The invention discloses a preparation process for a tunneling scanning
microscope probe with reverse exponent and depth-to-length-
diameter ratio. The process comprises the following steps: taking
tungsten wire as the material for manufacturing the probe, immersing the
tungsten wire into alkaline electrolytic solution to be taken as
anode, winding a
corrosion-resistance
platinum wire on the periphery of the
tungsten wire to be taken as
cathode, sequentially adopting pulse width
voltage signals with adjustable current and duty ratio to determine the immersing depth, the electrolytic
voltage, solution concentration and the like of the tungsten wire, detecting the electrolytic current in real time, and automatically
shunting down the
voltage signals, thus stopping the
electrolysis process when the slope of curve of the electrolytic current is larger than 0.8mA / ms. The process can be utilized for manufacturing tunneling scanning
microscope probe with a reverse-exponent outline, wherein the
radius of the probe tip is smaller than 20nm, and the length-to-
diameter ratio is higher than 100-1, so that a tunneling scanning
microscope has the capability of achieving the atomic-scale
image resolution ratio, and measuring the depth-to-
width ratio micro-nano structure.