56 results about "Nano-device" patented technology

The invention discloses a photoresist composition based on metal nanoparticles and application of the photoresist composition. The photoresist composition comprises metal nanoparticles, a photosensitizer, an anti-diffusion agent and a photoresist solvent, wherein the metal nanoparticles are silver nanoparticles, copper nanoparticles and gold nanoparticles. The photoresist composition has good film-forming property and excellent patterning imaging capability, photoetching patterns with different resolutions can be obtained through ultraviolet, electron beam or extreme ultraviolet exposure, and the formed patterns have good conductivity after being subjected to heat treatment and can be directly used for processing micro-nano devices.

The application discloses a preparation and editing method of a magnetic micro-nano robot with in-situ re-editing capability, and belongs to the field of micro-nano devices. The method comprises the following steps: preparing a sacrifice layer by polyvinyl alcohol, spin-coating pNIPAM to prepare a flexible hinge layer by using a photoetching process, and preparing two magnetic driving modules by using SU-8 of pre-mixed nickel nanowires with different diameters, so as to obtain the micro-nano robot after releasing. When re-editing, one of the magnetic driving modules or both of the magnetic driving modules can be selectively magnetized by an external magnetic field, and the in-situ re-editing of the micro-nano robot is completed. The preparation process of the application is simple, the re-editing of the micro-nano robot can be realized by the simple external magnetic field, more movement modes are provided, the problems of the existing micro-nano device movement modes still being rigid and the like are solved, the flexibility is further improved, and the application has important application prospects in the fields of biological medicine, environmental detection and the like.

The invention discloses a micro-nano device photoetching process based on surface energy repair and a micro-nano device, and relates to the technical field of photoetching. The process provided by the invention comprises the following steps: carrying out plasma cleaning on a substrate, immersing the substrate subjected to plasma cleaning into an organic cleaning solvent, and removing an unstable metamorphic layer and pollutants on the surface of the substrate by adopting at least one of soaking, stirring and ultrasonic treatment, then, the cleaned substrate is adopted to carry out subsequent photoetching and micro-nano machining processes; the step of organic solvent cleaning is added after substrate plasma cleaning, an unstable metamorphic layer is disintegrated and other impurities are removed through permeation and slight dissolution effects of an organic solvent on the surface of the substrate, so that the surface of the substrate is recovered to a smooth and stable state; therefore, the defects of edge collapse, side wall roughness and the like of the photoresist pattern in the photoetching process are remarkably reduced, and the photoetching morphology precision and the production yield of the micro-nano device are effectively improved.

The application belongs to the field of organic / polymer neuromorphic devices, and specifically provides a nano neuromorphic device with an organic two-dimensional conjugate symmetric polymer as an active layer, and a preparation method and application thereof. The nano device is manufactured in the form of an 8*8 cross switch array through electron beam lithography technology and stripping method, and the width of the word line and the bit line is 100 nm and 200 nm respectively, which is a very small nano structure. The device realizes record-high yield of the polymer memristor with minimization and low potential, and simultaneously realizes fast response within 20-40 ns, the variation range of D2D is less than 10%, the device yield is higher than 90%, and the device can reach 50-100 nm scale, and the power consumption is lower than 20 J / bit. The polymer memristor array can realize storage and calculation integration, and can be used for information storage, and has excellent application prospect in the field of artificial intelligence.

The application discloses an intelligent response type DNA nano device and a construction method and application thereof, and belongs to the field of DNA nanotechnology; the intelligent response type DNA nano device comprises a plurality of different DNA tetrahedron basic units and extension chains and miRNA response chains arranged on the DNA tetrahedron basic units; wherein the DNA tetrahedron basic units are connected by base complementary pairing between the extension chains and the miRNA response chains to form a multimer structure; the miRNA response chain comprises a base sequence capable of specific complementary pairing with a target miRNA to be detected, and the extension chain and the miRNA response chain are separated, so that specific configuration transformation of the nano device is induced. Through programmable assembly of the DNA tetrahedron and miRNA-induced configuration dynamic response, high specificity, high sensitivity, multi-channel parallel detection of a plurality of miRNAs are realized, and problems such as insufficient specificity, low sensitivity and poor targeting of a traditional miRNA detection method are overcome, so that the application has a wide application prospect in the fields of biomedical research and clinical diagnosis.

