316results about How to "Drift suppression" patented technology

The invention discloses a micro-grid system voltage stability control method based on robust control. The control structure of an intelligent micro-grid system is composed of a system control layer, a concentrated control layer and a local control layer, and energy optimization and voltage and frequency stability control of the micro-grid system are realized through multi-layer coordination control. According to the micro-grid system voltage stability control method based on robust control, a comprehensive load module of an induction motor is established, wherein dynamic loads are connected with static loads in parallel. On the premise that the constraint conditions of system performance and robust stability are met, a micro-grid voltage stability robust controller is designed by the adoption of a method of solving the problem of mixed sensitivity so as to improve the micro-grid voltage stability. The micro-grid system voltage stability control method based on robust control can be adapted to wide-range change of load parameters, has high robustness for the situations that due to the factors such as changes of running conditions, influences of external environment and frequency switching of the loads, perturbation is generated in model parameters of a micro-grid and uncertainty exists in the topologic part and the unmolded part and can better restrain parameter drift and noise interference, and meanwhile, the controller is simple in structure and easy to realize.

The invention belongs to the field of optical precision measurement and relates to a method and a device for measuring the appearance and the wall thickness of a sphere by combining a differential confocal confocal technology and point-diffraction interference. The method realizes the high-precision rapid measurement on the appearance of the outer surface of the sphere by using the point-diffraction interference, the rotation of the measured sphere and the splice of a measuring sub-aperture; and the appearance and wall thickness of the inner surface and the outer surface of a key area of a transparent or semitransparent sphere can be scanned and measured point by point by using the differentia confocal technology. The invention organically integrates a point-diffraction interference technology and the differentia confocal technology so as to realize the synchronous measurement on the appearance and the wall thickness of the inner surface and the outer surface of the sphere, and aims to solve the difficult problems that the traditional AFM or a single confocal sensor and the other scanning methods have low measuring speed, low efficiency, easy leakage in measurement and the like during measuring the surface of the sphere. The invention has broad application prospect in the fields of testing the appearance and the wall thickness of a laser fusion pellet, the appearance and the outline of a spherical surface and the like.

The invention discloses a state estimating and interfusion method based on strap down inertial navigation system that includes the following steps: using the sensor in IMU to induce the kinetic characteristic; taking strap down inertial computing; using the state signal of acceleration estimating system; judging the reliability of state estimating value; taking state information interfusion; outputting navigation parameter. The invention has the following advantages: no additional hardware cost, fully autonomy; effectively improving the navigation accuracy of the system; and supplying 50 navigation signals per second to control display device.

The invention provides a shifting register and a thin film transistor liquid crystal displayer. The shifting register comprises multiple levels of shifting register circuits, wherein each of shifting register circuit is composed of eight transistors and two capacitors, each shifting register circuit comprises a pull-up transistor, a first pull-down transistor, a second pull-down transistor, a switch transistor, a first capacitor, a reset transistor, a first auxiliary pull-down transistor, a second auxiliary pull-down transistor, a third auxiliary pull-down transistor and a second capacitor, wherein the pull-up transistor, the first pull-down transistor and the second pull-down transistor are arranged on a signal output module, the first auxiliary pull-down transistor and the second auxiliary pull-down transistor are arranged on an auxiliary pull-down module, and the third auxiliary pull-down transistor and the second capacitor are connected in parallel. The second capacitor serves as a buffer device and can filter out redundant glitch signals of output signals and reduce signal crosstalk. Meanwhile, due to the fact that the first pull-down transistor and the second pull-down transistor respectively work in each half pull-down period, drifting of the threshold voltage due to the over-large breadth-length ratio of each transistor is restrained, and stability of circuits can be ensured. The auxiliary pull-down module is arranged, so that the output waveform of a second node is made to be more stable.

