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Microscopic confocal Raman spectrometer

A spectrometer and microscope objective lens technology, applied in Raman scattering, material excitation analysis, etc., can solve problems such as weak Raman signal, reduce the cost of use, realize micro confocal measurement, and facilitate promotion.

Inactive Publication Date: 2012-06-20
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

However, these single-grating spectrometers are rarely used to study Raman spectroscopy. The main reason is that the Raman signal is very weak, and microscopic techniques are needed to increase the optical power density of the excitation light, and at the same time improve the collection efficiency and the efficiency of the Raman signal light. SNR

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Embodiment Construction

[0022] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0023] Raman spectrometers mainly include large Raman spectrometers with three gratings and small Raman spectrometers with single gratings and Raman filters. Even with the development of modern technology, single-grating Raman spectrometers are made smaller and smaller, but in order to realize the function of micro confocal, single-grating Raman spectrometers are equipped with microscopes. Various commercialized complete system sets make the use cost of Raman spectrometers very high. For example, the price of general commercial Raman spectrometers on the market is around 1 million RMB, or even more expensive.

[0024] At the same time, there are still many single-grating spectrometers with very simple structures on the ma...

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Abstract

The invention discloses a microscopic confocal Raman spectrometer, comprising a microscopic confocal Raman module and a single-grating spectrometer which is matched with the microscopic confocal Raman module, wherein the microscopic confocal Raman module comprises a reflecting mirror, an angle-adjustable optical filter bracket, a sample monitoring optical path, a Raman optical filter, a microscopic objective lens, a collecting lens and a size-adjustable pinhole. Laser is focused to a sample by using the microscopic confocal Raman module, so that the sample and the corresponding laser spots are observed microscopically, and a Raman signal is microscopically confocal to the size-adjustable pinhole simultaneously, therefore the Raman signal is detected by using the single-grating spectrometer. The invention provides a novel microscopic confocal Raman spectrometer with the characteristics of simpleness, economy and convenience for adjustment, so that the microscopic observation of the sample and the corresponding laser spots can be achieved, besides, the microscopic confocal Raman spectrometer plays a potential role on Raman spectrum measurement of materials.

Description

technical field [0001] The invention relates to the technical field of Raman spectrum testing, in particular to a microscopic confocal Raman spectrometer, which can be used for real-time observation of samples and low-cost confocal microscopic testing of Raman spectrum. Background technique [0002] As we all know, with the development of modern technology, various filters for Raman spectroscopy have emerged. These filters make Raman spectrometers simpler by eliminating the need for multiple monochromators to filter the excitation light. So far, microscopic single-grating Raman spectrometers using notch filters and sideband filters have dominated the major Raman spectrometer market. At the same time, in order to improve the signal-to-noise ratio of Raman signals, micro-Raman spectrometers generally use confocal technology. Many Raman spectrometers on the market now integrate lasers, microscopes, confocal pinholes, gratings and detectors. figure 1 shown. In these commerci...

Claims

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Application Information

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IPC IPC(8): G01N21/65
Inventor 谭平恒韩文鹏张昕鲁妍罗师强
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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