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873 results about "Motion system" patented technology

Motion system is a component of a test and measurement system that provides motion to a load or loads in a one or many directions. Generally a motion system is made up of a set (or stack) of linear and rotational stages. A linear stage moves in a straight line, while a rotation stage moves in a partial or full circle. A stage can either be manually controlled with a knob control, or automated with a motion controller.

Inertial navigation attitude resolving method and device based on sensor fusion

The invention provides an inertial navigation attitude resolving method and device based on sensor fusion. The method comprises the following steps: carrying out multi-clock domain synchronous calibration processing on a double-antenna GNSS system, an IMU inertial measurement unit and an antenna servo system in a vehicle-mounted communication-in-motion system; according to the time synchronization reference, carrying out quality evaluation and weight distribution processing on the GNSS satellite signal under the satellite communication in motion antenna pointing constraint; and carrying out multi-sensor fusion resolving processing on the inertial attitude of the vehicle body according to the time synchronization reference and the GNSS observation data weight distribution result. According to the method, millisecond-level time synchronization is realized by establishing a robust extended Kalman filtering model of a multi-dimensional extended state vector, GNSS signal quality is optimized by adopting an adaptive weight distribution strategy of antenna pointing constraint, and attitude fusion precision is enhanced by utilizing high-precision angle feedback of an antenna servo system. The problem that a traditional attitude resolving method in a vehicle-mounted communication-in-motion system is not high in precision is solved.
Owner:SHENZHEN RUISHU TECHNOLOGY CO LTD

Small-sized automatic seeding machine suitable for hole seeding crops

The invention discloses a small automatic seeder for hole sowing crops, which consists of a mechanical system and a control system, the mechanical system comprises rear wheels, an electric box, a first steering engine, a seed-metering device movement turntable, a translation rod, a seed box, a second steering engine, a front wheel, a first motor, a hose, a seed-metering device, a seed-metering device connecting rod, a second motor, a shell, a steel wire, a seed-metering device fixing ring, an infrared sensor and a frame; the control system comprises a sensing input system and a motion system. According to the device, seeds are tidied before seed metering, and the seed falling number is accurately controlled; the three-petal type seed-metering device is adopted, so that the device can be used for soil with relatively high hardness, and integration of hole digging, seed burying and soil covering is realized; the porous seed tray is manufactured through 3D printing, the design is more reasonable, manufacturing is more convenient and faster, multiple purposes can be achieved by replacing the seed tray, and planting of different crops and different planting requirements are met; path planning is performed according to the initial design, and the seeding depth and spacing are adjusted, so that manpower and material resources are saved, and a scheme is provided for realizing large-scale integrated planting.
Owner:BEIJING UNIV OF CHEM TECH

Hemispherical harmonic oscillator precision trimming device and method based on femtosecond laser

The invention provides a femtosecond laser-based hemispherical harmonic oscillator precision trimming device and method. The femtosecond laser-based hemispherical harmonic oscillator precision trimming device comprises a vacuum system, a femtosecond laser trimming system, a clamp, a workpiece movement system and a mass imbalance test system, the femtosecond laser trimming system comprises a focusing module, a laser light path, a femtosecond laser, a femtosecond laser energy continuous regulation and control module and a femtosecond laser patterning and control system; the workpiece movement system comprises a workpiece autorotation mechanism and a workpiece translation mechanism; the workpiece autorotation mechanism is used for realizing autorotation movement of the clamp and the hemispherical harmonic oscillator; the workpiece translation mechanism is connected with the workpiece autorotation mechanism and is used for realizing three-direction translation motion of the hemispherical harmonic oscillator and the workpiece autorotation mechanism; the mass imbalance test system comprises a harmonic oscillator excitation module and a test module. The harmonic oscillator excitation module is used for exciting the hemispherical harmonic oscillator; and the test module is used for detecting the vibration of the excited hemispherical harmonic oscillator. According to the invention, the influence on the stability of the standing wave of the harmonic oscillator and the precision of the gyroscope caused by an overhaul pit is effectively reduced.
Owner:BEIJING AUTOMATION CONTROL EQUIP INST

