The invention discloses a high-density packaged TGV
gradient material filling
interconnection structure and a filling method thereof, and relates to the technical field of
semiconductor packaging. The TGV
gradient material filling
interconnection structure comprises a glass through hole located in a glass substrate, and the glass through hole is filled with a conductive
metal body. A micro-nano anchor structure layer, a molecular bridging layer and a conductive
metal seed layer are sequentially arranged between the inner wall of the glass through hole and the conductive
metal main body, and a metal bridging structure is arranged in the middle of the interior of the glass through hole; the micro-nano anchor structure layer is located on the surface of the inner wall of the glass through hole and is of a concave-convex
dot matrix arrangement structure. According to the method, the micro-nano anchor
nail structure and the molecular bridging layer are formed on the surface of the glass, so that the
copper-glass
interface bonding strength is remarkably improved, and void-free
electroplating filling of the TGV through hole with the depth-
diameter ratio larger than or equal to 10: 1 is achieved. The glass bridge is embedded in the glass substrate, ultra-high-density
interconnection with local interconnection
line width / line distance smaller than or equal to 1 m is achieved, and the 2.5 D integration requirement of more than 16
silicon-based core particles is met.