79 results about "Nano-device" patented technology

The invention discloses a bridge type structure micro-bolometer based on a Mn-Co-Ni-O thin film and a preparation method of the bridge type structure micro-bolometer. According to the method, a Mn-Co-Ni-O post-high-temperature annealing process is considered, annealing is carried out on the suspension structure where the sacrificial layer is released, an organic sacrificial layer material release process is compatible, and the problem that cracks are generated in Mn-Co-Ni-O manufacturing due to tension and compression stress of materials of all layers of a substrate at a high temperature is minimized through annealing of the suspension structure; a bridge type structure based on Mn-Co-Ni-O is provided, and the limitation that traditional Mn-Co-Ni-O can only adopt an organic sacrificial layer and back digging to carry out thermal isolation design is eliminated; the F-P resonant cavity resonance absorption structure based on Mn-Co-Ni-O is successfully manufactured, traditional self-absorption based on a Mn-Co-Ni-O thick film is replaced, and the heat capacity of a device is reduced while absorption is enhanced by adopting a thin film optical structure; the applicable scene of the invention can be expanded to all cantilever or film-suspending micro-nano devices, such as inertial sensors, pressure sensors, chemical / biological sensors and optical detectors of other principles.

The invention relates to the technical field of micro-nano device manufacturing, in particular to bio-compatible self-clamping optical fiber tweezers and a preparation method thereof. The invention designs a pair of bio-compatible self-clamping optical fiber tweezers. The clamping part of the tweezers is in a self-clamping closed state in the absence of external force; therefore, when an object needs to be clamped, photothermal effect stimulation is generated through the laser irradiation effect to enable the driving part to contract so as to enable the clamping part to be opened, then the laser can be closed to enable the photothermal effect stimulation to disappear so as to enable the clamping part to be reset to be in a closed state to achieve clamping, and therefore long-time driving of the laser is not needed. Therefore, the clamped object is protected from being influenced by the high-energy-density laser to the greatest extent, the problems that the object is subjected to thermal damage and the biological activity is reduced are solved, and the biological compatibility of the optical fiber tweezers is improved.

The invention discloses a double-layer heterostructure device, a design method and application in spin thermoelectric conversion, and belongs to the technical field of nanoelectronics. The design method comprises the following steps: cutting two-dimensional C2N into single-layer C2NNR; based on a single-layer C2NNR, considering the alignment condition of different atoms between an upper layer and a lower layer in a transport period, and constructing b-C2NNR van der Waals heterostructures with different stacking modes; the bl-C2NNR van der Waals heterostructures in different stacking modes are used for respectively building a double-layer heterostructure device; under the condition of zero bias, the temperature of the left electrode and the right electrode of the double-layer heterostructure device and the temperature difference of the left electrode and the right electrode are changed to cause the double-layer heterostructure device to generate thermal driving current, it can be calculated that charge current Ic is restrained, at the moment, the double-layer heterostructure device can conduct spinning thermoelectric conversion, and therefore the material library of low-dimensional nano-electronic devices is expanded. The material has the potential to become one of excellent reserve materials of spinning thermoelectric nano devices.

The invention discloses a novel method for preparing a coralline In2O3 nano material by a low-heat solid-phase precursor method. According to the method, indium nitrate hydrate (In (NO3) 3 * xH2O) and sodium hydroxide (NaOH) are used as raw materials, a precursor is generated through a solid-phase chemical reaction, then calcination treatment is carried out under the low-temperature condition of 300 DEG C, and the In2O3 nanosheet material formed by self-assembly of nanoparticles is obtained after washing and vacuum drying. According to the method, a solvent-free solid-phase reaction system is innovatively adopted, the limitation of an organic solvent in a traditional liquid-phase method is broken through, the contact efficiency of a reaction interface is effectively improved, and the reaction energy consumption is reduced. The preparation method has the characteristics of simple operation steps, high safety coefficient, environmental friendliness, easiness in realization of large-scale production and the like, and has certain technical enlightenment for large-scale preparation of high-end nano devices such as photoelectric catalytic materials and gas sensitive sensor elements.

The invention discloses a photoresist composition based on metal nanoparticles and application of the photoresist composition. The photoresist composition comprises metal nanoparticles, a photosensitizer, an anti-diffusion agent and a photoresist solvent, wherein the metal nanoparticles are silver nanoparticles, copper nanoparticles and gold nanoparticles. The photoresist composition has good film-forming property and excellent patterning imaging capability, photoetching patterns with different resolutions can be obtained through ultraviolet, electron beam or extreme ultraviolet exposure, and the formed patterns have good conductivity after being subjected to heat treatment and can be directly used for processing micro-nano devices.