Adsorption module and motion system

The invention provides an adsorption module and a motion system, and relates to the technical field of precision equipment. The adsorption module comprises an adsorption substrate, a rotating base, a rotating shaft module, a wafer bearing table and a suction cup. The rotating base is fixedly connected with the adsorption substrate, and the rotating shaft module can rotate relative to the rotating base; the rotating shaft module can move in the axial direction of the rotating shaft module relative to the rotating base; the rotating shaft module is configured to be connected with the suction cup or the rotating base in an air pressure connection mode. The wafer bearing table is configured to be capable of adsorbing the suction cup or supporting the suction cup in an air floatation mode.
Owner:YINGUAN SEMICON TECH CO LTD

Coordinated motion system and method

A vehicle system includes a first machine having a first controller, a second machine having a second controller, and a third controller in communication with the first controller and the second controller. The third controller is configured to receive a movement command, and send the movement command to the second controller. In response to receiving the movement command, the second controller is configured to send the movement command to the first controller, so that the first machine and the second machine perform the movement command substantially simultaneously.
Owner:OSHKOSH CORPORATION

Proportional servo valve spool displacement control method taking unknown hysteresis compensation into consideration

PCT designated stageWO2025189407A1Controllers with particular characteristicsInverse hysteresisClassical mechanics
A proportional servo valve spool displacement control method taking unknown hysteresis compensation into consideration. The control method is based on the idea of using a parameter adaptive law to learn an inverse model of an unknown hysteresis phenomenon and making a desired output signal undergo an estimated inverse hysteresis model in advance, thereby designing a non-linear robust position controller for online inverse compensation of the unknown hysteresis phenomenon. To address the problem of there being hysteresis nonlinearity in the output electromagnetic force of a proportional solenoid that drives a spool to move, the method can not only ensure the active elimination of unknown hysteresis nonlinearity, but can also eliminate other disturbances that are difficult to model in a spool motion system, thereby improving the operability and performance consistency of a hydraulic valve and realizing high-precision tracking of the spool position.
Owner:NANJING UNIV OF SCI & TECH

S-shaped trajectory planning algorithm for multi-axis time synchronization

The invention discloses an S-shaped trajectory planning algorithm for multi-axis time synchronization, which belongs to the field of robot moving trajectory algorithms and realizes synchronization of multi-axis movement time by properly modifying an original trajectory. And the problem that the speed, the acceleration or the motor torque of the robot exceeds the allowable range of the motor possibly caused by dynamic saturation limitation of a motion system is solved. The method mainly comprises the step of carrying out independent trajectory planning on each axis by adopting a sectional S-shaped trajectory planning method, and comprises the following steps of: judging whether the maximum acceleration can be reached or not; judging whether a constant speed section exists or not; whether the acceleration section and the deceleration section can reach the maximum acceleration and deceleration speed or not is judged; 6-axis movement time adjustment: setting the new movement time of the other 5-axis as the longest movement axis time; and S4, performing synchronous scaling on the six-axis time by utilizing the parameters of the axes redefined in the step S2, and re-planning a joint motion track. The S-shaped trajectory planning method is mainly used for S-shaped trajectory planning of multi-axis time synchronization of the robot.
Owner:临沂临工智能信息科技有限公司

Single motion system for coupling a trailer hitch

A trailer hitch including a tube having ball socket, a top plate connected to the tube, where the top plate includes an opening designed and configured to receive a hitch ball. The trailer hitch also includes a lower plate, where the top plate includes an opening designed and configured to receive a hitch ball, and where the lower plate is connected to the top plate via first and second sidewalls, and the top plate, lower plate and first and second sidewalls form a space. The trailer hitch further includes a slide plate positioned within the space and configured to slide between the top plate and lower plate, where the top plate includes an opening designed and configured to receive a hitch ball, and the slide plate may be configured to move between an open position and a closed position, where the open position enables a hitch ball to pass through the opening of the slide plate and the closed position prevents a hitch ball from passing through the opening in the slide plate.
Owner:DEXTER AXLE CO LLC

