The invention provides an ultrahigh-density three-dimensional stacked packaging structure. The ultrahigh-density three-dimensional stacked packaging structure comprises a substrate, a stacked structure and a stacked
chip. According to the invention, the bottom substrate is arranged, and the stacking structure composed of a plurality of stacked
silicon wafers is connected above the substrate. And
processing a mounting cavity for mounting a
chip between two adjacent stacked
silicon wafers on the same layer by adopting a high-precision cavity
etching technology. According to the invention, the electroplated
layers are arranged on the two side surfaces of each stacked
silicon wafer, so that the
metal shielding of the upper and lower sides of the mounting cavities is realized, and the plurality of first
metal through holes are arranged between the two adjacent mounting cavities in an array manner. And the plurality of first
metal through holes form a shielding wall, so that the phenomenon of mutual interference of
chip signals in two adjacent mounting cavities can be avoided. And the
shielding effect between the chips is improved, so that the whole stacked packaging structure is compact, the electromagnetic isolation degree is high, a complex
circuit architecture can be used, and the application range of stacked packaging is widened.