The invention discloses a deep learning based medical gas identifying method. The deep learning based medical gas identifying method specifically includes utilizing original frequency response signals to perform simple uniformization, inputting shed typed own coding network, and extracting layer by layer to learn abstract characteristics of original data. The whole network shield the abstract characteristics, dimensionality reduction, drifting restraining and the like to the outside environment, and a classifying layer is added in the network, so that the characteristics can be classified into a classifier to classify. The training process is classified into a pre training step and a micro adjusting step, network learning ability can be effectively increased, and new samples are input into the network to directly acquire predicted category after the training is finished. With the deep learning based medical gas identifying method, effective identifying characteristics of medical gas can be automatically abstracted, steps such as characteristics abstraction, characteristics selection and drifting restraining are combined, complexity in traditional methods is greatly simplified, and gas detecting and identifying efficiency is increased.

The invention provides a BD, GPS and MEMS based integrated navigation system and method on account of defects f prior navigation systems. The system comprises an MEMS-IMU module, a GNSS module, a magnetometer module and an integrated navigation computer. The MEMS-IMU module, THE GNSS module and the magnetometer module are connected with the integrated navigation system respectively. By the aid of the navigation method, corrected position values, speed values and corrected attitude angle values can be output. The system and the method have the advantages of being anti-overloading, miniaturized, low in power consumption and cost, provided with high impact resistance and particularly applicable to various war environments. By the aid of the navigation method, drifting of gyroscopes, accelerometer and magnetometers can be suppressed, and the stability and the accuracy of the system are improved.

The invention relates to a low-power consumption portable electrocardiograph monitor and a control method thereof, which belongs to the field of medical appliances. The portable electrocardiograph monitor comprises an electrocardiosignal collection unit, an electrocardiosignal analysis and storage unit and an upper computer. The control method comprises the following steps of: step 1: carrying out digital filtering to collected signals by using a wavelet entropy optimal threshold denoising method; step 2: carrying out rejection of baseline drift to the signals processed by step 1 by using a morphological filtering method; and step 3: carrying out disease classification to the signals processed by step 2 by using a support vector machine algorithm. The invention has the advantage of high integrity, and has the characteristics of portability, compactness and economy.

The invention discloses a method for rejecting the central potential drift of a three-phase four-bridge arm three-level inverter. The SVPWM vector of the three-phase four-bridge arm three-level inverter is reduced from the traditional three-dimension to a plane, the switch statuses of the first three bridge arm and the fourth bridge arm are separately selected, the vector table of the first three bridge arm three-level space is made full use of to select a zero vector and a length vector, small vectors are used in pairs while mid-sized vectors can not be used directly, neighboring vectors are combined into mid-sized vectors, and the switch status of the fourth bridge arm is selected according to the principle of the offset between the charge effect and the discharge effect of a capacitor. The algorithm is simple and easy to be realized, and can not only contain asymmetric load but also realize that the average value of the current which passes through the neutral point of a DC (direct current) side capacitor is strictly being zero under any load power factors and modulation ratio, thus effectively rejecting the drift of neutral point potential. No sample current is required in the algorithm, thus reducing the requirement of the system to the neutral point of the DC side capacitor. An open-loop control and a closed-loop control are respectively available.

The invention relates to a gravity satellite formation orbital stability optimization design and an earth gravity field precision inversion method on the basis of disturbing inter-satellite distance principle, in particular to an orbital stability optimization design method for a four-satellite system (FSS). In order to guarantee the stability of the four-satellite system, the quantity of satellite orbits is optimally designed, orbital semi-major axes, orbital eccentricities, orbital inclinations and right ascensions of ascending nodes keep unchanged, the difference of arguments of perigees each pair of satellites and the difference of mean anomalies of the pair of satellites are 180 degrees respectively, an initial argument of perigee of each satellite is arranged at the equator, an initial mean anomaly of each satellite is arranged at a pole, and the ratio of the semi-major axis of each elliptical orbit of the four-satellite system to a semi-minor axis of the elliptical orbit of the four-satellite system is 2:1. The gravity satellite formation orbital stability optimization design and the earth gravity field precision inversion method have the advantages that an earth gravity field is precisely and quickly inverted on the basis of a disturbing inter-satellite distance process; and the orbits are high in stability owing to the method, the earth gravity field computation precision is effectively improved, the gravity field inversion speed is increased to a great extent, and requirements on the performance of a computer are low.

