Spectroscopic pupil laser confocal Raman spectrum testing method and device
A technology of spectrum testing and Raman spectroscopy, which is applied in the field of microspectral imaging, can solve problems such as reduced focus accuracy, single mode, and instrument system drift, and achieve the effect of suppressing errors and improving measurement accuracy
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[0062] In this embodiment, the dichroic spectroscopic system 6 is a Notch filter, the spectrum detector 9 is a Raman spectrum detector, the image acquisition system 13 is a CCD, and the image magnification system 27 is a magnifying objective lens.
[0063] Such as Figure 8 As shown, the detection process of the split pupil laser confocal Raman spectrum is as follows:
[0064] First, the light source system 1 composed of lasers emits excitation light that can excite the Raman spectrum of the sample under test. The excitation light is condensed by the third condenser lens 24 and then enters the second pinhole 25 to become a point light source, which is collimated and expanded by the fourth condenser lens 26. After the beam, a parallel excitation beam is formed. After the excitation light beam passes through the illumination pupil 3 and the measuring objective lens 2, it is focused on the sample 5 to be tested, and the Raman scattered light carrying the spectral characteristics of th...
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