Femtosecond laser processing parameter confocal Raman microspectroscopy in-situ monitoring method and device

A technology of femtosecond laser processing and in-situ spectroscopy, which is applied in the field of in-situ monitoring of femtosecond laser processing parameters confocal Raman spectroscopy, can solve the problem of restricting the research of femtosecond laser processing mechanism and the improvement of processing technology level, and restricting femtosecond laser processing. Processing effect stability and cross-scale processing ability, unable to focus and align samples, etc., to solve the problem of high-precision real-time focusing, realize online position monitoring and axial dimension detection, and improve the effect of axial position monitoring ability

Inactive Publication Date: 2019-01-25
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0008] To sum up, in the existing femtosecond laser processing, it is impossible to accurately focus and align the sample, and it is impossible to perform high-precision in-situ monitoring of the shape and performance parameters of the sample during processing, which limits the effect of femtosecond laser processing Stability and cross-scale processing capabilities also restrict the research on femtosecond laser processing mechanism and the improvement of processing technology level

Method used

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  • Femtosecond laser processing parameter confocal Raman microspectroscopy in-situ monitoring method and device
  • Femtosecond laser processing parameter confocal Raman microspectroscopy in-situ monitoring method and device
  • Femtosecond laser processing parameter confocal Raman microspectroscopy in-situ monitoring method and device

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Experimental program
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Embodiment 1

[0046] Such as figure 1 As shown, the computer 26 performs feedback control on the two-dimensional scanner 20, the precision workbench 10, and the axial scanner 8 to realize the three-dimensional scanning and position adjustment of the processing and monitoring of the sample 9; the femtosecond laser processing system consists of a femtosecond laser 17 , a laser spatiotemporal shaping module 18, and a two-dimensional scanner 20; the confocal detection module 13 may be composed of a detection objective lens 14 and an intensity detector 15.

[0047] The implementation steps of the femtosecond laser processing parameter confocal Raman spectroscopy in-situ monitoring method are as follows:

[0048] 1) Place the sample 9 on the precision workbench 10, and the precision workbench 10 drives the sample 9 to perform scanning motion;

[0049] 2) Before processing, use the confocal axial monitoring module 1 to scan and measure the surface of the sample 9; the axial monitoring parallel be...

Embodiment 2

[0057] Such as figure 2 As shown, the laser space-time shaping module 18 is composed of a space shaper 24 and a time shaper 25, and adjusts the time domain and space domain parameters of the light beam emitted by the femtosecond laser 17, so as to optimize the femtosecond laser processing performance.

[0058] All the other are identical with embodiment 1.

Embodiment 3

[0060] Such as image 3 As shown, before processing, after the sample 9 is placed on the precision workbench 10, the sample 9 is roughly aligned by using the microscopic imaging module 33, and the light emitted by the white light source 27 passes through the illumination system 28, the illumination beam splitter 29, and the After the color mirror B 6 and the objective lens 7, parallel light beams are generated to uniformly irradiate the sample 9, and the illumination light reflected by the sample 9 is reflected by the illumination beam splitter 29 and the second beam splitter 30 and then imaged on the CCD 32 by the imaging objective lens 31, and the sample 9 can be obtained. The position and imaging area of ​​the sample 9 can be determined, and the tilt and position of the sample 9 can be judged.

[0061] All the other are identical with embodiment 1.

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Abstract

The invention relates to a femtosecond laser processing parameter confocal Raman microspectroscopy in-situ monitoring method and device, and belongs to the technical field of laser precision detectionand femtosecond laser processing and manufacturing. A laser confocal axial monitoring module with a high axial resolution is organically integrated with a femtosecond laser processing system, a confocal system curve maximal point is utilized for conducting nanoscale monitoring and sample axial processing size measurement on the sample axial position, real-time focus fixing of the sample axial position and high-precision measurement of the size of a processed micro-nano structure are achieved, and the drifting problem and the high-precision online detection problem in the measurement process are solved; a confocal Raman microspectroscopy detection module is utilized for monitoring and analyzing information such as molecular structures of sample materials subjected to femtosecond laser processing, the information is integrated through a computer, microstructure femtosecond laser high-precision processing and micro-domain form performance in-situ monitoring analysis are integrated, and the controllability of microstructure femtosecond laser high-precision processing and the processing quality of the samples are improved.

Description

technical field [0001] The invention relates to a femtosecond laser processing parameter confocal Raman spectroscopic in-situ monitoring method and device, which is used for in-situ on-line monitoring and analysis of the micro-area morphology and performance of microstructure femtosecond laser processing, and belongs to laser precision detection technology, femtosecond laser processing and manufacturing technology field. Background technique [0002] Femtosecond laser processing is regarded as a century-old technology that "may cause a new industrial revolution" due to its remarkable advantages such as wide material adaptability, high processing precision, and no mask required, and is regarded as a macro-micro-spanning technology. The preferred method of scale micro-nano manufacturing has been given priority in the development of China, the United States and other major manufacturing countries in the world. [0003] Femtosecond laser processing is to use the nonlinear effec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/65G01N21/01
CPCG01N21/65G01N21/01
Inventor 邱丽荣王允赵维谦
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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