A packaging method comprises the steps of: providing a carrier plate, wherein the carrier plate comprises a plurality of chip regions and cutting regions arranged between the adjacent chip regions, the carrier plate further comprises a first surface, and a plurality of grooves are formed in the cutting regions in the first surface of the carrier plate; providing chips, wherein each chip comprises a functional surface and a non-functional side surface which are opposite to each other, the surface of each functional surface is provided with bumps, and the bumps protrude out of the functional surfaces; fixing the non-functional side surfaces of the chips with the first surface of the carrier plate in the chip regions; forming a plastic packaging layer on the first surface of the carrier plate and the surfaces of the chips, wherein the plastic packaging layer exposes top part surfaces of the bumps; removing the carrier plate after forming the plastic packaging layer; forming a rewiring structure on the surface of the plastic packaging layer and the functional surfaces of the chips; and cutting the plastic packaging layer and the rewiring structure, so that the plurality of chips are separated from one another, thereby forming an independent packaging structure. The yield and reliability of the formed packaging products are improved.

The invention relates to a laser differential confocal LIBS, a Raman spectrum-mass spectrum imaging method and a Raman spectrum-mass spectrum imaging device and belongs to the technical fields of confocal microscopy imaging, mass spectrum imaging and spectral measurement. In the invention, the differential confocal microscopy imaging technology is combined with a spectrum and mass spectrum detection technology; a high-spatial-discrimination differential confocal system is used for axially focusing and imaging a sample; a mass spectrum detection system is used for performing mass spectrum detection to charged molecules and atoms in a sample microcell; and a spectral detection system is used for performing microcell spectrum detection to focal spot excitation spectrums (Raman spectrum and induced breakdown spectrum) of a differential confocal microscopy system, thereby achieving high-spatial discrimination and high-sensitivity imaging and detection of complete component information and configuration parameters of the sample microcell. The invention achieves advantage complement and structure and function fusion of laser poly-spectrum component imaging detection (mass spectrum, Raman spectrum and laser-induced breakdown spectrum). The method and the device have wide application prospect in the fields of biology, physical chemistry, micro-fabrication and nano-fabrication and the like.

A drive circuit is provided that can drive a display panel with low power consumption, and an electro optical device including the drive circuit and its drive method are included. Switching signals RSEL, GSEL, and BSEL for demultiplexing are produced so as to control turning switching elements DSWR, DSWG, and DSWB for demultiplexing on and off, which separate data signal where R, G, and B are multiplexed and transmitted. An overlapped period, for periods of activating RSEL, GSEL, and BSEL is set between the timing of changing polarity of common voltage and the timing of assuring writing data signal to a pixel electrode. A drive circuit includes a reference voltage production circuit and a digital to analog conversion circuit and an output circuit, which outputs a programmed voltage (a reference voltage having the same phase as the common voltage) during the overlapped period. The first reference voltage production circuit includes plurality of operational amplifiers and the first and second voltage division circuits.

The invention discloses a hyperspectral imaging light source system. An illumination box is a closed rectangular solid, wherein the cavity of the illumination box is respectively provided with a line scan camera, an optical splitting system, an object stage of an electric control translation stage, and an object to be detected, an electric control translation stage lead screw, a line source box and a photosensitive diode which are arranged on the object stage; a line source controller, an electric control translation stage controller and a computer are arranged outside the illumination box; and the photosensitive diode senses the light-intensity variation of the line source and inputs feedback signals to the line source controller, and a halide lamp is arranged in the line source box and is connected with the line source controller. The invention does not need to be subject to the conduction through optical fibers, thereby eliminating noises caused by the nonuniform illumination and improving the illumination uniformity and stability. Besides, the invention eliminates the light-intensity variation as a result of the increased service life of the light source and the instability of the external circuit, inhibits the baseline drift phenomenon in the signal acquisition process, improves the utilization ratio of the light source, and can acquire hyperspectral images of high quality and high stability.

