High spatial resolution laser dual-axis confocal spectroscopy-mass spectroscopic imaging method and device
A high spatial resolution, microscopic imaging technology, used in measurement devices, analytical materials, material excitation analysis, etc. Drift and other problems, to achieve the effect of overcoming focal plane stray light interference, improving spatial resolution, and strong anti-stray light ability
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Embodiment 1
[0047] The embodiment of the present invention is based on image 3 The shown high-spatial-resolution laser dual-axis confocal spectrum-mass spectrometer imaging device uses a pulsed laser 30, a condenser lens 31, and a light-transmitting optical fiber 32 at the focus of the condenser lens 31 to replace figure 1 Point Light 1 in . exist image 3 An exit beam attenuator 33 is introduced into the laser focusing system of the laser, and a detection beam attenuator 34 is introduced into the laser dual-axis confocal detection system.
[0048] like image 3 As shown, the high spatial resolution laser dual-axis confocal spectrum-mass spectrometer imaging device includes a point light source 1, a collimator lens 2 placed along the direction of the incident optical axis 7, an outgoing beam attenuator 33, a ring light generation system 4, and a focusing spot The measurement objective lens 6 to the measured sample 8 also includes a collection lens 11 for detecting the reflected light ...
Embodiment 2
[0070] like figure 2 In the shown high spatial resolution laser dual-axis confocal spectro-mass microscope imaging device, the ring light generating system 4 can be replaced by a vector beam generating system 28 and a pupil filter 29 .
[0071] The radially polarized light longitudinal field tight focusing system composed of the vector beam generating system 28, the pupil filter 29 and the measuring objective lens 6 is used to compress the lateral size of the focused spot.
[0072] The remaining imaging measurement methods are the same as in Example 1.
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