To provide a manufacturing method of a
thermoelectric conversion module capable of an integral multi-bevelling in a thin film without a substrate base material or a solder layer.SOLUTION: A manufacturing method of a
thermoelectric conversion module contains steps of (A) to (D): (A) a step of arranging chips of P-type and N-type
thermoelectric conversion materials and forming a thermoelectric conversion material layer; (B) a step of forming an
insulation layer L1 having P-type and N-type contact holes; (C) a step of forming an
insulation layer L2 having P-type and N-type contact holes; and (D) a step of arranging
electrode pieces M1 for connecting a pair of P-type and N-type adjacent contact holes onto the
insulation layer L1 in a
chip arrangement direction with an interval so that the adjacent
electrode pieces M1 are not contacted to each other, arranging
electrode pieces M2 for connecting a pair of N-type and P-type adjacent contact holes onto the insulation layer L2 in the
chip arrangement direction with an interval so that the adjacent electrode pieces M2 are not contacted to each other, and thereby electrically connecting each electrode piece M1, the P-type thermoelectric conversion material, each electrode piece M2, and the N-type thermoelectric conversion material in this order.SELECTED DRAWING: Figure 2