The invention relates to a spectral pupil laser differential confocal LIBS, a Raman spectrum-mass spectrum microscopic imaging method and a Raman spectrum-mass spectrum microscopic imaging device and belongs to the technical fields of confocal microscopic imaging, optical-spectrum imaging and mass spectrum imaging. In the invention, spectral pupil laser differential confocal imaging is combined with optical-spectrum and mass spectrum detection technologies, so that high-spatial-discrimination form imaging to a sample is carried out by means of a micro focus light spot of a spectral pupil laser differential confocal microscope which is subjected to ultra-discrimination technology treatment; mass spectrum detection to charged molecules and atoms in a micro zone of a sample is carried out by means of the mass spectrum detection system; micro zone optical spectrum detection is carried out to a focused light spot excitation spectrum (Raman spectrum, induced breakdown spectrum) of the spectral pupil laser differential confocal microscopic system through the optical-spectrum detection system; and high-spatial discrimination, high-sensitive imaging and high-sensitive detection to complete component information and form parameters of the sample micro zone is carried out through advantage complement and structural fusion of laser multi-spectrum detection. The invention provides a novel technical approach for imaging detection of substance components and formations in the field of biology, material and the like.

The invention relates to a portable active electroencephalogram monitor and a control method thereof, belonging to the field of medical apparatus and instruments. The electroencephalogram monitor comprises an electroencephalogram signal acquisition unit, an electroencephalogram signal analysis and storage unit and an upper computer, wherein an input and output end of the electroencephalogram signal acquisition unit is connected with a first input and output end of the electroencephalogram signal analysis and storage unit, and a first digital signal input and output end of the electroencephalogram signal analysis and storage unit is connected with an input and output end of the upper computer. The portable active electroencephalogram monitor has high stability and reliability and can be used for realizing the active long-term monitoring of accidental, transient, paroxysmal or characteristic electroencephalogram activities, and the normal life, study and work of patients can not be influenced. Because long-time electroencephalogram data can be continuously recorded, the electroencephalogram monitor has important clinic value in diagnosing epilepsia and cerebrovascular diseases and studying and analyzing sleep.

The invention provides a heterodyne interference elliptic-deviation measurement nonlinear error compensation method based on a neuronic network, which comprises the following steps: A. providing a series of thin film samples with different thicknesses and adopting a heterodyne interference elliptic-deviation measurement system to measure the thin film samples; B. taking elliptic-deviation parameter experimental data obtained from the A, environment temperature and the polarization state aberration of incident light beams during measurement and elliptic-deviation parameter theoretical data as learning samples to train the neuronic network; and C. controlling nonlinear error on-line compensation in a weight way by the neuronic network after being successfully trained. The invention has the advantages that the heterodyne interference elliptic-deviation measurement nonlinear error compensation method adopts a neuronic network compensation system to synthetize nonlinear errors and takes environment temperature as an input of the neuronic network, thereby effectively suppressing the shifting of the nonlinear errors; and the polarization state aberration of the incident light beams is observed and taken as an input of the neuronic network, thereby the precision of nonlinear error models is enhanced.

The invention discloses a body state estimation method of a legged robot based on multi-sensor information fusion. The body state estimation method comprises the following steps: S1, separately acquiring sport information of various legs through sensors arranged in the target robot, and carrying out single-leg kinematics solution on the various legs according to the acquired information so as to obtain kinematics information of the various legs; fusing the kinematics information of support legs in the various legs so as to acquire a body initial state estimation result; S2, acquiring IMU (Inertial Measurement Unit) information through an IMU system, and carrying out inertial navigation modeling solution based on the acquired IMU information so as to acquire an inertial navigation solutionresult; and S3, fusing the acquired body initial state estimation result with the inertial navigation solution result to acquire a final body state estimation result. According to the body state estimation method disclosed by the invention, by combination of the advantages of IMU and the kinematics solution estimation way, drifting on the estimation result is avoided, and meanwhile, spike noise can be filtered and removed, and the precision of the estimation result is improved.

