A kind of differential pressure contact mems capacitive film vacuum gauge

Abstract

The invention provides a differential pressure contact type MEMS capacitive film vacuum gauge, comprising a lower base, an upper base and a cover plate, the cover plate is provided with a measuring port air inlet, the upper base is provided with a pressure-sensitive film, and the upper base A measurement end chamber is formed between the pressure sensitive film of the base and the cover plate, a reference end chamber is formed between the pressure sensitive film of the upper base and the lower base, and a fixed electrode is arranged on the upper end surface of the lower base, and the fixed electrode An insulating layer is provided on the upper end surface of the upper substrate, and both the fixed electrode and the insulating layer are located in the chamber of the reference terminal, and a first lead-out groove for leading out the fixed electrode and a second lead-out groove for leading out the pressure-sensitive film are also arranged on the upper base , the pressure-sensitive film, the fixed electrode on the lower substrate, and the insulating layer form the sensitive capacitance of the vacuum gauge, and the capacitance signal is respectively drawn from the second lead-out groove of the pressure-sensitive film electrode and the first lead-out groove of the fixed electrode, and the measuring terminal The chamber communicates with the vacuum environment of the measuring end, and the chamber of the reference end communicates with the vacuum environment of the reference end.

Description

technical field [0001] The invention relates to the technical field of mechanical design and vacuum measurement, in particular to a differential pressure contact type MEMS capacitive film vacuum gauge. Background technique [0002] Capacitive pressure sensors have the characteristics of high precision, good linearity, good repeatability, and good long-term stability. It can measure the total pressure of gas or steam, and the measurement result is independent of the gas composition and type. Capacitive pressure sensors based on micro-electromechanical systems (MEMS) technology have developed rapidly in recent years due to their advantages of miniaturization and low power consumption, and have gradually replaced traditional mechanical capacitive pressure sensors in some occasions. As a member of the pressure sensor, the capacitive diaphragm gauge (CDG) is also developing in the direction of miniaturization and integration, aiming to be used in fields requiring miniaturization...

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Problems solved by technology

However, there is no similar product for MEMS-CDG with low air pressure limited below 10Pa

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