35 results about "Nano fabrication" patented technology

A long range, periodically ordered array of discrete nano-features (10), such as nano-islands, nano-particles, nano-wires, non-tubes, nano-pores, nano-composition-variations, and nano-device-components, are fabricated by propagation of a self-assembling array or nucleation and growth of periodically aligned nano-features. The propagation may be induced by a laterally or circularly moving heat source, a stationary heat source arranged at an edge of the material to be patterned (12), or a series of sequentially activated heaters or electrodes. Advantageously, the long-range periodic array of nano-features (10) may be utilized as a nano-mask or nano-implant master pattern for nano-fabrication of other nano-structures. In addition, the inventive long-range, periodically ordered arrays of nano-features are useful in a variety of nanoscale applications such as addressable memories or logic devices, ultra-high-density magnetic recording media, magnetic sensors, photonic devices, quantum computing devices, quantum luminescent devices, and efficient catalytic devices.

A single electron transistor device for sensing at least one particle, includes at least two electrodes positioned with a gap formed between the electrodes and an activation object positioned in the gap with an insulating layer between the activation object and each electrode. The activation object which is able to transfer electrons is arranged with at least one binding structure bonded to it for receiving the at least one particle. The electrodes are formed with an inter distance of less than 50 nm and the electrodes are connectable directly or indirectly to a signal acquisition system. The sensing device is arranged to allow a tunnelling current proportional to the presence of the at least one particle in the binding structure, to flow through the activation object. A method, and system using a single electron transistor device fabricated with micro/nano fabrication methods are also disclosed.

The invention relates to a laser differential confocal LIBS, a Raman spectrum-mass spectrum imaging method and a Raman spectrum-mass spectrum imaging device and belongs to the technical fields of confocal microscopy imaging, mass spectrum imaging and spectral measurement. In the invention, the differential confocal microscopy imaging technology is combined with a spectrum and mass spectrum detection technology; a high-spatial-discrimination differential confocal system is used for axially focusing and imaging a sample; a mass spectrum detection system is used for performing mass spectrum detection to charged molecules and atoms in a sample microcell; and a spectral detection system is used for performing microcell spectrum detection to focal spot excitation spectrums (Raman spectrum and induced breakdown spectrum) of a differential confocal microscopy system, thereby achieving high-spatial discrimination and high-sensitivity imaging and detection of complete component information and configuration parameters of the sample microcell. The invention achieves advantage complement and structure and function fusion of laser poly-spectrum component imaging detection (mass spectrum, Raman spectrum and laser-induced breakdown spectrum). The method and the device have wide application prospect in the fields of biology, physical chemistry, micro-fabrication and nano-fabrication and the like.

The invention belongs to the technical field of microscopic imaging and spectral measurement and relates to a high resolution spectral imaging and detection method and apparatus which combine confocal microscopic technology and spectral detection technology together, realize integration of images and spectrums and are used for three dimensional morphology reconstruction and micro-area morphological performance parameter measurement of a variety of samples. The method and apparatus utilize Rayleigh light abandoned by a traditional confocal Raman system and confocal technology for detection of the position of a sample, employs a spectral detection system for spectral detection and uses Brillouin diffusion light abandoned by a traditional confocal Raman detection technology to test properties like elasticity and piezoelectricity of a material, thereby realizing measurement of micro-area high spatial resolution morphological parameters of a sample. The method and apparatus provided by the invention have the advantages of accurate positioning, high spatial resolution, high spectral detection sensitivity, controllable measured spot size, etc. and have wide application prospects in fields like biomedicine, evidence collection of court, micro and nano-fabrication, material engineering, engineering physics, precise metering and physical chemistry.

The invention belongs to the field of a microimaging and spectral measurement technology and relates to a laser differential confocal Brillouin-Raman spectroscopy measuring method and a device thereof which can be used in micro-area morphological parameter comprehensive test and high-resolution imaging of a sample. According to the method and the device, a differential confocal technology is incorporated into spectrum detection. Sample position detection is performed by the differential confocal technology; spectrum detection is conducted by a spectrum detection system; and properties, such as elasticity, piezoelectricity and the like, of a material are tested by the use of brillouin scattering light abandoned by a traditional confocal Raman spectrum detection technology. Thus, micro-area high-spatial resolution morphological parameter measurement of a sample is realized. The method and the device have advantages of accurate positioning, high spatial resolution, high spectrum detection sensitivity, controllable measured focusing spot size and the like, and have a wide application prospect in fields of biomedicine, evidence obtaining in court, micro and nano-fabrication, materials engineering, engineering physics, precision metrology, physical chemistry and the like.

A user-friendly multi-layer micro/nanofluidic flow device and micro/nano fabrication process are provided for numerous uses. The multi-layer micro/nanofluidic flow device can comprise: a substrate, such as indium tin oxide coated glass (ITO glass); a conductive layer of ferroelectric material, preferably comprising a PZT layer of lead zirconate titanate (PZT) positioned on the substrate; electrodes connected to the conductive layer; a nanofluidics layer positioned on the conductive layer and defining nanochannels; a microfluidics layer positioned upon the nanofluidics layer and defining microchannels; and biomolecular nanovalves providing bio-nanovalves which are moveable from a closed position to an open position to control fluid flow at a nanoscale.

