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Substrate specificity. In an enzyme activity, the substrate must bind with the enzyme to become a catalyst of a chemical reaction. And most enzymes are highly specific particularly to the nature of the substrate they bind to. Substrate specificity is one of the most essential distinctive features of enzymes.
Method of controlling substrate transfer system
Provided is a method of controlling a substrate transfer system transferring substrates by controlling a first transfer device and a second transfer device comprising: a process of acquiring process module-specific substrate transfer positions for each of the plurality of process modules, wherein the process module-specific substrate transfer positions are substrate transfer positions of the mounting parts of the first transfer device for allowing the second transfer device to place substrates at centers of the stages, the second transfer device transferring substrates from the mounting parts of the load lock module to the stages of the process modules.
Owner:TOKYO ELECTRON LTD