The invention relates to the technical field of micro-nano 3D printing, in particular to photocuring additive manufacturing equipment for preparing a conductive device based on acoustoelectric combination, which comprises a resin pool, and substrate resin of conductive particles is placed in the resin pool. The sound field auxiliary module is used for enabling conductive particles in the photosensitive resin of the substrate to be uniformly and densely distributed in the vertical direction in the continuous forming process; the electric field auxiliary module is used for enabling the conductive particles in the photosensitive resin of the substrate to be specifically arranged in a deflection mode to form a conductive path; a printing platform is placed in the resin pool, the resin pool is installed on a vibration isolation table, a light source module and a projection module are installed on the vibration isolation table, the light source module emits a UV light source, the UV light source enters the resin pool through reflection of the projection module, and a printed piece is formed on the printing platform; and the micro-nano device with conductive capability can be manufactured with high efficiency and high precision.

The invention discloses a spin light current detection method based on a boundary region of a two-dimensional transition metal chalcogenide system. The detection method comprises the following steps: S1, preparing a two-dimensional transition metal chalcogenide micro-nano device; s2, a spin photocurrent detection and regulation platform is built, a laser emits a beam of laser, the beam of laser enters a chopper through a reflector, the laser passing through the chopper enters a polarizer, the laser passes through an electro-optical modulator after being changed, the beam is periodically modulated into linearly polarized light, left circularly polarized light and right circularly polarized light, and the linearly polarized light, the left circularly polarized light and the right circularly polarized light are polarized; then the light beams enter a microscope objective through a semi-reflecting and semi-transmitting flat plate and a light splitting crystal, and light spots are formed at the focus position of the microscope objective through convergence of the microscope objective; and S3, projecting a light spot formed by convergence of the microscope objective in the step S2 on the two-dimensional transition metal chalcogenide micro-nano device, and detecting and extracting spin light current. The method is used for accurately detecting, regulating and controlling the boundary spin photocurrent of WSe2 and promoting research and application of two-dimensional spin photoelectronic devices.

The application belongs to the technical field of biomedicine, and relates to a mitochondrion-targeted nano device and a preparation method and application thereof, the nano device comprising a cascade-activated photodynamic molecular beacon and a mitochondrion-targeted delivery carrier, the cascade-activated photodynamic molecular beacon comprising an APE1 cleavage site and a microRNA recognition region. The cascade-activated photodynamic molecular beacon and the mitochondrion-targeted delivery carrier are self-assembled into a complex through electrostatic adsorption, and cascade activation and signal amplification are realized through the dual response of miR-146a / APE1 which is highly expressed in mitochondria of tumor cells. The application triggers precise and controllable cell pyroptosis through tumor-specific signals, reverses the immune-inhibitory microenvironment, converts the 'cold tumor' into a 'hot tumor', significantly improves the effect of cancer immunotherapy, has good biocompatibility and tumor selectivity, and provides a new strategy and tool for precise treatment of cancer.

The invention relates to a micro-nano resonator-based magnetic head and a control method thereof, the magnetic head comprises a micro-nano resonator, a magnetic film and a support, the micro-nano resonator is arranged on the support, and the magnetic film is arranged on the surface of the micro-nano resonator; the magnetic head further comprises a micro-nano resonator, a magnetic film, a support and a motor positioner, wherein the support is fixed on the motor positioner. High-frequency voltage is applied to the micro-nano resonator, the magnetic film is driven to oscillate at high frequency, magnetic bits in a magnetic recording medium are driven to move under external excitation, when the magnetic bits pass through the position below the magnetic film, magnetic interaction causes vibration parameters of the micro-nano resonator to change, and reading of the magnetic bits is achieved; the motor positioner is used for regulating and controlling the distance between the magnetic film and the magnetic bits in the z direction to control the size of a magnetic field, writing, reading and deleting operation is carried out on the specified magnetic bits in the x and y directions, the response speed is high, and the energy consumption is low; a micro-nano device is integrated, the structure is simple, and the storage density and the regulation and control precision are improved.

The invention provides a method for preparing a flexible micro-nano device based on a carbon film, and belongs to the field of micro-nano device manufacturing. The invention provides a preparation method of a carbon film for preparing a flexible electrochemical sensor, which comprises the following steps: coating a first substrate with slurry containing graphene oxide and a polymer, and then carrying out carbonization reaction to form a graphite-like carbon film. The graphene oxide and the polymer are carbonized to form a continuous carbon film structure with high flexibility, excellent conductivity and good adhesive force, and the carbonized film can directly realize patterned microstructure processing on a wafer-level substrate, has good structural uniformity and repeatability, and is suitable for integrated manufacturing of large-scale flexible microelectrode arrays.