The application discloses a preparation and editing method of a magnetic micro-nano robot with in-situ re-editing capability, and belongs to the field of micro-nano devices. The method comprises the following steps: preparing a sacrifice layer by polyvinyl alcohol, spin-coating pNIPAM to prepare a flexible hinge layer by using a photoetching process, and preparing two magnetic driving modules by using SU-8 of pre-mixed nickel nanowires with different diameters, so as to obtain the micro-nano robot after releasing. When re-editing, one of the magnetic driving modules or both of the magnetic driving modules can be selectively magnetized by an external magnetic field, and the in-situ re-editing of the micro-nano robot is completed. The preparation process of the application is simple, the re-editing of the micro-nano robot can be realized by the simple external magnetic field, more movement modes are provided, the problems of the existing micro-nano device movement modes still being rigid and the like are solved, the flexibility is further improved, and the application has important application prospects in the fields of biological medicine, environmental detection and the like.

According to the method for rapidly testing the growth tendency of the metal whiskers and growing the metal whiskers in situ, the MAX phase serves as an A metal atom source, the growth tendency of the metal whiskers is rapidly tested, and a new technology for preparing the metal whiskers in a large scale is developed by means of the phenomenon. According to the method, an MAX phase and an alloy matrix form metallurgical bonding through hot pressing, active A atoms are provided for growth of the metal whiskers, and therefore reliable and rapid detection of the growth tendency of the metal whiskers on the to-be-detected alloy is achieved. The innovation and significance of the invention are as follows: (1) A-site atoms provided by the MAX phase are utilized to test the accommodation limit of different alloy components and organization structures to active A atoms, a new rapid and reliable metal whisker growth tendency evaluation technology is developed, and the method has important significance in evaluation of Sn whisker growth problems in electronic connection; and (2) a new technology for in-situ and rapid growth of the metal whiskers in the metal matrix is developed, and a new technical approach is provided for preparation of micro-nano devices such as MEMS (micro-electromechanical systems) and the like.

The invention discloses a micro-nano device photoetching process based on surface energy repair and a micro-nano device, and relates to the technical field of photoetching. The process provided by the invention comprises the following steps: carrying out plasma cleaning on a substrate, immersing the substrate subjected to plasma cleaning into an organic cleaning solvent, and removing an unstable metamorphic layer and pollutants on the surface of the substrate by adopting at least one of soaking, stirring and ultrasonic treatment, then, the cleaned substrate is adopted to carry out subsequent photoetching and micro-nano machining processes; the step of organic solvent cleaning is added after substrate plasma cleaning, an unstable metamorphic layer is disintegrated and other impurities are removed through permeation and slight dissolution effects of an organic solvent on the surface of the substrate, so that the surface of the substrate is recovered to a smooth and stable state; therefore, the defects of edge collapse, side wall roughness and the like of the photoresist pattern in the photoetching process are remarkably reduced, and the photoetching morphology precision and the production yield of the micro-nano device are effectively improved.

The application belongs to the field of organic / polymer neuromorphic devices, and specifically provides a nano neuromorphic device with an organic two-dimensional conjugate symmetric polymer as an active layer, and a preparation method and application thereof. The nano device is manufactured in the form of an 8*8 cross switch array through electron beam lithography technology and stripping method, and the width of the word line and the bit line is 100 nm and 200 nm respectively, which is a very small nano structure. The device realizes record-high yield of the polymer memristor with minimization and low potential, and simultaneously realizes fast response within 20-40 ns, the variation range of D2D is less than 10%, the device yield is higher than 90%, and the device can reach 50-100 nm scale, and the power consumption is lower than 20 J / bit. The polymer memristor array can realize storage and calculation integration, and can be used for information storage, and has excellent application prospect in the field of artificial intelligence.

The present invention discloses a method for arranging one-dimensional magnetic materials over a large area in a solution, the key of which is the preparation of a large-area parallel magnetic field device. The method first utilizes a large-area parallel magnetic field device to orderly adsorb and arrange the one-dimensional magnetic materials dispersed in the solution on a desired substrate in the direction of the parallel magnetic field, and then removes the solution under certain conditions, thereby achieving a directional and orderly arrangement of the one-dimensional magnetic materials over a large area. The method of the present invention is not only simple to operate, the required device is easy to manufacture and low in cost, but also easy to arrange one-dimensional magnetic materials over a large area with controllable thickness on substrates of 4 inches or more. This large-area preparation method will greatly promote the large-scale, mass production of one-dimensional magnetic material micro-nano devices.

