An adaptive laser spectroscopy and imaging method suitable for deep space micro-analysis

Abstract

The invention discloses an adaptive laser spectrum and imaging method suitable for deep space micro-region analysis. The method is realized on an adaptive laser spectrum and imaging detection system.The method comprises the following five steps: expected focal spot adaptive focusing calibration, single-point tight focusing of a detection object, Raman fluorescence and imaging information acquisition, Raman fluorescence imaging scanning micro-region analysis, and LIBS (Laser-induced Breakdown Spectroscopy) scanning micro-region analysis and information fusion. The method disclosed by the invention has the beneficial effects that an adaptive laser spectrum and imaging detection method is provided, and the diameter of focusing spots can be adaptively adjusted during micro-region analysis; the regional average grey degree of an electron microscope serves as scanning imaging point intensity, and the self-focusing and wide spectrum scanning imaging requirements are met; and three-dimensional space LIBS elemental analysis, active laser Raman molecular analysis, hyperspectral fluorescence and visible wide spectrum scanning imaging can be simultaneously realized, and multiple kinds of information can be provided for performing micro-region fine detection.

Description

technical field [0001] The invention relates to a substance detection method, in particular to a substance detection method using scanning laser-induced plasma LIBS, laser Raman imaging, laser-induced fluorescence imaging and laser illumination area array wide-spectrum scanning imaging, which is suitable for deep space detection of planets The detection of matter in an open environment belongs to the field of in-situ detection of planets. Background technique [0002] For future deep space exploration, higher requirements are put forward for material composition detection technology and methods, and the in-situ fine detection capability is the highest point of technology aimed at by all aerospace powers. Fine detection requires a smaller laser focus point, a small amount of analyzed substances, more abundant elements and molecular types, more accurate quantification, and it is carried out under the monitoring of extremely high spatial resolution imaging. [0003] Laser-indu...

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Problems solved by technology

LIBS and Raman material analysis in deep space micro-area detection are more demanding than conventional laser spectroscopy applications. The main challenges and technical difficulties are that due to the complex composition of minerals contained in rocks and soils, the same mineral particles Very small diameter

Therefore, in the micro-area analysis, the laser focus spot is required to be on the order of 1 micron, so that the minerals can be accurately analyzed in the micro-area, and the requirements for the microscopic optical path are extremely high. The spot is affected by the degradation of the laser mode and the diffraction limit, so the focused spot is often larger than 5 microns, which cannot meet the requirements; the combination of a free optical path, a short-wavelength laser, and a high-magnification, high-NA microscopic objective can theoretically obtain extremely Small focusing spot, but because the focusing depth of field is extremely small, it is necessary to find a suitable self-focusing scheme for micro-area analysis and three-dimensional structure analysis, and to ensure that the focusing spot size of each point is consistent and consistent with the design value. At the same time, if the self-focusing time Long, it will affect the scanning imaging speed

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