The utility model relates to the technical field of
semiconductor equipment, in particular to a
cam driven device, which comprises a support, a driving mechanism and a driven mechanism, the driving mechanism comprises a driving part and a
cam, the
cam is rotatably arranged on the support, a rotating shaft of the cam is arranged along a first direction, and the driving part drives the cam to rotate; the driven mechanism comprises a driven part, a first abutting piece and a second abutting piece, the driven part is in sliding fit with the support in the second direction, the first abutting piece and the second abutting piece are arranged on the driven part in the second direction in a spaced mode, and the cam is located between the first abutting piece and the second abutting piece; the first abutting piece and the second abutting piece abut against the
peripheral wall of the cam in the second direction. The first direction is perpendicular to the second direction. When the cam rotates at a high speed or at a
high acceleration, the cam is clamped by the first abutting piece and the second abutting piece in the second direction, so that the phenomenon that the cam is separated from the driven mechanism is avoided, the movement precision of the driven part is further ensured, and the working
noise is reduced.