Multi-unmanned ship formation hunting control method based on reinforcement learning

The invention discloses a reinforcement learning-based multi-unmanned ship formation hunting control method, which comprises the following steps of: constructing a multi-unmanned ship motion system influenced by environmental interference, and constructing a hunting formation error variable; constructing a virtual controller of the unmanned ship by adopting a backstepping method based on the encircling formation error variable; constructing a leader ship formation hunting controller based on a reinforcement learning method in combination with a neural network; constructing a following ship formation hunting controller based on an adaptive backstepping method in combination with the Lyapunov theory and a neural network; and according to the leading ship formation hunting controller and the following ship formation hunting controller, formation hunting control of the target ship is realized. The problem that the control performance of the multiple unmanned ships is insufficient due to the interference of complex marine environments such as wind, waves and flow in the process of efficiently executing a hunting task in the formation of the multiple unmanned ships, the cooperative relationship between the chasing unmanned ships cannot be fully reflected, the formation of the multiple unmanned ships is difficult to control, and the hunting efficiency of the multiple unmanned ships is improved is solved. And the control is difficult to realize at the cost as low as possible.
Owner:DALIAN MARITIME UNIVERSITY

Double-station circuit board beveling machine

The invention discloses a double-station circuit board beveling machine, and relates to the technical field of circuit board processing equipment.The double-station circuit board beveling machine comprises a first base and a first tool apron, and the first tool apron is supported on the first base through a tool apron displacement assembly; the tool apron displacement assembly comprises a first left-right translation module, a first height adjusting module and two first front-back displacement modules which are symmetrically arranged, and the first left-right translation module and the first height adjusting module drive the two first tool aprons to integrally displace in the Y-axis direction and the Z-axis direction; each first front-back displacement module can independently drive a first worm and gear rotation device to move in the Y-axis direction, the first worm and gear rotation device rotates the angle of a first tool apron, angle adjustment is completed, a double-tool-apron structure which is symmetrically arranged up and down can synchronously cut the upper edge and the lower edge of a circuit board at the same time, and a three-axis movement system is matched, so that the machining efficiency is improved. And a worm and gear angle adjusting mechanism is combined, so that positioning is more accurate, and precision is higher.
Owner:SICHUAN EGGSON INTELLIGENT TECH CO LTD

Systems and methods for dynamic bridge weight in motion

System and method for monitoring vehicular traffic on a bridge, including receiving digital data representing the response of the bridge to a traffic event, where the digital data has been collected during the traffic event, from displacement sensors and accelerometers mounted on the superstructure of the bridge, wherein the digital data from the displacement sensors embody bending responses of the bridge, the digital data from the accelerometers embody acceleration responses of the bridge, and the digital data from the sensor are synchronised in the same time space, providing a parametric model which uses modal parameters to simulate generalized boundary conditions and two-dimensional behaviour of the bridge; using the parametric model to process the digital data to solve for deformation of the bridge and characteristics of the vehicle traffic, and generating an output that describes the deformation of the bridge and characteristics of the vehicle traffic.
Owner:UNIVERSITY OF NEW BRUNSWICK

Foldable lateral motion system

A system and methods for training lateral motions. The disclosed system can include an elongate core member having a proximal end and a distal end; a pivoting guide arm rotationally coupled to the proximal end of the elongate core member via a pivoting joint, the pivoting guide arm comprising a foot pedal opposite the pivoting joint for securing a foot of a user; and a resistance system mounted to the elongate core member, the resistance system comprising a brake drum affixed to the elongate core member and having a friction strap threaded therethrough, the friction strap being affixed to the pivoting guide arm and rotationally coupled to the elongate core member, wherein the friction strap is configured to apply a friction force to the brake drum as the foot pedal of the pivoting guide arm is pushed laterally away from the elongate core member.
Owner:NEW MODALITY SPORTS INC

Pose decoupling kinematics calibration method, device and equipment and storage medium