The application discloses an intelligent response type DNA nano device and a construction method and application thereof, and belongs to the field of DNA nanotechnology; the intelligent response type DNA nano device comprises a plurality of different DNA tetrahedron basic units and extension chains and miRNA response chains arranged on the DNA tetrahedron basic units; wherein the DNA tetrahedron basic units are connected by base complementary pairing between the extension chains and the miRNA response chains to form a multimer structure; the miRNA response chain comprises a base sequence capable of specific complementary pairing with a target miRNA to be detected, and the extension chain and the miRNA response chain are separated, so that specific configuration transformation of the nano device is induced. Through programmable assembly of the DNA tetrahedron and miRNA-induced configuration dynamic response, high specificity, high sensitivity, multi-channel parallel detection of a plurality of miRNAs are realized, and problems such as insufficient specificity, low sensitivity and poor targeting of a traditional miRNA detection method are overcome, so that the application has a wide application prospect in the fields of biomedical research and clinical diagnosis.

The invention provides a two-photon polymerization initiator as well as a preparation method and application thereof. The two-photon polymerization initiator has a structure as shown in a formula 1. The two-photon polymerization initiator provided by the invention can initiate two-photon polymerization of a photocuring material, has the function of a fluorescent probe, and has significantly enhanced fluorescence emission intensity after the photocuring material is cured, so that a strong fluorescence contrast is formed in a polymerized region and an unpolymerized region; in-situ and on-line monitoring of shapes such as boundary dimensions and internal defects of polymerization products can be realized, processing parameters can be adjusted in time, and the yield and the processing efficiency of micro-nano devices are improved.

The invention relates to the technical field of micro-nano 3D printing, in particular to photocuring additive manufacturing equipment for preparing a conductive device based on acoustoelectric combination, which comprises a resin pool, and substrate resin of conductive particles is placed in the resin pool. The sound field auxiliary module is used for enabling conductive particles in the photosensitive resin of the substrate to be uniformly and densely distributed in the vertical direction in the continuous forming process; the electric field auxiliary module is used for enabling the conductive particles in the photosensitive resin of the substrate to be specifically arranged in a deflection mode to form a conductive path; a printing platform is placed in the resin pool, the resin pool is installed on a vibration isolation table, a light source module and a projection module are installed on the vibration isolation table, the light source module emits a UV light source, the UV light source enters the resin pool through reflection of the projection module, and a printed piece is formed on the printing platform; and the micro-nano device with conductive capability can be manufactured with high efficiency and high precision.

The invention discloses a spin light current detection method based on a boundary region of a two-dimensional transition metal chalcogenide system. The detection method comprises the following steps: S1, preparing a two-dimensional transition metal chalcogenide micro-nano device; s2, a spin photocurrent detection and regulation platform is built, a laser emits a beam of laser, the beam of laser enters a chopper through a reflector, the laser passing through the chopper enters a polarizer, the laser passes through an electro-optical modulator after being changed, the beam is periodically modulated into linearly polarized light, left circularly polarized light and right circularly polarized light, and the linearly polarized light, the left circularly polarized light and the right circularly polarized light are polarized; then the light beams enter a microscope objective through a semi-reflecting and semi-transmitting flat plate and a light splitting crystal, and light spots are formed at the focus position of the microscope objective through convergence of the microscope objective; and S3, projecting a light spot formed by convergence of the microscope objective in the step S2 on the two-dimensional transition metal chalcogenide micro-nano device, and detecting and extracting spin light current. The method is used for accurately detecting, regulating and controlling the boundary spin photocurrent of WSe2 and promoting research and application of two-dimensional spin photoelectronic devices.

The invention discloses a method for preparing a double-sided structured micro-nano motor based on Pickering emulsion, and belongs to the technical field of nano device preparation, and the method comprises the following steps: preparing a paraffin-nano particle semi-surface structure by using Pickering emulsion; after selective modification is conducted on the surfaces of the exposed nano particles in the paraffin-nano particle semi-face structure, paraffin is removed, and eccentric nano particles are obtained; the invention discloses a micro-nano motor with a double-sided structure prepared on the basis of eccentric nanoparticles. The Pickering emulsion is creatively used for preparing the micro-nano motor of the double-sided structure, the method has the advantages of being simple, efficient, independent of equipment and the like, large-scale preparation of the micro-nano motor can be achieved, and industrial application of the micro-nano motor can be promoted.

