The invention discloses a flexible micro-nano cross-scale integrated metasurface single-
cell sensor and a preparation method thereof, and relates to the field of biosensing. The sensor comprises a PDMS flexible substrate layer, a micro-nano cross-
scale structure layer and a gold
metal film layer, the micro-nano cross-
scale structure layer adopts a nesting design of a micron-scale single
cell capture unit and a nano-scale
plasmon structure, so that single
cell precise limiting and local
electromagnetic field multi-stage enhancement are realized, and the problems of poor adaptability and low sensitivity of a traditional rigid sensor are solved. According to the preparation method, a
silicon-based template-replication forming-magnetron
sputtering process is adopted, a
silicon template is prepared through deep
ultraviolet lithography and
deep reactive ion etching, a
gold film is deposited after a flexible micro-nano structure is copied by PDMS, and large-scale
mass production of the sensor is realized. The sensor has excellent flexibility,
biocompatibility and high detection sensitivity, can realize single cell level accurate and in-situ detection, is suitable for the scenes of
early disease screening, cell biological analysis, personalized
medical treatment and the like, and is simple in process and low in cost.