The invention discloses a pose decoupling kinematics calibration method, device and equipment and a storage medium. The method comprises the following steps: constructing a pose decoupling motion model based on an equivalent rotation vector and a rigid body motion transformation rule; a pose error is introduced, pose space decomposition is carried out through the pose decoupling motion model, and a pose error expression and a position equivalent expression are obtained; analyzing the coupling influence of the attitude change on the position according to the attitude error expression and the position equivalent expression to obtain a pose coupling increment; constructing a target decoupling calibration model according to the pose coupling increment and the initial decoupling calibration model; and adopting a least square method to carry out geometric error solution of different degrees of freedom on the target decoupling calibration model according to the preset axis pose error to obtain a calibration error. The technical problem that the calibration and compensation effects are poor due to the fact that the influence of the posture in a multi-degree-of-freedom motion system on the position is not considered in the prior art and the error difference between different degrees of freedom is difficult to eliminate can be solved.
Owner:GUANGDONG UNIV OF TECH

Head mounted display (HMD) device calibration based on hinge motion

Systems and techniques are described herein for using head mounted display (HMD) hinge motion to calibrate the head mounted device. For example, an device (or component of the device) can obtain, via one or more sensors, sensor measurements during rotation of a display of the HMD between a first end of a range of motion of a hinge of the display about an axis and a second end of the range of motion of the hinge about the axis; determine parameters of the HMD based on the sensor measurements and the rotation of the display between the first end of the range of motion of the hinge and the second end of the range of motion of the hinge about the axis; and determine pose information for the HMD based on the determined parameters.
Owner:QUALCOMM INC

Diagnostic method for localizing technical faults in a motion system

A diagnostic method localizes technical faults in a motion system that includes a base adapted to receive a motion stage for equipment, a machine frame resting on the floor, dampers adapted to support the base, and an active isolation system arranged between the base and the machine frame. The active isolation system and the base form a mechanical system. The active isolation system includes actuators, adapted to impart six degree-of-freedom (DOF) motion to the base in a reference frame, and inertial sensors adapted to provide a six DOF measurement of the base's motion. The method includes: i) applying a control signal for actuating or contributing to the actuation of the actuators of the active isolation system to impart a motion to the base; ii) obtaining, with the inertial sensors, a six DOF measurement of the base's motion relative to a reference point; iii) creating a measured process sensitivity matrix of the mechanical system using the six DOF measurement; and iv) determining, based on the measured process sensitivity matrix, whether all the actuators and sensors of the active isolation system are working as expected and / or whether there is a pivot point impeding the movement of the base.
Owner:ETEL SA

State dependent motion cueing

A motion cueing system for a flight simulator includes a motion system controller configured to generate actuation commands for a movable simulator platform. The actuation commands are based on at least one of: an absolute attitude of a simulated aircraft; or a weighted function of a groundspeed of the simulated aircraft.
Owner:LOFT DYNAMICS AG

Slat movement system for aircraft

The illustrative examples provide a slat movement system for use in an aircraft. An aircraft comprises a wing having a fixed edge and a wing front spar, and a moveable slat connected to the wing by a four bar linkage and a slat arm, the slat arm movable along a track comprising a slot terminating prior to the wing front spar.
Owner:THE BOEING CO

Quadruped robot anti-disturbance motion control method based on reinforcement learning

The invention discloses a quadruped robot anti-disturbance motion control method based on reinforcement learning and application, and belongs to the field of robot motion control. Firstly, a self-adaptive propulsion control frame is provided, and a propeller and a leg movement system of the quadruped robot are deeply fused. And secondly, through cooperative training of a double-encoder system (a teacher encoder and a student encoder) and a predictor, hidden state extraction and environment disturbance reconstruction are realized, so that the robot adjusts a motion strategy in real time under complex scenes such as actuator faults and water flow interference. And finally, in combination with multi-stage reinforcement learning training and privilege information utilization, strategy network output is optimized, and a speed and trajectory tracking task is completed. The motion robustness of the robot under unknown interference and damage conditions is remarkably improved through cooperative control of the propellers and the legs, anti-disturbance decision of hidden state driving and dynamic reward function design. The method is suitable for amphibious environments, can adapt to diversified disturbance scenes without additional fine adjustment, and has high practicability and reliability.
Owner:SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI

