The invention belongs to the technical field of flexible
macro-micro drive
motion system preset output tracking control, and particularly relates to a flexible
macro-micro drive
motion system preset output tracking control method based on active disturbance rejection, which specifically aims to estimate and compensate multi-
modal vibration caused by a flexible hinge, an elastic structure and the like in real time through a linear extended
state observer (LESO); the influence of high-frequency
resonance on the
system stability is reduced; an anti-saturation compensator is introduced to dynamically adjust the control quantity, the output saturation problem of the piezoelectric stack caused by input
voltage amplitude limiting is avoided, and the physical
realizability of a control instruction is ensured; and in combination with a preset
performance function and a dynamic surface method, a tracking controller giving consideration to both
transient response and steady-state precision is designed, and meanwhile, an LMI optimization control distribution strategy is utilized to coordinate the cooperative action of a
macro-
micro actuator under saturation constraint, so that the uncertainty of the
system to the model and the robustness of the
system to external disturbance are enhanced.