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Miniature array spectral filter based on metallic surface plasma excimer

A technology of plasmons and microarrays, which is applied in the direction of optical filters, can solve the problem of single application range, and achieve the effects of wide material selection, simple process flow, and easy integration

Inactive Publication Date: 2008-09-03
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Such a traditional structure can only realize the most basic filtering function, and the application range is relatively single.

Method used

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  • Miniature array spectral filter based on metallic surface plasma excimer
  • Miniature array spectral filter based on metallic surface plasma excimer
  • Miniature array spectral filter based on metallic surface plasma excimer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0016] Example 1. Microarray filter based on area normalized transmission enhancement under normal incidence of P polarized light

[0017] Normal blue LED wavelength λ 1 =465±5nm, green LED wavelength λ 2 =520±5nm, red LED wavelength λ 3 =630±5nm, combined with the reference wavelength, the structure diagram of the micro-array filter is as follows figure 1 As shown, metal silver (Ag) is selected as the optical substrate material, and a subwavelength slit is arranged in the middle of each array unit, and 5 linear grid grooves symmetrically distributed on the incident surface are arranged at intervals on both sides of the subwavelength slit , the spacing of the linear grid grooves is the same as the width of the linear grid grooves. The transmissive cell structures are available in three different sizes, enabling the realization of transmission-enhancing filters based on the incident wavelengths of red, green and blue. figure 1 Select the width of the mid-subwavelength slit ...

Embodiment 2

[0018] Example 2. Transmission enhancement and beam converging device combining sub-wavelength slits and linear grid grooves under the condition of normal incidence of P polarized light

[0019] Transmission structural units such as Figure 5 As shown, metal silver (Ag) is selected as the optical substrate material, a subwavelength slit is arranged in the middle of each array unit, and five symmetrically distributed linear beams with both entrance and exit surfaces are arranged at intervals on both sides of the subwavelength slit. Grid grooves, the spacing of the linear grid grooves is the same as the width of the linear grid grooves. The grating groove period of the incident surface D in =600nm, that is, the width of the grid groove is D' in =300nm, the periods of the grid grooves on both sides of the exit surface are: D out1 = 720nm and D out2 =420nm, that is, the width of the grid grooves is: D' out1 =360nm,D out2 =210nm, the depth of each grid groove is h=80nm. The ...

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Abstract

The invention discloses a minitype array filter based on metal surface plasma excimer. A plurality of array units are provided on an optical substrate, a sub-wavelength hairline is set between the array units and a plurality of linear grid grooves of incidence plane, or emergence plane or incidence plane and emergence plane which are symmetrically distributed are set at the two sides of the sub-wavelength hairline in a space, wherein the distance of the linear grid groove is same to the width thereof. The invention has features: simple technique, compactness, and can be connected with the LED, photosensitive detection, optical imaging sensor to form a variety of filters and imaging spectrometer of sub-wavelength, with high resolution, high integrity and wide application foreground in photo etching, high density data storage, near-field optics, space exploration, and medical diagnosis. The minitype array filter can be used in microwave, infrared and visible light band.

Description

technical field [0001] The invention relates to an optical filter device, in particular to a micro-array optical filter based on metal surface plasmon polaritons. Background technique [0002] The function of the filter is mainly an optical filter, which can filter a specific wavelength light source in the working band and cut off incident light of other wavelengths. The main structure of the traditional optical filter is that one side of the lens is coated with multiple dielectric layers of high and low reflectivity materials to achieve the effect of light filtering. Such a traditional structure can only realize the most basic filtering function, and its application range is relatively single. [0003] In simple terms, surface plasmon is the evanescent wave of free electrons and incident photons localized on the interface of a conductor (usually a metal). It can be coupled and excited through a suitable structural device. size. Contents of the invention [0004] The ob...

Claims

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Application Information

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IPC IPC(8): G02B5/20
Inventor 王保清李玲厉以宇顾培夫王颖
Owner ZHEJIANG UNIV
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