Micro-nano machining method based on electrochemical micro-nano system for functional material and device thereof

Abstract

The invention provides a micro-nano machining method based on an electrochemical micro-nano system for a functional material and a device thereof. According to the method and the device, a functional material of a micro-nano scale can be synthesized in situ on a specific substrate or a micro-nano chip for constructing an all-solid-state micro-nano device. The method comprises the following steps of: constructing an electrochemical reactor of a micro-nano scale to limit a physical-chemical process for synthesizing the functional material in a space of a micro-nano scale; and regulating and controlling a micro-area physical-chemical environment on a conducting substrate or a chip to be processed to synthesize the functional material of the micro-nano scale in situ on the conducting substrate or the micro-nano chip. The device comprises an electrochemical reactor of a micro-nano scale, an electrochemical workstation, a three-dimensional inching system of micro-nano accuracy, a video monitor and an information processing computer.

Description

technical field [0001] The present invention relates to a micro-nano processing method and device for functional materials based on electrochemical micro-nano systems, more specifically, to a method for in-situ synthesis of micro-nano-scale functional materials on a specific substrate or micro-nano chip The processing method and device can be used to construct all solid-state micro-nano devices. Background technique [0002] Driven by VLSI, MEMS, and precision optics industries, functional components are developing in the direction of miniaturization and integration, and even molecular devices at the single-molecule level. Since the assembly of molecular devices at the molecular level must rely on scanning probe microscopy (SPM), such as scanning tunneling microscopy (STM) and atomic force microscopy (AFM), the operation is complex and inefficient, and largely depends on the actual operator's experiment At present, the process of batch manufacturing functional components th...

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Problems solved by technology

It is not difficult to cultivate Prussian blue materials of various scales. However, due to its poor mechanical strength, it is necessary to assemble the cultivated Prussian blue materials into micro-nano devices and ensure good contact between Prussian blue and electrodes, that is, to have a low contact resistance, it is almost impossible to

So far, there are few reports on the in situ synthesis of micro-nano-scale functional materials on micro-nano devices with practical value.

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