The invention belongs to the control field of energy conversion devices of high capacity direct drive permanent magnet synchronous wind power systems, relating to a method for restricting the midpoint potential drifting of a three-level inverter. The method comprises the following steps of: determining the work mode of a three-level boost converter, calculating a critical inductance value, and determining a boosting inductance value; collecting a generator rotate speed signal of a direct drive wind power system and two capacitor voltage signals at direct current sides of the three-level boost converter; carrying out PI regulation according to a difference value between an actual rotate speed and a reference rotate speed by a microcontroller, and then outputting a reference value d* of the boosting ratio of the three-level boost converter; calculating a difference value between the two capacitor voltage signals at the direct current sides, carrying out PI regulation of the other path on a difference value between the difference value and zero, and outputting a difference reference value theta * between switching signals; and calculating respective conducting and shutting time of two switching devices, and controlling the on / off of the two switching devices. The invention can effectively restrict the midpoint potential drifting at the direct current sides of the three-level inverter on the premise of not increasing circuits for regulating the midpoint potential.

In a semiconductor diaphragm type electro-acoustic transducer device having no necessity for a DC bias voltage applied as a result of a charge-stored layer being provide between electrodes, electro-mechanical conversion efficiency undergoes a change owing to time-dependent change in a quantity of stored electricity due to leakage of charge, and so forth. As for sensitivity of signal reception, provided by an ultrasonic array-transducer made up of the electro-acoustic transducer devices each as a basic unit, not only a main beam sensitivity undergoes drift as a result of drift in the electromechanical conversion efficiency, but also there result deterioration in an acoustic S / N ratio, and deterioration in directionality of an ultrasonic beam. In order to resolve those problems, there is provided an electro-acoustic transducer device comprising a first electrode formed on top of, or inside a substrate, a thin film using silicon or a silicon compound as a base material thereof, provided on top of the substrate, a second electrode formed on top of, or inside the thin film, a void layer provided between the first electrode and the second electrode, a charge-stored layer for storing charge given by the first electrode and the second electrode, provided between the first electrode and the second electrode, and a source electrode and a drain electrode, for measuring a quantity of electricity stored in the charge-storage layer.

The invention discloses an unmanned aerial vehicle pose estimation method based on visual inertia polarized light fusion, which adopts the combination of visual measurement and inertia measurement, and can well solve the problems of low output frequency, poor robustness and unobservable scale information of pure visual measurement after the visual measurement and the inertia measurement are fused.Meanwhile, the constraint among a plurality of images in visual measurement can also effectively inhibit integral drifting in inertial measurement and correct zero offset of inertial measurement. Onthe basis of vision measurement and inertia measurement, the course constraint of the polarized light compass is also added, the polarized light compass obtains the course information of itself by simulating the structure and function of sensing polarized light by desert ants. The method has the advantages of no accumulation of errors along with time and high stability, and can provide stable course constraint for a navigation sensor of an unmanned aerial vehicle. Compared with an existing visual inertia combination, the visual inertia polarized light fusion-based unmanned aerial vehicle poseestimation method provided by the invention can greatly improve the pose estimation precision of the unmanned aerial vehicle.

A process based on the constant-force mode of atomic force microscope for preparing nano-class microstructure with controllable depth and large range of precise sizes features that 2D micro-motion bench and its control circuit is additionally used. The extension of scanning ceramic tube is driven by AFM driver circuit to make the probe tip to prick into the surface of a workpiece to be processed. The variation amount of scanning ceramic tube is detected by the real-time detection circuit and transmitted to single-chip computer. Said scanning ceramic tube is extended continuously in the relative direction until the processed depth setting is equal to the difference between the motion amount of said scanning ceramic tube in height direction and said deformation amount of cantilever.

