75results about How to "High speed scan" patented technology

A gain medium 12 and a tunable filter are provided in an optical path of laser oscillation. The tunable filter has an optical beam deflector for periodically changing an optical beam at a constant angular speed, a prism 26 on which deflected light is made incident, and a diffraction grating 27. Appropriate selection of the apex angle α of the prism 26 and an angle β formed by the prism 26 and the diffraction grating 27 can provide a tunable laser light source for changing the oscillation frequency at high speed and a constant variation rate.

An optical fiber loop has a gain medium having a gain at an oscillation wavelength and optical circulators 13 and 14. Collimate lenses 22 and 24 enlarge light bean taken from the optical circulators 13 and 14. A polygon mirror 25 is provided on the light axis, and is rotated. A diffraction grating 27 is provided at the receiving position of the light reflected by the polygon mirror 25, and is of a Littrow configuration which reflects the light in the same direction as the incident light. A selected wavelength changes according to an incident angle to the diffraction grating 27, resulting in increase of selectivity owing to twice incident, thereby permitting to change an oscillation wavelength with narrow band even when changing the selected wavelength by rotating the polygon mirror 25 at high speed.

Systems and methods for multi-dimensional metrology and inspection of a specimen such as a bumped wafer are provided. One method includes scanning the specimen with partial oblique illumination to form an image of the structure, either through the normal collection angle or through an oblique collection angle. The method also includes integrating an intensity of the image and determining a height of the structure from the integrated intensity. The integrated intensity may be approximately proportional or inversely proportional to the height of the structure. In addition, the method may include scanning the specimen with bright field illumination to form a bright field image of the specimen. The method may also include determining a lateral dimension of the structure from the bright field image. Furthermore, the method may include detecting defects on the specimen from the bright field image or the obliquely-illuminated image.

An optical imaging apparatus has an optical scanning probe configured to irradiate low-coherence light onto a subject and to perform photo-reception of light scattered at the subject, and an observation device adapted to construct a cross-section image of the subject based on information from the light received through the optical scanning probe. The optical scanning probe is detachably connected to the observation device.

An optically scanning apparatus and defect inspection system able to detect a defect with a high resolution and able to greatly shorten the inspection time. An radiation beam generated from a light source is converted to a light beam array of an m×n matrix by a two-dimensional diffraction grating. The light beams of the light beam array are focused into micro spots by an objective lens and projected on a sample. Therefore, a two-dimensional light spot array of an m×n matrix is formed on a sample. The sample stage rotates and moves rectilinearly in an r direction, so the sample surface is scanned by the m×n matrix of light spots. As a result, the sample surface is spirally scanned by a light beam of a belt shape of the scan width, so can be scanned at a high speed. Further, the beams reflected by the sample surface are received by light receiving elements separated by light blocking members, so a confocal optical system is formed and as a result the resolution of detection of defects becomes much higher.

This invention realizes a three-dimensional confocal microscope in which mechanical vibrations do not occur in the scanning unit for scanning in the direction of optical axis, and in which scanning in the direction of optical axis can be carried out at a high speed. This invention has the following features. In the confocal microscope having a confocal scanner attached to an optical microscope and constructed to enable acquisition of an image of a sample as a confocal image by the confocal scanner, a variable-focus lens of surface tension control type having no moving part is uses as the field lens.

The present invention provides a scanning probe microscope, a sample observation method using the same, and a device manufacturing method that can measure accurate three-dimensional shape information of a sample without destroying the sample with a high total throughput, and can measure Correct three-dimensional shape information for walls or overhanging specimens. When the probe is brought into contact only at the measurement point, when moving to the next measurement point, once the probe is raised and retracted, the probe is moved to the next measurement point, and the probe is approached without damaging the sample. In the three-dimensional shape method, high-frequency, small-amplitude cantilever vibration and vibration detection are performed, and lateral vibration or vertical and horizontal vibration are performed to improve the contact force detection sensitivity at steep slopes. It has a part that tilts the probe according to the tilt of the measurement object and can absorb the large change in the direction of the light reflected by the cantilever for detecting the contact state of the probe and the sample with the tilt of the probe. or adjusted structure.

By the present invention, there is provided a fiber having nucleic acid immobilized thereon, an alignment of fibers having nucleic acid immobilized thereon, and a slice thereof.