Motion system for vascular intervention navigation surgery system

PendingUS20250064614A1StentsGuide wiresCatheterBlood vessel trunk
A motion system for a vascular intervention navigation surgery system is configured to control the motion of the vascular intervention navigation surgery system. The motion system has a support base and the vascular intervention navigation surgery system. The motion system provides more degrees of freedom of motion and other functions for the vascular intervention navigation surgery system, guidewires, catheters, stents, etc., making it more convenient to perform vascular intervention surgery. The motion system further includes a force reproduction system for the vascular intervention navigation surgery system. The force reproduction system can effectively detect a resistance of the guidewire in blood vessels, and by processing the resistance, determine the further movement status of the guidewire, thereby improving the safety and operational efficiency of vascular intervention surgery.
Owner:J ROBOTICS MEDICAL LTD

Sunken type 3D printing liquid level control device and method

The invention belongs to the technical field of 3D printing, and relates to a sinking type 3D printing liquid level control device and method. A forming table movement system of the control device is provided with a forming table placed in the multifunctional stock bin; a forming table movement mechanism is arranged corresponding to the forming table; the forming table movement mechanism is provided with a left cantilever and a right cantilever which are located over the forming table and arranged in a bilateral symmetry mode. The rear ends of the left cantilever and the right cantilever are fixedly connected with the Z-direction movement mechanism; the front end is positioned right above the multifunctional stock bin; the arranged liquid level detection system comprises at least one liquid level sensor which is parallel to the forming table; the multifunctional stock bin comprises an inner bin and an outer bin; according to the sinking type 3D printing scraper-free liquid level leveling device, the functions of scraper-free liquid level leveling of sinking type 3D printing, stable operation of a curing light source, timed stirring of light curing liquid and constant-temperature control are achieved, and long-term stable and rapid operation of sinking type 3D printing equipment is guaranteed.
Owner:SINOSTEEL LUOYANG INSTITUTE OF REFRACTORIES RESEARCH CO LTD

Automatic calibration equipment

The utility model discloses automatic calibration equipment, and relates to the technical field of calibration equipment. The calibration tool is used for installing a product to be calibrated, the transfer trolleys are used for carrying the calibration tool, the incubator is provided with a three-axis movement system and an intelligent control system, the manipulator is used for grabbing the calibration tool on the transfer trolleys into the incubator, and a sliding device for driving the manipulator to move is arranged at the lower end of the manipulator. The device has the advantages of being high in automation degree, accuracy and reliability.
Owner:SHANGHAI DISTRIBUTED ARTIFICIAL INTELLIGENCE SCHOLAR TECH

Dynamic positioning control method for under-actuated unmanned surface vehicle

The invention relates to a dynamic positioning control method for an underactuated water surface unmanned ship, and the method comprises the steps: outputting the real-time motion state information of the unmanned ship through Beidou second generation, integrated navigation and AIS equipment carried by the unmanned ship at the current moment, and carrying out the filtering through a nonlinear estimation filter. Meanwhile, a nonlinear PID environment compensator is designed to compensate marine environment interference received by the underactuated unmanned surface vehicle; constructing a dynamic positioning controller based on a model predictive control algorithm (MPC) to receive the filtered real-time motion state information of the unmanned ship and predict the motion state of the unmanned ship at the future moment to obtain an optimal command rudder angle, and outputting the optimal command rudder angle to an unmanned ship motion system; and the unmanned ship motion system continuously feeds back the actual value to the controller to perform rolling optimization. According to the invention, dynamic positioning of the underactuated marine survey unmanned ship under complex sea conditions can be realized, and accurate marine environment survey can be carried out on a sea area with a specified coordinate.
Owner:CHINA STATE SHIPBUILDING CORP NO 707 RES INST

Ship motion intelligent forecasting method and system integrated with system state estimation