The application belongs to the technical field of biomedicine, and relates to a mitochondrion-targeted nano device and a preparation method and application thereof, the nano device comprising a cascade-activated photodynamic molecular beacon and a mitochondrion-targeted delivery carrier, the cascade-activated photodynamic molecular beacon comprising an APE1 cleavage site and a microRNA recognition region. The cascade-activated photodynamic molecular beacon and the mitochondrion-targeted delivery carrier are self-assembled into a complex through electrostatic adsorption, and cascade activation and signal amplification are realized through the dual response of miR-146a / APE1 which is highly expressed in mitochondria of tumor cells. The application triggers precise and controllable cell pyroptosis through tumor-specific signals, reverses the immune-inhibitory microenvironment, converts the 'cold tumor' into a 'hot tumor', significantly improves the effect of cancer immunotherapy, has good biocompatibility and tumor selectivity, and provides a new strategy and tool for precise treatment of cancer.

The present disclosure relates to the field of micro-nano device technology, and in particular, to a nano-robot capable of efficient and targeted enrichment in inflammatory lesion tissues and use thereof. The nano-robot comprises a nanoparticle and at least two enzymes connected to the nanoparticle. At least one enzyme is used for driving the nano-robot in a physiological medium, and at least one other enzyme is used for sensing an inflammation lesion and controlling the motion direction of the nano-robot.

The invention belongs to the technical field of metal micro-nano optical devices and integrated circuit all-optical networks, and relates to an electro-optical controllable logic gate micro-nano device of a coupling resonant ring based on surface plasmon. The structure of the device comprises a Dyde silver substrate, a silicon dioxide slit resonance ring-MIM waveguide combined structure, a control waveguide structure and an optical path coupling structure. An integrated all-optical logic gate is designed on the nanoscale by using the FDTD method and utilizing the surface plasmon characteristics, and the functions of a NOT gate, a NOR gate, an XNOR gate and the like and rapid and efficient conversion on the same structure are realized by adjusting the coupling mode and the optical path of a transmission waveguide through voltage. The method has wide application prospects in the technical fields of optical signal processing, ultra-compact photonic integrated devices and sensing, can solve the problem of optical signal processing, improves signal control and transmission efficiency, assists the photonic integrated devices in miniaturization and multi-functionalization, reduces energy consumption, enhances optical computing capability and integrated optical regulation and control capability, and promotes technical development in related fields.

The invention relates to a micro-nano resonator-based magnetic head and a control method thereof, the magnetic head comprises a micro-nano resonator, a magnetic film and a support, the micro-nano resonator is arranged on the support, and the magnetic film is arranged on the surface of the micro-nano resonator; the magnetic head further comprises a micro-nano resonator, a magnetic film, a support and a motor positioner, wherein the support is fixed on the motor positioner. High-frequency voltage is applied to the micro-nano resonator, the magnetic film is driven to oscillate at high frequency, magnetic bits in a magnetic recording medium are driven to move under external excitation, when the magnetic bits pass through the position below the magnetic film, magnetic interaction causes vibration parameters of the micro-nano resonator to change, and reading of the magnetic bits is achieved; the motor positioner is used for regulating and controlling the distance between the magnetic film and the magnetic bits in the z direction to control the size of a magnetic field, writing, reading and deleting operation is carried out on the specified magnetic bits in the x and y directions, the response speed is high, and the energy consumption is low; a micro-nano device is integrated, the structure is simple, and the storage density and the regulation and control precision are improved.

The invention provides a method for preparing a flexible micro-nano device based on a carbon film, and belongs to the field of micro-nano device manufacturing. The invention provides a preparation method of a carbon film for preparing a flexible electrochemical sensor, which comprises the following steps: coating a first substrate with slurry containing graphene oxide and a polymer, and then carrying out carbonization reaction to form a graphite-like carbon film. The graphene oxide and the polymer are carbonized to form a continuous carbon film structure with high flexibility, excellent conductivity and good adhesive force, and the carbonized film can directly realize patterned microstructure processing on a wafer-level substrate, has good structural uniformity and repeatability, and is suitable for integrated manufacturing of large-scale flexible microelectrode arrays.

