Embodiments of the present application propose an imaging
system based on super-Raleigh limit focusing lens and its application, which can be widely applied in the technical fields of
photolithography, biomedical,
optical imaging and nanometer structure precision measurement; the
system can produce
transverse wave vector distribution and excitation and detection vector beams with
wave vector range meeting the requirements by
wave vector ring modulation on incident
linearly polarized light, focus the vector beams to make the focusing field meet the scale requirements, so as to obtain super-Raleigh limit excitation PSF and detection PSF, and obtain a
confocal PSF capable of exciting high-order terms of
spot intensity by superimposing the excitation and detection PSFs, thereby improving the imaging resolution of the
system; on the other hand, the system can use
solid and hollow focusing spots formed by focusing vector beams to form an image, and calculate according to the imaging result to reduce interference, so as to obtain a high-resolution detection result far exceeding the Raleigh
diffraction limit, and further improve the resolution of the imaging system.