The invention discloses a multiple closed-loop composite gyroscope stable control method. The multiple closed-loop composite gyroscope stable control method comprises a double closed-looped control method, the double closed-looped control method increases and inhibits a space stability loop of gyroscope drifting, a remedy floating algorithm is adopted to achieve the compensation of drifting, a deviation rectifying compensation method comprises the steps that original data is acquired; a posture fusion module is adopted to acquire carrier three-dimensional posture information; coordinate conversion is carried out on an inertial coordinate system and a carrier coordinate system; the accumulation of position drifting errors is calculated and made up, and the steps above are conducted circularly; according to the multiple closed-loop composite gyroscope stable control method, on basis of a traditional double closed-loop control strategy, the gyroscope drifting is increased to control the loop, the static drifting is effectively inhibited, the system static stability accuracy and anti-interference ability are improved, and the problems are effectively solved that the lower system staticstability accuracy lower and the poor anti-interference ability exist by mostly adopting double loop control or simple multiple closed-loop control.

The invention relates to a spectrophotometric pupil laser confocal LIBS (laser-induced breakdown spectroscopy), Raman spectrum and mass spectrum imaging method and device, and belongs to the technical field of confocal microscopy imaging, spectral imaging and mass spectrum imaging. According to the method and the device, the spectrophotometric pupil confocal imaging technology is combined with spectrum and mass spectrum detection technologies, a sample is subjected to high-spatial-discrimination form imaging by the aid of micro focusing spots, processed with a super-resolution technology, of a spectrophotometric pupil confocal microscope, a mass spectrum detection system is adopted to perform mass spectrum detection on charged molecules, atoms and the like in a micro-area of the sample, a spectrum detection system is adopted to perform micro-area spectrum detection on an excitation spectrum (a Raman spectrum and induced breakdown spectroscopy) of the focusing spots of the spectrophotometric pupil confocal microscope, and high-spatial-discrimination and high-sensitivity imaging and detection for complete components and forms of the micro-area of the sample are realized through complementary advantages and structural fusion of laser multi-spectral detection. The method and the device can provide a brand new technical approach for imaging and detection of material components and forms of fields such as biology, material and the like.

The countercurrent direct-heating-type heat exchanger that is able to suppress drift in the case when a fluid to be heated is supplied, to prevent local abrasion of the members and also to carry out efficient heat exchange.The countercurrent direct-heating-type heat exchanger equipped with a feed pipe, a feed nozzle, ring-like straightening plates and umbrella-type dispersing plates of the above fluid to be heated, characterized in that the above feed nozzle has the shape of a pipe having a circular cross section and the dimension satisfying the following formula (1) and formula (2):Ln / Dn≧1   Formula (1)(wherein, Ln indicates the length of the feed nozzle; and Dn indicates the inside diameter of the feed nozzle)1.5≦Sp / Sn≦2.0   Formula (2)(wherein, Sp indicates the inner cross-sectional area of the feed pipe; and Sn indicates the inner cross-sectional area of the feed nozzle).

The invention discloses a UWB assisted inertial positioning method based on a fault-tolerant decision-making tree. For the non-line-of-sight problem of errors of an inertial navigation system with time accumulation and UWB positioning and the gross error problem due to a multipath effect and human body influence. A gyroscope high-precision segmented fitting error compensation model is proposed andadopted, and inertial navigation error drift is inhibited; meanwhile, based on UWB assisted personnel indoor inertial positioning, a fault-tolerant decision-making tree judgment model having the combined action of inertial navigation and UWB single-point positioning data is constructed, gross error factors of UWB positioning are eliminated, thus extended Kalman filter is applied to inertial navigation and UWB parameter differences, UWB assisted enhanced inertial navigation positioning is achieved, long-time continuous and reliable positioning can be achieved, and the method has a very strongengineering application value.

The invention discloses a full-color emission glass phosphor for near ultraviolet or blue light stimulating white light LEDs (Light Emitting Diodes) and a preparation method thereof. The glass phosphor is a rare earth ion doped glass phosphor containing silver ion polymers. The preparation method comprises the following steps of: by using a glass system as a substrate and AgNO3 as a raw material, introducing silver ion polymers into the glass material; and by using rare earth ions such as Eu3+, Sm3+, Pr3+, Tb3+, Dy3+, Er3+ or Ho3+ as a luminescence center, singly or jointly doping the rear earth ions in the glass substrate to be matched with the silver ion polymers for giving out white lights. The single glass phosphor is used for replacing fluorescent powder for the traditional white light LED and encapsulating materials, thereby simplifying the packaging technology; and the full-color emission glass phosphor has the advantages of being capable of solving the aging problem of the while light LED devices, increasing the stability of the devices, increasing the stimulation efficiency on the rare earth ions and realizing the high brightness fluorescence-emission.