The present application relates to the technical field of micro-nano device manufacturing, and in particular to a micro-nano device based on two-dimensional MOFs material and a preparation method and application thereof.The present application provides a preparation method of a micro-nano device based on two-dimensional MOFs material, which comprises the following steps: peeling off two-dimensional MOFs material under a protective atmosphere to obtain a single crystal wafer; adhering a transfer sheet to the single crystal wafer and picking up the single crystal wafer to obtain an intermediate; adhering the intermediate to a bottom electrode and separating a polydimethylsiloxane film in the transfer sheet to obtain the micro-nano device based on two-dimensional MOFs material.The preparation process provided by the present application can effectively avoid damage to two-dimensional MOFs material caused by oxygen, solvents and high-temperature processes, realize the construction of single-crystal devices and make the single-crystal devices have good electrical properties.

The invention discloses a method for controlling the motion behavior of a micro-nano motor by adjusting the distribution asymmetry degree of an engine, and belongs to the field of intelligent materials and bionic micro-nano device construction. According to the method, on the basis of a liquid-liquid phase separation principle, polyacrylic acid and quaternized glucan are taken as elements, and condensed fluid drops are prepared in a buffer solution to serve as an engine regulator for enriching and protecting a biological enzyme engine; by adjusting the polarity of surface groups of solid-phase carrier microspheres and changing the interfacial tension among a condensate phase, a water phase and a solid phase, the three-phase tentacles among the condensate engine regulator, a solution and a substrate are further adjusted and controlled, so that the distribution asymmetry degree of a micro-nano motor engine is changed, the distribution condition of a biological enzyme engine in an interface area is changed, and the stability of the biological enzyme engine is improved. And regulation and control on the movement speed of the micro-nano motor driven by the biological enzyme are realized. According to the invention, a strategy for realizing micro-nano motor engine distribution asymmetry control by regulating and controlling the three-phase interfacial tension is provided for the first time.

The application provides a photothermal driving bowl-shaped polydopamine nanomotor and a preparation method thereof, and belongs to the technical field of micro-nano devices, wherein the photothermal driving bowl-shaped polydopamine nanomotor comprises a hollow bowl-shaped structure constructed by polydopamine, and the hollow bowl-shaped structure is obtained by removing polyacrylic acid nanoparticles after polydopamine is polymerized on one side of the polyacrylic acid nanoparticles to form a single-sided asymmetric structure. The photothermal driving bowl-shaped polydopamine nanomotor provided by the application has strong driving capacity, fast movement speed, and an easy-to-functionalize surface, and the preparation method is simple and can be used for macro preparation, so that the photothermal driving bowl-shaped polydopamine nanomotor has a wide application prospect in the fields of environmental governance, micro-nano processing and biological medicine.

The invention provides a preparation method of an electromechanical coupling micro-nano device and the electromechanical coupling micro-nano device, and is applied to the technical field of micro-nano manufacturing. The preparation method comprises the following steps: forming a device structure layer on a first side of a substrate, wherein the device structure layer comprises or is preset with a movable structure region and a fixed structure region; a patterned mask aligned with the substrate is fixed on the device structure layer, the pattern of the mask is provided with an opening, and the opening exposes the first area in the movable structure area; depositing a permanent magnet thin film on the first area through the opening of the mask, and removing the mask after deposition; forming a functional unit on a second region different from the first region in the movable structure region or in the fixed structure region, and forming an interconnection structure electrically connected with the functional unit on the fixed structure region; and partially or completely removing the substrate below the movable structure region in the device structure layer, and forming a cavity below the movable structure region to release part of the movable structure region including the first region.

The invention discloses a micro-nano device preparation-oriented environmental parameter prediction type industrial cleaning system and a regulation and control method, and the system comprises a multi-mode sensing network which is distributed in a key process area of a clean room and in micro-nano manufacturing equipment, and is used for collecting environmental parameter data of temperature, humidity, particulate matter concentration, air pressure difference and vibration amplitude in real time; the data acquisition and communication unit is in signal connection with the multi-mode sensing network; and the prediction control unit comprises a data processing module, a prediction analysis module, a decision control module and an actuator network. According to the invention, the future environment trend is accurately predicted through the environment parameter prediction model, and the prospective regulation and control instruction is generated based on the prediction result, so that intervention is carried out before the environment parameters substantially exceed the standard, the hysteresis of traditional feedback control is fundamentally eliminated, and the control precision is improved. A more stable environment guarantee is provided for key process steps, and the preparation yield of the micro-nano device is greatly improved.