The present application relates to the technical field of micro-nano device manufacturing, and in particular to a micro-nano device based on two-dimensional MOFs material and a preparation method and application thereof.The present application provides a preparation method of a micro-nano device based on two-dimensional MOFs material, which comprises the following steps: peeling off two-dimensional MOFs material under a protective atmosphere to obtain a single crystal wafer; adhering a transfer sheet to the single crystal wafer and picking up the single crystal wafer to obtain an intermediate; adhering the intermediate to a bottom electrode and separating a polydimethylsiloxane film in the transfer sheet to obtain the micro-nano device based on two-dimensional MOFs material.The preparation process provided by the present application can effectively avoid damage to two-dimensional MOFs material caused by oxygen, solvents and high-temperature processes, realize the construction of single-crystal devices and make the single-crystal devices have good electrical properties.

The invention discloses a method for controlling the motion behavior of a micro-nano motor by adjusting the distribution asymmetry degree of an engine, and belongs to the field of intelligent materials and bionic micro-nano device construction. According to the method, on the basis of a liquid-liquid phase separation principle, polyacrylic acid and quaternized glucan are taken as elements, and condensed fluid drops are prepared in a buffer solution to serve as an engine regulator for enriching and protecting a biological enzyme engine; by adjusting the polarity of surface groups of solid-phase carrier microspheres and changing the interfacial tension among a condensate phase, a water phase and a solid phase, the three-phase tentacles among the condensate engine regulator, a solution and a substrate are further adjusted and controlled, so that the distribution asymmetry degree of a micro-nano motor engine is changed, the distribution condition of a biological enzyme engine in an interface area is changed, and the stability of the biological enzyme engine is improved. And regulation and control on the movement speed of the micro-nano motor driven by the biological enzyme are realized. According to the invention, a strategy for realizing micro-nano motor engine distribution asymmetry control by regulating and controlling the three-phase interfacial tension is provided for the first time.

The application provides a photothermal driving bowl-shaped polydopamine nanomotor and a preparation method thereof, and belongs to the technical field of micro-nano devices, wherein the photothermal driving bowl-shaped polydopamine nanomotor comprises a hollow bowl-shaped structure constructed by polydopamine, and the hollow bowl-shaped structure is obtained by removing polyacrylic acid nanoparticles after polydopamine is polymerized on one side of the polyacrylic acid nanoparticles to form a single-sided asymmetric structure. The photothermal driving bowl-shaped polydopamine nanomotor provided by the application has strong driving capacity, fast movement speed, and an easy-to-functionalize surface, and the preparation method is simple and can be used for macro preparation, so that the photothermal driving bowl-shaped polydopamine nanomotor has a wide application prospect in the fields of environmental governance, micro-nano processing and biological medicine.

The invention provides a preparation method of an electromechanical coupling micro-nano device and the electromechanical coupling micro-nano device, and is applied to the technical field of micro-nano manufacturing. The preparation method comprises the following steps: forming a device structure layer on a first side of a substrate, wherein the device structure layer comprises or is preset with a movable structure region and a fixed structure region; a patterned mask aligned with the substrate is fixed on the device structure layer, the pattern of the mask is provided with an opening, and the opening exposes the first area in the movable structure area; depositing a permanent magnet thin film on the first area through the opening of the mask, and removing the mask after deposition; forming a functional unit on a second region different from the first region in the movable structure region or in the fixed structure region, and forming an interconnection structure electrically connected with the functional unit on the fixed structure region; and partially or completely removing the substrate below the movable structure region in the device structure layer, and forming a cavity below the movable structure region to release part of the movable structure region including the first region.

The invention relates to an ultrasound-driven nerve regulation nano device for non-invasive treatment of epilepsy as well as a preparation method and application of the ultrasound-driven nerve regulation nano device. The ultrasound-driven nerve regulation nano device comprises a microenvironment response module, an ultrasound response module and a biological targeting module, the microenvironment response module is platinum nanoparticles, the ultrasonic response module is piezoelectric nanoparticles UIO-66-NH2, and the biological targeting module is brain targeting peptide; wherein the platinum nanoparticles are dispersed and embedded in a UIO-66-NH2 structure, and the brain-targeted peptide is modified on the surface of the UIO-66-NH2 structure. The nano device can effectively decompose hydrogen peroxide in an epilepsy focus area and reduce the oxidative stress level; the mechanical stress can be converted into an electric signal under the ultrasonic action to trigger neuron electrophysiological reaction, so that noninvasive precise regulation and control of an epilepsy reactive neural circuit are realized; meanwhile, the blood brain barrier can be efficiently traversed, and the cumulant of the epilepsy focus part in the brain is obviously enhanced through the synergistic effect of the external field ultrasound and the biological targeting module.

