a substrate, spin-
coating photoresist on the
silicon dioxide
mask layer, preparing a periodic micro / nano
photoresist lattice pattern, depositing a
thin metal film on the
photoresist structure, peeling to obtain a
metal hole array pattern, forming a bowl-shaped array structure of the
silicon dioxide by adopting a wet
etching technology by taking the
metal hole array structure as a
mask, and finally, removing the
metal mask. The periodic bowl-shaped structural template prepared by the preparation method is large in area and uniform and complete in structure, has a very good application prospect in the aspects of preparation of patterned structures, photonic crystals,
surface roughening, surface flocking and micro /
nano devices and the like, can be widely applied to the aspects of LEDs (Light-Emitting Diodes), solar batteries, photonic crystals,
quantum devices and the like, or serves as an
etching mask layer of the substrate material, or is used for the manufacturing of other micro / nano structures.