A microelectronic structure including a first nano device that includes a plurality of first transistors and a second nano device that includes a plurality of second transistors. The first nano device and the second nano device are parallel to each other. A double diffusion break that extends across the first nano device and the second nano device. A back-end-of-the-line (BEOL) layer located on a frontside of the first nano device and the second nano device. A backside interconnect located on a backside of the first nano device and the second nano device and the BEOL layer is connected to the backside interconnect through the double diffusion break.

This invention discloses a semi-flexible sealed composite material beam-membrane-island structure for micro / nano devices and its fabrication method. The invention employs both rigid and flexible materials to construct the beam-membrane-island structure of the micro / nano device. The beam and island structures are made of rigid materials that can be fabricated in micro / nano dimensions, while flexible materials fill the periphery of the beam and island structures. The flexible filling layer acts as a "displacement coordination layer," ensuring a clear mechanical response while maintaining the high modulus of the silicon beam. Simultaneously, the local deformation of the flexible layer absorbs lateral coupling stress, allowing strain fields in different directions to be separated and amplified in the beam / island region. The flexible material forms a stress transition zone between the beam and island, preventing strong stress concentration in the pure silicon beam-island structure under concentrated loads. This invention still uses materials compatible with micro / nano fabrication processes as the main structural material, enabling integration with standard photolithography, reactive ion etching, deep silicon reactive ion etching, anodic bonding processes, through-silicon vias (TSVs), and glass vias, among other micro / nano processes.

The present application relates to the field of micro-nano device processing, and particularly relates to a multi-step micro-nano structure and a preparation method thereof. The method comprises the following steps: forming a mask layer on a substrate surface, the mask layer having a plurality of openings with different sizes for exposing the substrate; and performing single etching on the substrate with the mask layer as a mask to obtain the multi-step micro-nano structure on the substrate. The present application realizes the multi-step by designing openings with different sizes to obtain the multi-step through single etching. The complex process flow of traditional multiple exposures and multiple etchings is compressed into one exposure and one etching, which fundamentally eliminates the problems of cumulative error, long production cycle and high cost caused by multiple process cycles. The strict overlay alignment requirement between multiple photolithographies is avoided, the manufacturing precision and yield are greatly improved, the present application is easy to integrate into the existing semiconductor production line, and the present application paves the way for the large-scale and low-cost manufacturing of multi-step devices.

The application discloses a kind of semi-flexible sealing composite beam membrane island structure formula micro-nano device and its processing method.The application uses hard material and flexible material to constitute the beam membrane island structure of micro-nano device, wherein the hard material that can be micro-nano processed is used in beam structure and island structure, and flexible material is filled in the periphery of beam structure and island structure.Flexible filling layer plays the role of "displacement coordination layer", and by the local deformation of flexible layer, transverse coupling stress is absorbed, so that strain field in different directions is separated and enlarged in beam / island area.Flexible material forms stress transition zone between beam and island, to avoid strong stress concentration of pure silicon beam island structure under concentrated load.The application still uses material compatible with micro-nano processing technology as main structure material, and can be integrated with standard photolithography, reactive ion etching, deep silicon reactive ion etching and anodic bonding process, through silicon via, through glass via and other micro-nano processes.

The present application relates to a kind of in-situ characterization method of electric conductivity-structure-catalytic activity of electrocatalyst, the method includes the following steps: (1) preparation micro electrochemical cell;(2) the three-electrode system formed by counter electrode, working electrode and reference electrode forms in-situ electrical / electrochemical measurement circuit, constructs micro electrochemical environment;(3) in-situ electrical and electrochemical measurement: by source table at counter electrode electrocatalytic voltage is applied, simultaneously, small bias voltage is applied to micro-nano device between interdigital electrode array, respectively, the electrocatalytic signal and in-situ electric conductivity signal of micro-nano device are collected;(4) in-situ Raman spectrum characterization: by Raman spectrum, the in-situ Raman signal of reaction window during electrocatalytic reaction is collected, and the in-situ structure information of catalyst is obtained;(5) periodic catalytic voltage is applied, and the dynamic response characteristics of electrocatalytic signal and in-situ electric conductivity signal of catalyst are tested.The present application is convenient to test, can consider catalyst electrical property, actual reaction environment and structure information.

