The invention discloses a quantitative
analysis method for
spatial distribution of material elements. The method comprises the following steps: acquiring a spatial intensity
distribution diagram of to-be-detected elements in a sample by utilizing a micro-area
imaging technology; measuring the average concentration of the to-be-measured element through an element quantitative analysis technology; carrying out normalization
processing on the spatial intensity
distribution diagram by taking the average concentration as a reference, and establishing a mapping model of an intensity value and an
absolute concentration value; and according to the mapping model, converting the intensity value of each pixel point in the spatial intensity
distribution diagram into an
absolute concentration value, and generating a quantitative
spatial distribution diagram of the elements. According to the method, element quantitative data and
imaging data are coupled, the dependence of a traditional method on a matrix matching standard substance is broken through, accurate spatial quantitative analysis from ppm-level impurities to major elements under the micro-nano scale is realized, and the method has the characteristics of good
traceability, full-concentration coverage, multi-technology compatibility and the like; the method can be widely applied to element distribution characterization of complex systems such as composite
nanomaterials and
heterojunction devices, and a reliable analysis means is provided for material performance optimization.