The invention discloses a minitype array filter based on metal surface plasma excimer. A plurality of array units are provided on an optical substrate, a sub-wavelength hairline is set between the array units and a plurality of linear grid grooves of incidence plane, or emergence plane or incidence plane and emergence plane which are symmetrically distributed are set at the two sides of the sub-wavelength hairline in a space, wherein the distance of the linear grid groove is same to the width thereof. The invention has features: simple technique, compactness, and can be connected with the LED, photosensitive detection, optical imaging sensor to form a variety of filters and imaging spectrometer of sub-wavelength, with high resolution, high integrity and wide application foreground in photo etching, high density data storage, near-field optics, space exploration, and medical diagnosis. The minitype array filter can be used in microwave, infrared and visible light band.