The invention belongs to the technical field of two-dimensional material lubrication, and particularly relates to a regulation and control method for graphene friction force. The preparation method comprises the following steps: performing plasma treatment on a graphene sheet on the surface of a substrate to introduce structural defects to obtain a pretreated graphene sheet; and folding the exposed edge of the pretreated graphene sheet on the surface of the substrate by adopting nano manipulation of an atomic force microscope to obtain a folded pretreated graphene sheet. According to the method, defect structures with different densities are introduced through plasma treatment to weaken and damage a pseudo magnetic field, and effective regulation and control on friction of the edge of the folded graphene are realized. The method provided by the invention is simple to operate, has high regulation and control precision on the friction force of the graphene, and can be widely applied to friction regulation and control of micro-nano devices.

The invention discloses an astigmatic displacement microscopic imaging method and an astigmatic displacement microscopic imaging device for axial sub-nanometer resolution, namely an astigmatic displacement microscope (ADM). The astigmatic displacement microscopic imaging method and the astigmatic displacement microscopic imaging device for axial sub-nanometer resolution are applied to an astigmatic displacement microscope (ADM). The ADM technology is based on the astigmatism measurement principle, has the advantage of optical non-contact, and can simultaneously realize four measurement functions: microscopic three-dimensional shape scanning imaging, displacement measurement, vibration analysis and film thickness measurement. The Z-axis resolution of three-dimensional morphology imaging is about 0.1 nm, and the thickness detection of a monatomic layer of a two-dimensional material and the like can be met; the device can be matched with any objective lens, such as working media of air, water immersion and oil immersion; a fast scanner is adopted to replace a traditional sample displacement table for scanning, and the imaging time of a single image is fast to a second level; and in combination with a normalization circuit, the influence of different sample reflectivity on a measurement signal can be eliminated. The astigmatic displacement microscope can meet the test requirements of application scenes such as micro-nano devices, semiconductors, piezoelectric sensing, material morphology measurement, in-situ surface and interface research, precise displacement measurement, microscopic vibration analysis and the like.

The application provides a three-dimensional micro-nano spherical surface multi-parameter synchronous mapping method based on a longitude and latitude scanning track, belongs to the technical field of micro-nano device and cell surface physical property characterization methods, adopts a priori knowledge pre-calibration mode, establishes a longitude scanning path parameter, establishes a latitude scanning path parameter based on a rotating sample table hardware unit and in combination with an eccentricity real-time compensation control algorithm, realizes online compensation of eccentric displacement in the process of rotating along the latitude, takes the normal bending deformation signal of a probe micro-cantilever as feedback through an upper computer, realizes displacement control of a scanning positioning platform, and further realizes synchronous scanning imaging of sample surface topography and nano-mechanical properties. The probe integrated with a front protruding needle tip structure is used as a micro force sensor, a new controllable vector angle single-point servo detection method is combined, the normal bending signal of the probe is used as feedback, the longitude and latitude scanning paths are realized, and synchronous measurement of three-dimensional surface topography and three-dimensional surface mechanical properties of micro-nano spherical samples is realized.

The invention belongs to the field of particle suspension evaporation, and relates to a particle suspension evaporation method and system based on a vibration substrate. According to the method, particle suspension liquid drops are deposited on a vibration substrate, and the substrate is driven to generate periodic vibration with specific frequency and amplitude, so that the liquid drops enter a resonance state. Under the resonance condition, complex convection is formed in the liquid drops, single circulation driven by evaporation is broken, the trend that particles continuously migrate to the edge is remarkably weakened, and therefore the coffee ring effect is effectively restrained. Compared with the prior art, the method has the advantages that the structure is simple, the operation is convenient, uniform deposition of particles can be realized without adding a surfactant or special surface modification, and the method has good universality and wide application prospect, and is suitable for the fields of biological detection, ink-jet printing, functional coating, micro-nano device manufacturing and the like.

The invention belongs to the field of semiconductor materials and micro-nano manufacturing, and provides a method for improving the elastic limit of micro-nano-scale diamond. According to a diamond micro-nano structure prepared through a traditional method, due to surface defects and an amorphous layer, the mechanical property is far lower than a theoretical value, and the elastic strain and the fracture resistance are limited. According to the method, controllable plasma surface treatment is carried out on the diamond nanostructure processed by a focused ion beam (FIB) at room temperature, the thickness of a surface amorphous carbon layer is accurately regulated and controlled, and the elastic modulus and the elastic strain range are actively regulated. The core of the method is to reduce or optimize interface mismatch of a surface amorphous layer and internal crystalline diamond and relieve the problem of deformation and non-collaboration. After treatment, the ductility of the diamond is improved, the theoretical ultimate tensile strain is approached, the fracture resistance is enhanced, and the multi-field mechanical reliability and working stability are improved. The method is simple in process, mild in condition and high in controllability, and provides support for application of diamond-based micro-nano devices.

