Micro-nano machining method based on electrochemical micro-nano system for functional material and device thereof

A functional material, micro-nano processing technology, applied in microstructure devices, manufacturing microstructure devices, metal material coating processes, etc., can solve problems such as poor mechanical strength and low contact resistance

Inactive Publication Date: 2013-01-23
XIAMEN UNIV
View PDF6 Cites 20 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is not difficult to cultivate Prussian blue materials of various scales. However, due to its poor mechanical strength, it is necessary to assemble the cultivated Prussian blue materials into micro-nano devices and ensure good contact betwe

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Micro-nano machining method based on electrochemical micro-nano system for functional material and device thereof
  • Micro-nano machining method based on electrochemical micro-nano system for functional material and device thereof
  • Micro-nano machining method based on electrochemical micro-nano system for functional material and device thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0062] This example uses figure 1 The processing apparatus shown was carried out. Processing conditions: use a glass capillary with a tip opening diameter of 5 microns as the container of the electrochemical reactor, and the solution in the capillary contains 0.001mol / dm 3 Silicotungstic acid (H 4 SiW 12 o 40 ), the solvent is water; in an indoor environment; the Ag wire with a diameter of 0.3mm is used as a reference electrode and a counter electrode, and a platinum-plated glass sheet is used as a working electrode. Start the three-dimensional micro-motion system, and according to the screen observation of the video monitoring system, move the glass capillary so that the tip of the glass capillary gradually approaches the platinum surface until the solution at the tip of the capillary just contacts it. Start the electrochemical workstation, adopt cyclic voltammetry, and the parameters of cyclic voltammetry are as follows: scan rate 0.1V / s, highest potential 0.2V, lowest p...

Embodiment 2

[0064] This example uses figure 1 The processing apparatus shown was carried out. In this embodiment, sodium chloride crystals doped with potassium ferrocyanide, potassium ferricyanide and Prussian blue are synthesized on a microchip. Processing conditions: the microchip is cleaned after soaking in acetone for 12 hours; the container used has a tip diameter of 5 Micron glass capillary, the solution in the capillary contains 0.05mol / dm 3 Sodium chloride (NaCl), 0.001mol / dm 3 Potassium ferrocyanide (K 4 Fe(CN) 6 ), the solvent is water; in an indoor environment; the Ag wire with a diameter of 0.3mm is used as a reference electrode and a counter electrode, and the cleaned microchip is used as a working electrode. Start the three-dimensional micro-motion system, and according to the screen observation of the video monitoring system, move the glass capillary so that the tip of the glass capillary gradually approaches the characteristic position of the microchip until the soluti...

Embodiment 3

[0067] This example uses figure 1 The processing apparatus shown was carried out. In this embodiment, sodium chloride crystals doped with potassium ferrocyanide, potassium ferricyanide and Prussian blue are synthesized on a platinum-plated glass sheet. The processing conditions are as follows: a glass capillary with a diameter of 5 microns at the tip of the opening is used as the container, The solution in the capillary contains 0.05mol / dm 3 Sodium chloride (NaCl), 0.00001mol / dm 3 Potassium ferrocyanide (K 4 Fe(CN) 6 ), the solvent is water; in an indoor environment; the Ag wire with a diameter of 0.3mm is used as a reference electrode and a counter electrode, and a platinum-plated glass sheet is used as a working electrode. Start the three-dimensional micro-motion system, and according to the screen observation of the video monitoring system, move the glass capillary so that the tip of the glass capillary gradually approaches the surface of the platinum-coated glass slide...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Diameteraaaaaaaaaa
Login to view more

Abstract

The invention provides a micro-nano machining method based on an electrochemical micro-nano system for a functional material and a device thereof. According to the method and the device, a functional material of a micro-nano scale can be synthesized in situ on a specific substrate or a micro-nano chip for constructing an all-solid-state micro-nano device. The method comprises the following steps of: constructing an electrochemical reactor of a micro-nano scale to limit a physical-chemical process for synthesizing the functional material in a space of a micro-nano scale; and regulating and controlling a micro-area physical-chemical environment on a conducting substrate or a chip to be processed to synthesize the functional material of the micro-nano scale in situ on the conducting substrate or the micro-nano chip. The device comprises an electrochemical reactor of a micro-nano scale, an electrochemical workstation, a three-dimensional inching system of micro-nano accuracy, a video monitor and an information processing computer.

Description

technical field [0001] The present invention relates to a micro-nano processing method and device for functional materials based on electrochemical micro-nano systems, more specifically, to a method for in-situ synthesis of micro-nano-scale functional materials on a specific substrate or micro-nano chip The processing method and device can be used to construct all solid-state micro-nano devices. Background technique [0002] Driven by VLSI, MEMS, and precision optics industries, functional components are developing in the direction of miniaturization and integration, and even molecular devices at the single-molecule level. Since the assembly of molecular devices at the molecular level must rely on scanning probe microscopy (SPM), such as scanning tunneling microscopy (STM) and atomic force microscopy (AFM), the operation is complex and inefficient, and largely depends on the actual operator's experiment At present, the process of batch manufacturing functional components th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): B81C1/00
Inventor 詹东平杨德志
Owner XIAMEN UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap