Laser dual-axis confocal Brillouin-Raman spectral measurement method and apparatus
A technology of Raman spectroscopy and measuring devices, which is applied in the field of microspectral imaging, can solve the problems of reducing the spatial resolution capability of confocal Raman spectroscopy detection, large system drift, and long detection time, so as to improve the detection capability of micro-region spectra, The effect of simplifying the optical path structure and improving the measurement accuracy
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[0053] In this embodiment, the light source 1 is a laser, the polarization modulation system 29 is a radially polarized light generator, the dichroic light splitting system 8 is a Notch filter, the data processing system 21 is a computer, and the image acquisition system 11 is a CCD detector. 24 is a CCD detector, and the image magnification system 10 is a magnifying objective lens.
[0054] like figure 1 , figure 2 and Figure 5 As shown, the illumination objective lens 2 and the collection objective lens 7 are symmetrically distributed on both sides of the normal line 5 of the measurement surface, and the included angle between the illumination optical axis 4 and the normal line 5 of the measurement surface is θ 1 6. The angle between the collection optical axis 20 and the normal line 5 of the measurement surface is θ 2 31, where θ 1 = θ 2 , laser biaxial confocal Brillouin-Raman spectroscopy measurement method, the measurement steps are:
[0055] Firstly, the beam em...
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