Spectrophotometric pupil laser confocal LIBS (laser-induced breakdown spectroscopy), Raman spectrum and mass spectrum imaging method and device

Abstract

The invention relates to a spectrophotometric pupil laser confocal LIBS (laser-induced breakdown spectroscopy), Raman spectrum and mass spectrum imaging method and device, and belongs to the technical field of confocal microscopy imaging, spectral imaging and mass spectrum imaging. According to the method and the device, the spectrophotometric pupil confocal imaging technology is combined with spectrum and mass spectrum detection technologies, a sample is subjected to high-spatial-discrimination form imaging by the aid of micro focusing spots, processed with a super-resolution technology, of a spectrophotometric pupil confocal microscope, a mass spectrum detection system is adopted to perform mass spectrum detection on charged molecules, atoms and the like in a micro-area of the sample, a spectrum detection system is adopted to perform micro-area spectrum detection on an excitation spectrum (a Raman spectrum and induced breakdown spectroscopy) of the focusing spots of the spectrophotometric pupil confocal microscope, and high-spatial-discrimination and high-sensitivity imaging and detection for complete components and forms of the micro-area of the sample are realized through complementary advantages and structural fusion of laser multi-spectral detection. The method and the device can provide a brand new technical approach for imaging and detection of material components and forms of fields such as biology, material and the like.

Description

technical field [0001] The invention belongs to the field of confocal microscopic imaging technology, spectral imaging technology and mass spectrometry imaging technology, which combines split-pupil confocal microscopic imaging technology, laser-induced breakdown spectral imaging technology, Raman spectral imaging technology and mass spectrometry imaging technology, and relates to a split-pupil Laser confocal LIBS and Raman spectroscopy-mass spectrometry imaging methods and devices have broad application prospects in the fields of biology, materials, minerals, and micro-nano manufacturing. technical background [0002] Mass spectrometry (Mass Spectrometry) is to ionize the components in the sample, so that the generated charged atoms, molecules or molecular fragments with different charge-to-mass ratios are respectively focused under the action of electric field and magnetic field to obtain a spectrum arranged in order of mass-to-charge ratio instrument. Mass spectrometry i...

AI Technical Summary

Problems solved by technology

[0005] 1) Due to the use of simple laser focusing to desorb and ionize the sample, there are still problems such as large laser focusing spot and low spatial resolution of mass spectrometry detection;

[0006] 2) It is impossible to detect neutral atoms, molecules, neutral ions and groups, etc., which restricts the accurate and complete acquisition of sample component information;

[0007] 3) The time required for mass spectrometry imaging is long, and the axial position of the focused spot of the laser mass spectrometer often drifts relative to the sample to be measured

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