Spectral pupil laser differential confocal LIBS, Raman spectrum-mass spectrum microscopic imaging method and Raman spectrum-mass spectrum microscopic imaging device

Abstract

The invention relates to a spectral pupil laser differential confocal LIBS, a Raman spectrum-mass spectrum microscopic imaging method and a Raman spectrum-mass spectrum microscopic imaging device and belongs to the technical fields of confocal microscopic imaging, optical-spectrum imaging and mass spectrum imaging. In the invention, spectral pupil laser differential confocal imaging is combined with optical-spectrum and mass spectrum detection technologies, so that high-spatial-discrimination form imaging to a sample is carried out by means of a micro focus light spot of a spectral pupil laser differential confocal microscope which is subjected to ultra-discrimination technology treatment; mass spectrum detection to charged molecules and atoms in a micro zone of a sample is carried out by means of the mass spectrum detection system; micro zone optical spectrum detection is carried out to a focused light spot excitation spectrum (Raman spectrum, induced breakdown spectrum) of the spectral pupil laser differential confocal microscopic system through the optical-spectrum detection system; and high-spatial discrimination, high-sensitive imaging and high-sensitive detection to complete component information and form parameters of the sample micro zone is carried out through advantage complement and structural fusion of laser multi-spectrum detection. The invention provides a novel technical approach for imaging detection of substance components and formations in the field of biology, material and the like.

Description

technical field [0001] The invention belongs to the field of confocal microscopic imaging technology, spectral imaging technology and mass spectrometric imaging technology, and combines the split-pupil differential confocal microscopic imaging technology, laser-induced breakdown spectral imaging technology, Raman spectral imaging technology and mass spectroscopic imaging technology, and relates to a Split-pupil laser differential confocal LIBS, Raman spectroscopy-mass spectroscopy microscopic imaging methods and devices have broad application prospects in the fields of biology, materials, minerals, and micro-nano manufacturing. technical background [0002] Mass spectrometry (Mass Spectrometry) is to ionize the components in the sample, so that the generated charged atoms, molecules or molecular fragments with different charge-to-mass ratios are respectively focused under the action of electric field and magnetic field to obtain a spectrum arranged in order of mass-to-charge ...

AI Technical Summary

Problems solved by technology

[0005] 1) Due to the use of simple laser focusing to desorb and ionize the sample, there are still problems such as large laser focusing spot and low spatial resolution of mass spectrometry detection;

[0006] 2) It is impossible to detect neutral atoms, molecules, neutral ions and groups, etc., which restricts the accurate and complete acquisition of sample component information;

[0007] 3) The time required for mass spectrometry imaging is long, and the axial position of the focused spot of the laser mass spectrometer often drifts relative to the sample to be measured

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