This application relates to the field of
semiconductor device parameter testing technology, and discloses a
semiconductor low-
frequency noise measurement
system adaptable to multiple types of devices, comprising a hardware measurement and
software analysis subsystem. The hardware measurement subsystem includes a low-
noise power supply and bias module, a dual-path device adapter, a multi-channel synchronous acquisition module, and a hierarchical adaptive
preamplifier. The
system superimposes a high-frequency perturbation sensing
signal onto the measurement link, extracts feedback parameters to calculate the
equivalent input impedance, quantizes the physical
pole frequency, drives a controlled analog
switch matrix to generate controlled physical zeros, and cancels additional low-pass poles caused by impedance mismatch. The dual-path device adapter synchronously extracts the mixed
signal of the
test channel and the common-mode leakage
signal of the reference channel; the
software analysis and control module reconstructs the
transfer function, uses coherence coefficients to dynamically weight and fuse the physical prior and data-driven model, performs coherent subtraction and full-link inversion compensation in the complex
frequency domain, and outputs a clean equivalent
noise voltage spectral density sequence.