The invention belongs to the technical field of ship and ocean engineering, and discloses a ship motion intelligent forecasting method and system integrated with system state estimation, and the method comprises the steps: segmenting the time calendar data of the motion of a certain degree of freedom of a ship and the corresponding wave time calendar data, and obtaining a training set and a test set of time calendar forecasting; the optimal lag order # imgabs0 # is obtained through wave-ship motion system lag order analysis, a training set is divided through a sliding window according to the optimal lag order # imgabs1 #, and an ANN forecasting model is constructed according to the obtained data set; and obtaining a ship motion forecasting result according to the constructed ANN forecasting model. According to the method, wave-ship motion lag order calculation is integrated into an intelligent model ANN pretreatment method from the time sequence analysis theory, the mapping relation of the ANN model for capturing wave excitation and motion response is improved, great help is provided for the model to learn the mapping relation between the wave time calendar and the motion time calendar, and the method can be applied to the intelligent model ANN pretreatment method. And the intelligent forecasting precision of the ship motion is greatly improved.
Owner:QINGDAO INNOVATION & DEV CENT OF HARBIN ENG UNIV +1

Automated control method and system based on optimal iterative learning control and feedforward control

The application belongs to the technical field of industrial automation control, and provides an automation control method and system based on optimal iterative learning control and feedforward control. The automation control method comprises the following steps: constructing an automation control model by using an optimal iterative learning control algorithm and a model-based feedforward control algorithm; optimizing the automation control model; and implementing automation control based on the automation control model. The automation control method based on optimal iterative learning control and feedforward control solves the problems of performance decline of the optimal iterative learning control algorithm when the trajectory changes and possible degradation of the model-based feedforward control algorithm under actuator constraints, and can realize high-precision tracking and reliable control under repeated and non-repeated tasks, and is suitable for high-precision trajectory tracking and actuator constraint management of industrial motion systems.
Owner:YANCHENG INST OF TECH +1

Cluster robot platform and system based on implicit cooperation and multi-dimensional perception

The invention relates to a cluster robot platform based on implicit cooperation and multi-dimensional perception, and aims to improve the performance of a cluster robot in the aspects of measurement precision, perception capability and real-time performance. The platform is composed of a cluster robot hardware system and a software system. The hardware system comprises a bottom layer motion system, an optical cooperation beacon system and a main control board. A software system realizes cooperation and efficient behaviors among cluster robots through a multi-neighbor recognition and identity matching mechanism, a cooperative positioning mechanism, a relative speed direction measurement and calculation mechanism and a realistic differentiation information perception mechanism. The robot can accurately identify neighbors, perform calculation and adjust behaviors in real time so as to adapt to complex cluster tasks. The cluster robot platform supports verification and adaptation of various cluster algorithms, has high-precision perception, excellent real-time performance and wide algorithm adaptation capacity, and provides a solid foundation for research, development and application of the cluster robot technology.
Owner:SUN YAT SEN UNIV

Base fixed type multi-connecting-rod motion system and control method and control device thereof

The invention discloses a base fixed type multi-connecting-rod motion system and a control method and device thereof, belongs to the technical field of mimicry simulation of a mechanical environment, and particularly relates to a structure design and control technology of a six-degree-of-freedom parallel motion system. The problem that transverse vibration of a hydraulic cylinder and nonlinear factors of a system of an existing conventional hydraulically-driven six-degree-of-freedom parallel mechanism limit improvement of the system bandwidth is solved, and the system bandwidth is improved to 100 Hz; the system comprises a mechanical structure subsystem, an acceleration detection subsystem and a servo control subsystem, and the hydraulic actuator is used for performing telescopic motion based on the motion instruction to drive the connecting rod to swing, so that the platform moves and presents different postures. The base fixed type multi-connecting-rod motion system and the control method and the control device thereof are suitable for structural design and control of a six-degree-of-freedom parallel motion system.
Owner:HARBIN INST OF TECH