The invention relates to the technical field of nano material preparation, and particularly discloses a substrate growth pulling method of an ultra-long few-walled carbon nanotube array. The method comprises the following steps: firstly, pretreating a substrate, loading a zinc-based MOF derivative catalyst and forming a polymer transition layer; then in a reaction environment capable of providing an alternating magnetic field, a gradient electric field, a near-infrared light thermal field and layered gas flow, heating and introducing a carbon source gas in a pulse manner to grow the array, and meanwhile, carrying out on-line monitoring and real-time closed-loop regulation on growth parameters by utilizing a laser Raman spectrum; after the array grows to a preset height, staged gradient stress release lifting is executed, and layered airflow is used for assisting in stripping; and finally, removing the residual catalyst in an oxidizing atmosphere. The carbon nanotube array can be used in the fields of nano devices, composite material reinforcement and the like, and has the advantages of excellent directionality, low defect rate and strong structural integrity. The preparation method provided by the invention can be used for efficiently preparing the high-performance ultra-long few-walled carbon nanotube array.

The invention relates to the technical field of photonic crystal materials and micro-nano devices, in particular to a beam-shaped magnetic photonic crystal, a preparation method of the beam-shaped magnetic photonic crystal and application of a micro-nano device of the beam-shaped magnetic photonic crystal. Each one-dimensional magnetic photonic nano chain is formed by assembling a plurality of magnetic nano particles into a chain, and the magnetic nano particles in the beam-shaped magnetic photonic crystal are arranged into a one-dimensional photonic crystal structure along the axial direction of the beam-shaped magnetic photonic crystal and are arranged into a two-dimensional photonic crystal structure along the radial direction of the beam-shaped magnetic photonic crystal. Compared with a single photon nanometer chain, the beam-shaped magnetic photonic crystal shows larger color spots and unique axial-radial two-way color rendering property, the photonic crystal structural color can be displayed in the axial dimension and the radial dimension, and the beautiful structural color is displayed.

A method including forming an oxide layer on a first substrate and forming a second substrate on the oxide layer. Doping a first section of the second substrate while not doping a second section of the second substrate. Forming a first nano device on the second section of the second substrate and forming a second nano device on first section of the second substrate. Flipping the first substrate over to allow for backside processing of the substrate and forming at least one backside contact connected to the first nano device while backside contacts are not formed or connected to the second nano device.

This invention provides a microscopic visual inspection device and calibration method for multi-scale micro / nano device assembly, including a first microscopic vision system and a second microscopic vision system for detecting front and side features of micro / nano devices; a third microscopic vision system for detecting top features of micro / nano parts; and a fourth microscopic vision system for detecting bottom features of micro / nano devices. It also includes a calibration method for the microscopic visual inspection device for multi-scale micro / nano device assembly. Cross-depth-of-field detection is achieved by calibrating the image offset matrix of the microscopic vision system and the image Jacobian matrix for part position and motion control. A relational matrix is ​​derived, and combined with the relational matrix calibration method, the detection of part angular deviation around the Z-axis is achieved. This invention is applicable to microscopic visual inspection of multi-scale micro / nano device assembly, enabling multi-angle detection, and simultaneously detecting part rotational angular deviation through relational derivation.

The application discloses a quantum transport-thermal transport-thermal stress coupling fast simulation method in a three-dimensional nano device. By solving the quantum transport equation, the heat conduction equation and the solid mechanics balance equation in the coupling mode space, the three-dimensional nano semiconductor device is simulated fast, and the calculation amount of solving the three-dimensional quantum transport equation is reduced. The method comprises the following steps: (1) using the non-equilibrium Green function method, solving the three-dimensional quantum transport equation in the coupling mode space while considering the thermal stress and the phonon scattering effect; (2) using the current density spectrum to calculate the heat source distribution and the current respectively; (3) based on the numerical method and the heat source distribution, solving the heat conduction equation and the solid mechanics balance equation to obtain the temperature distribution and the thermal stress distribution; (4) converting the thermal stress to the mode space, and substituting the temperature distribution and the thermal stress distribution into the quantum transport equation, and repeating steps (1)-(4) until convergence. The application provides a simulation method for the design and optimization of the three-dimensional nano semiconductor device.