The invention discloses a preparation method of a monocyclopentadienyl trialkoxy
titanium precursor, and belongs to the technical field of synthesis of
metal organic compounds. The method comprises the following steps: S1, reacting a
deprotonation product of RnCp, (R0) mSiXz and an
accelerant to obtain an intermediate I; s2, reacting the intermediate I with TiX4 to obtain an intermediate II; s3, the intermediate II and R1OM are subjected to a reaction, and a monocyclopentadienyl trialkoxy
titanium precursor is prepared; r and R1 are independently selected from C1-C5 straight-chain or branched-chain
alkyl groups, Cp is cyclopentadienyl, R0 is C1-C3
alkyl groups, X is
halogen and is selected from any one of F, Cl, Br and I, n is an integer of 0-5, m + z is equal to 4 and 1 < = z < = 2, and M is
alkali metal. The synthesis
route has good safety and economical efficiency, the yield of the industrial synthesis
route is remarkably improved, the reaction time is short, the synthesis efficiency is high, and the industrial application value is high.