Method of fabrication and device comprising elongated nanosize elements
A nanoscale, component technology that is used in semiconductor/solid state device fabrication, chemical instruments and methods, nanotechnology, etc.
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[0084] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings.
[0085] refer to figure 1 , 2 and 3, illustrate the main process steps involved in the fabrication of a simple device and an example of a simple device, namely the fabrication of a field effect transistor (FET).
[0086] figure 1 Denotes FET part 1. The device is a three terminal device comprising a source 2 and drain 3 and a gate 4 electrically connected to wires (not shown). Electromagnetic semiconductor material for source and drain - Ga 1-x mn x As (GaMnAs), but may also be made of other materials suitable for semiconductors. The source 2 and the drain 3 are connected through a single-walled nanotube 6 . The electrodes of source 2, drain 3 and gate 4 may be semiconductor elements formed from the epitaxial layer above the nanotubes. A single electronic transistor device can be obtained with a similar design.
[0087] now refer to fig...
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