The application relates to a high-sensitivity
confocal Raman spectrum
fast measurement method and device based on two-dimensional MEMS micromirror scanning, and belongs to the technical field of microscopic
spectrum imaging. The method utilizes two pieces of two-dimensional MEMS micromirrors to realize
light beam transverse scanning, omits scanning lenses and tube lenses, utilizes a dichroic light splitting
system to realize lossless separation of reflected light and
Raman scattering light, utilizes the reflected light to construct a
confocal microscopic imaging system, realizes fast high-spatial-resolution detection of the geometric appearance of a sample, utilizes the
Raman scattering light to construct a
confocal Raman spectrum detection
system, for a sample with a relatively
smooth surface, single-layer scanning can be carried out to quickly complete Raman spectrum detection of the surface of the sample, and for a sample with a relatively large surface fluctuation, point-by-point focusing can be carried out to realize high-spatial-resolution Raman spectrum detection. The application has the advantages of high sensitivity,
fast measurement speed, wide sample adaptability (a sample with a relatively large surface fluctuation can be measured), high integration degree and simple structure.