Door movement system for cabinet

A system for opening and closing a door within a cabinet is provided. The system includes a motor in communication with a controller to automatically open and close a door. A first plate fixed to the motor shaft to rotate with rotation of the motor shaft, the plate comprises a slot disposed therein. A first leg extends from a door that extends through the slot. A second leg extends from the door. A first sensor moves based upon rotation of the motor shaft, wherein the first sensor can detect relative motion between the motor shaft and the door, wherein when the motor shaft is rotated in the second direction and the first sensor detects relative motion between the motor shaft and the door, the first sensor sends a signal to the controller, wherein upon receipt of the signal the first sensor discontinues sending the second signal to the motor.
Owner:CARTER HOFFMANN LLC

Flapping-wing air vehicle with multi-degree-of-freedom empennage cooperatively moving and control method

The invention provides an ornithopter with multi-degree-of-freedom empennage collaborative movement and a control method.The ornithopter comprises a rack, empennage bodies and an empennage driving mechanism, each empennage body comprises an empennage support, a plurality of tail feather bodies, a traction rope guide wheel and a tail feather elastic rope, and one end of each tail feather body is sequentially hinged to one end of the empennage support; the number of the traction rope guide wheels is two, the traction rope guide wheels are arranged in the middle of the empennage support side by side, the tail feather elastic rope is sequentially connected to the multiple tail feather bodies, and the two tail feather bodies on the outermost side are each provided with a connecting part extending towards the other side of the hinged end. The empennage driving mechanism comprises an empennage connecting pipe assembly, a traction steering engine, a winding roll, a traction rope, an empennage torsion steering engine, an empennage deflection steering engine and an empennage pitching steering engine. According to the empennage structure, independent control or combined control of torsion, pitching, deflection and opening and closing actions can be achieved, and the problems that an existing ornithopter empennage mechanism is insufficient in motion freedom degree and lacks an efficient wing-empennage cooperative motion system are solved.
Owner:DONGGUAN UNIV OF TECH

Motor heat dissipation device, motion system and semiconductor equipment

The invention discloses a motor heat dissipation device, a motion system and a semiconductor device, the motor heat dissipation device comprises a motor stator and a motor rotor, and the motor rotor is configured to be capable of reciprocating relative to the motor stator; the heat exchange pipeline is arranged on the motor rotor and exchanges heat with the motor rotor; the condensation cavity is connected to one end of the heat exchange pipeline, a plurality of condensation pieces which are communicated with one another and internally provided with cooling liquid are arranged in the condensation cavity, and the gas medium makes contact with the condensation pieces and is converted into a liquid medium which flows into the heat exchange pipeline; the check valve is connected to the other end of the heat exchange pipeline and connected with the condensation cavity, the heat exchange pipeline exchanges heat with the motor rotor, so that the liquid medium in the heat exchange pipeline is converted into a gas medium and enters the check valve, and the check valve is used for guiding the gas medium into the condensation cavity and preventing the liquid medium in the condensation cavity from flowing back. According to the invention, the problem of heat dissipation of the motor in a vacuum environment is solved, the influence on vibration of equipment, especially a power element, is reduced, and the air tightness in the vacuum environment is ensured.
Owner:WUXI GENXINYUE TECH CO LTD

Double-feedback control debugging method of ultra-precision servo system

The invention discloses a double-feedback control debugging method of an ultra-precision servo system, and relates to the technical field of semiconductor manufacturing equipment. In order to solve the defects that in the prior art, coupling interference is serious in the debugging process, frequency domain performance optimization is insufficient, filter configuration does not have adaptivity, and an efficient anti-interference debugging mechanism under multi-source disturbance is lacked, the technical scheme provided by the invention comprises the steps that a double-feedback servo system comprising a speed ring and a position ring is constructed; debugging a speed feedback loop, optimizing controller gain parameters based on frequency domain analysis, and outputting speed loop response characteristics; a position feedback loop is debugged, and position loop controller parameters are configured in combination with speed loop response and acceleration sensor signals; the notch filter is automatically adjusted according to the dynamic vibration characteristics; and frequency domain self-adaptive debugging of the double-feedback controller is completed. The method is suitable for servo control debugging work of high-precision motion systems such as a wafer carrying table in semiconductor manufacturing equipment, and is especially suitable for nanoscale positioning scenes such as a photoetching machine and measuring equipment.
Owner:WUXI GENXINYUE TECH CO LTD