The receive sensitivity of an ultrasound array transducer structured with a diaphragm electro-acoustic transducer (101) being a basic unit is affected by change in a charge amount with elapsed time due to leakage or the like, which causes drift of the primary beam sensitivity, degradation in the acoustic SN ratio due to a rise in the acoustic noise level, and degradation in the directivity of an ultrasound beam. To addressing this problem, a charge controller (charge monitor 211) is provided to control charge in an electro-acoustic transducer (101). A charge monitoring section (102) monitors the change in the charge amount. When change in the charge amount is small, transmit sensitivity or receive sensitivity is calibrated by a controller (104) by, for example, multiplying a receive signal by a calibration coefficient corresponding to the change amount. Further, when the change in the charge amount is large, for example, charges can be re-emitted from a charge emitter (103). The series of operations is controlled by the controller (104), and thus sensitivity variation caused by difference in the changes with elapsed time, particularly between the plural transducers, is calibrated.

A MEMS device includes a mirror substrate (200), an electrode substrate (301) arranged so as to face the mirror substrate (200), a mirror (230) serving as a movable member rotatably supported in an opening portion of the mirror substrate (200) via support members, a driving electrode (101) arranged on an insulating film (104) on a surface of the electrode substrate (301) facing the mirror substrate (200) so as to face the mirror (230) across a gap and drive the mirror (230), and a lower electrode (103) made of a metal or a semiconductor and formed under the insulating film (104) exposed to the gap so as to be in contact with the insulating film (104).

The invention discloses a polarized light combined target common-path compensated two-dimensional photoelectric auto-collimation method and device, and the method and device provided by the invention belong to the technical field of precision instrument manufacture and precision measurement. According to the invention, the defects in the existing method and device are solved, and high-precision photoelectric autocollimation angle measurement is realized for solving. The method comprises: a common-path shift quantity monitoring separating device based on a detector combined target can be used for combining a polarizing light splitter, a light-split target detector, 1 / 2 wave plate and a reflector at 45 degrees to form the detector combined target, and can be used for separating a reference light beam in common-path transmission with a measurement light beam while obtaining the measurement light beam in two-dimensional angle variation by using a linear polarization feature of the laser; a controller is used for controlling a two-dimensional light beam deflection device in real time according to the shift quantity reflected by the reference light beam to inhibit the shift quantity coupled in the measurement light beam, the precision measurement on the two-dimensional angle variation is realized. The device for realizing the method comprises a two-dimensional photoelectric auto-collimation tube, the common-path shift quantity monitoring separating device based on the detector combined target, the controller and the two-dimensional light beam deflection device.

The invention discloses a satellite-ground integrated high-precision satellite multi-beam calibration method. On-satellite calibration beam forming equipment is used for achieving multi-beam calibration signal generation and beam forming. A ground calibration station is located at the theoretical pointing center of a multi-beam calibration beam, and real-time beam pointing error information is obtained by capturing and receiving calibration signals and measuring power. Measured data are transmitted to the control center through a ground link or a satellite link; wave beam pointing deviation compensation parameters are generated in the control center and sent to the satellite measurement and control station; and the satellite measurement and control station converts the beam pointing deviation compensation parameter into an upload instruction and injects the upload instruction into the satellite platform. According to the method, a ground calibration mode is adopted, the requirement foron-satellite operational capability can be reduced, an on-orbit operation processing flow is simplified, measurement errors caused by satellite power fluctuation are reduced, the precision of a calculation result is improved, and the method has the advantages that the system structure is clear, the calibration process is clear in division of work and positioning, and the operation complexity of adeviation calculation method is low.