The invention relates to an electron diffractometer and provides an electron diffractometer capable of realizing automatic defect regulation. The electron diffractometer comprises a vacuum sample room, and also comprises a testing optical path, a detect regulation optical path and a processing unit. Frequency tripled laser of the testing optical path is transmitted from a first incidence window into the vacuum sample room. Frequency doubled laser of the defect regulation optical path is transmitted from a second incidence window into a sample stage inside the vacuum sample room. An electronicgun is also arranged inside the vacuum sample room. A cathode of the electronic gun is positioned on the testing optical path. The defect regulation optical path is provided with a laser pulse energyregulator and a laser pulse scanning device. The processing unit comprises a receiving component and a control center. The electron diffractometer of the invention can achieve in-situ real-time nondestructive measurement of the micro- and nano-fabrication process and realize growth while testing. In addition, sample surface defect information is obtained through processing of diffraction images, and femtosecond laser pulse energy and scanning position are regulated according to the invention so as to repair defects, thus achieving the purpose of testing while regulating.

A method for sealing through-holes in a material via material diffusion, without the deposition of a sealant material, is disclosed. The method is well suited to the fabrication and packaging of microsystems technology-based devices and systems. In some embodiments, the method comprises forming sacrificial material release through-holes through a structural layer, removing the sacrificial material via an etch that etches the sacrificial material through the release through-holes, and sealing of the release through-holes via material diffusion.

The invention discloses a test analysis method for a manufactured super-diffraction directional transmission material structure. The test analysis method comprises the following steps of: obtaining a nano slit or pore structure mask on a transparent substrate by a nano-fabrication method; depositing a metal medium alternate multi-layer film structure material on the flattened nano slit or pore structure mask; roughening a surface film material through an etching or grinding method, and finishing structure manufacture; illuminating the slit or pore through a light source, exciting a surface plasma evanescent wave light field, and alternately coupling the light field into the multi-layer metal medium film material, wherein the surface plasma light field is specifically distributed on the outermost layer of a metal medium film layer material, is scattered to a far field by the roughened surface and is observed and recorded through an objective lens and a charge coupled device (CCD); and finally, calculating a directional transmission angle theta of the super-diffraction material. By the test analysis method, the high-frequency evanescent wave energy is conveyed to the far field and then detected and analyzed in the far field, and the quantitative analysis and characterization requirements of the optical properties of the super-diffraction material can be met in a far field range.

The present invention improves the sensitivity and the responsiveness of a dryness/wetness responsive sensor utilizing a galvanic current, allowing for downsizing of the dryness/wetness responsive sensor. Instead of the conventional structure in which an anode electrode and a cathode electrode are stacked with an intervening insulator, the present invention employs a structure in which both electrodes run in juxtaposition with each other on an insulating substrate in the form of, for example, a comb-shaped electrode as shown in the drawing. By utilizing a semiconductor manufacturing process or any other micro/nano-fabrication technology, an inter-electrode distance can be extremely shortened as compared with the conventional sensors, allowing enhancing the sensitivity per unit footprint of the electrodes. Accordingly, a decrease in the size of the dryness/wetness responsive sensor can be easily achieved.

A method to remove selected parts of a thin-film material otherwise uniformly deposited over a template is disclosed. The methods rely on a suitable potting material to encapsulate and snatch the deposited material on apexes of the template. The process may yield one and/or two devices during a single process step: (i) thin-film material(s) with micro- and/or nano-perforations defined by the shapeof template apexes, and (ii) micro- and/or nano-particles shaped and positioned in the potting material by the design of the template apexes. The devices made from this method may find applications in fabrication of mechanical, chemical, electrical and optical devices.

The invention discloses a device and a method capable of precisely controlling and transmitting a nanowire, and relates to the technical field of micro and nano-fabrication. The device comprises a femtosecond pulse light source, a microscope objective, a silver film-coated first glass sheet, a second glass sheet and an alternating-current power supply. The method comprises the following steps: firstly, focusing femtosecond pulse laser emitted by the femtosecond pulse light source by the microscope objective and then irradiating on the silver film to form a silver film gap; secondly, connectingthe alternating-current power supply with the two ends of the silver film gap, dropping a nanowire solution on the silver film gap to orientally arrange the nanowires at the two ends of the silver film gap, and reversing the first glass sheet; and thirdly, focusing the emitted femtosecond pulse laser by the microscope objective and then irradiating on one side, without being coated with the nanowire, of the first glass sheet to transfer the nanowire from the first glass sheet to the second glass sheet. Through the combination of a dielectrophoresis technology and a laser induced forward transfer technology taking graphene oxide as a dynamic release layer, precise control and nanowire transmission can be realized simply, conveniently and rapidly.