The utility model belongs to the technical field of microelectronic devices, and discloses a multilayer structure for tuning and / or excitation, which comprises a substrate, a non-metal layer, a conductive two-dimensional material layer and a metal electrode, and is characterized in that the non-metal layer is arranged on the upper surface of the substrate; the conductive two-dimensional material layer is arranged on the upper surface of the non-metal layer; the metal electrode is arranged above the conductive two-dimensional material layer; the metal electrode is electrically insulated from the substrate and the non-metal material, and is electrically connected with the conductive two-dimensional material layer. The resonator is simple in structure and easy to realize, not only can be used for mechanical property tuning, but also can be used as an actuator for resonance application; besides, the structure of the utility model is a planar thin two-dimensional structure, the mass is light, and the structure and a suspended nonmetal layer in a micro-nano device are directly integrated on the same plane, so that the size of an NEMS or MEMS device can be obviously reduced, and the cost of the NEMS or MEMS system is reduced.

The invention discloses a micro-nano device preparation-oriented environmental parameter prediction type industrial cleaning system and a regulation and control method, and the system comprises a multi-mode sensing network which is distributed in a key process area of a clean room and in micro-nano manufacturing equipment, and is used for collecting environmental parameter data of temperature, humidity, particulate matter concentration, air pressure difference and vibration amplitude in real time; the data acquisition and communication unit is in signal connection with the multi-mode sensing network; and the prediction control unit comprises a data processing module, a prediction analysis module, a decision control module and an actuator network. According to the invention, the future environment trend is accurately predicted through the environment parameter prediction model, and the prospective regulation and control instruction is generated based on the prediction result, so that intervention is carried out before the environment parameters substantially exceed the standard, the hysteresis of traditional feedback control is fundamentally eliminated, and the control precision is improved. A more stable environment guarantee is provided for key process steps, and the preparation yield of the micro-nano device is greatly improved.

The present invention relates to the field of functional materials and micro-nano devices, and discloses a method for photochemical deposition of copper and a method for conformally depositing a copper pattern on the inner wall of a device. The method includes: (I-1) contacting a copper salt, a photoreductant, a neutral multidentate ligand with a first deionized water, respectively, to prepare a copper salt mother liquor, a photoreductant mother liquor, and a neutral multidentate ligand mother liquor; (I-2) mixing the copper salt mother liquor, the photoreductant mother liquor, the neutral multidentate ligand mother liquor, and a second deionized water to prepare a precursor solution; (I-3) adding the precursor solution dropwise onto the surface of a substrate, performing a photochemical reaction using ultraviolet light illumination, and depositing a copper film on the surface of the substrate. The present invention utilizes a photochemical reaction rather than a conventional catalytic reaction to carry out liquid-phase metal deposition. The method of the present invention is simple, can efficiently complete patterned deposition and conformal deposition, and is applicable to complex-shaped substrates and / or the inner wall of a device.

A microelectronic structure including a first nano device that includes a plurality of first transistors and a second nano device that includes a plurality of second transistors. The first nano device and the second nano device are parallel to each other. A double diffusion break that extends across the first nano device and the second nano device. A back-end-of-the-line (BEOL) layer located on a frontside of the first nano device and the second nano device. A backside interconnect located on a backside of the first nano device and the second nano device and the BEOL layer is connected to the backside interconnect through the double diffusion break.

This invention discloses a semi-flexible sealed composite material beam-membrane-island structure for micro / nano devices and its fabrication method. The invention employs both rigid and flexible materials to construct the beam-membrane-island structure of the micro / nano device. The beam and island structures are made of rigid materials that can be fabricated in micro / nano dimensions, while flexible materials fill the periphery of the beam and island structures. The flexible filling layer acts as a "displacement coordination layer," ensuring a clear mechanical response while maintaining the high modulus of the silicon beam. Simultaneously, the local deformation of the flexible layer absorbs lateral coupling stress, allowing strain fields in different directions to be separated and amplified in the beam / island region. The flexible material forms a stress transition zone between the beam and island, preventing strong stress concentration in the pure silicon beam-island structure under concentrated loads. This invention still uses materials compatible with micro / nano fabrication processes as the main structural material, enabling integration with standard photolithography, reactive ion etching, deep silicon reactive ion etching, anodic bonding processes, through-silicon vias (TSVs), and glass vias, among other micro / nano processes.