A position detecting device includes: X-axis electrodes formed by a plurality of conductors that are arranged substantially parallel to each other; Y-axis electrodes formed by a plurality of conductors that are arranged substantially parallel to each other and that extend perpendicularly to the X-axis electrodes; a driving section for supplying an AC signal to the X-axis electrodes; a synchronous clock generating section for generating a synchronous clock at the time when the AC signal passes through zero-cross points; a first change-over switch for selectively supplying the AC signal outputted from the driving section to a predetermined electrode among the X-axis electrodes in response to the synchronous clock; a second change-over switch for selecting a predetermined electrode among the Y-axis electrodes in response to the synchronous clock; a synchronous detector for synchronous-detecting a signal outputted by the Y-axis electrodes through the second change-over switch based on the synchronous clock, and outputting the detected signal; and a position calculating section for calculating a position indicated by an indicator based on the signal outputted from the synchronous detector, the position corresponding to one or more intersections of the X-axis electrodes and Y-axis electrodes.

An electrostatic capacity type position detecting device having increased scanning speed is provided. The device includes a signal supplying electrode including a plurality of electrodes arranged in parallel with each other in a first direction, and a receiving electrode also including a plurality of electrodes arranged in parallel with each other in a second direction perpendicular to the first direction. A one-shot pulse having a predetermined time width is applied sequentially to the plurality of electrodes of the signal supplying electrode at a frequency equal to an integral multiple of 200 kHz. In other words, the sequential application of the one-shot pulse occurs with a time difference that is shorter than (e.g., 1 / N of) the predetermined time width. A current change caused at rising and falling edges of the one-shot pulse is detected through the receiving electrode, to thereby indicate a position on the position detecting device.

A minitype laser two-dimensional scanning measurement system belongs to the laser measurement technique field and is characterized in that the minitype laser two-dimensional scanning system used for measuring the distance, azimuth and pitch angle of an measured object is formed by a laser, a minitype two-dimensional scanning mirror, a range module, an angle measurement module and a controller on the basis of the minitype two-dimensional scanning mirror and has the advantages that the volume is small; the power cost is low; the scanning speed is high and the measurement accuracy is high with the maximal measurement distance of 10km, a measurement accuracy of 3m, an angle-measurement scope of 20 degree multiplied by 20 degree and an angle-measurement accuracy of 0.1 degree.

The invention discloses a fast book scanner and an operating method thereof. The scanner comprises a base, two supporting plates, a shooting device and a height-adjustable support, wherein the two supporting plates are arranged opposite to each other and are used for supporting books. The supporting plates are located on the upper surface of the base, the edges of the supporting plates are movably connected with the base through pivots, and an included angle for containing a book to be scanned is formed between the supporting plates. The shooting device is provided with double camera lenses, and an included angle is formed between the camera lenses. The scanning area of each camera lens is the surface area of the corresponding supporting plate. When the fast book scanner works, the book is opened and placed at the position of the included angle formed between the supporting plates, and two adjacent pages of the book are located on the two supporting plates. The included angle between the two supporting plates is adjusted to enable the double camera lenses of the shooting device to be aligned with the opened pages of the book respectively, pictures of the pages are taken, and scanning is achieved.

A display includes a pixel array, a vertical scan circuit, a horizontal drive circuit, and an auxiliary scan circuit. The pixel array includes scan lines, signal lines, pixels, and auxiliary scan lines. Each pixel includes a transistor, a pixel electrode, and an auxiliary capacitor. The auxiliary scan circuit sequentially applies auxiliary pulses, of which potential is reversed between a high level and a low level relative to a predetermined reference potential, to the auxiliary scan lines synchronously with selection pulses to control such that a potential of one electrode of each auxiliary capacitor in a selected pixel row is opposite in polarity to that of a signal written in the corresponding pixel electrode in the selected row, and further control such that the potential of the electrode of each auxiliary capacitor is returned to the reference potential when the selected row is released.

An imaging system includes a gantry rotating around an object on a table. A cathode emitter is coupled to the gantry and generates an electron beam. An anode, also coupled to the gantry, is stationary with respect to the cathode emitter and generates an x-ray flux in response to the electron beam. A detector is coupled to the gantry and is adapted to receive the x-ray flux and generate therefrom a detector signal.

The invention relates to a detection method and device of optical component surface topography and subsurface defect information. The method comprises the following steps that wavelength information is used to measure a distance, one beam of compound color light (white) with a broad spectrum is emitted by a light source, spectral dispersion is generated through a dispersive lens to form monochromatic light with different wavelengths, and a focal point of each wavelength corresponds to one distance value; measurement light is reflected back from a surface of an object, the monochromatic light satisfying a confocal condition can be sensed by a spectrometer through a small hole, and the acquired distance value is converted through calculating the wavelength of the sensed focal point; and thetwo spectrometers are used to receive a surface of a component to be tested and light wave information of an internal defect so as to obtain surface information of the optical component, a position ofthe internal defect, depth information and the like simultaneously.

The invention provides a light-emitting displayer with the light sensing function. The light-emitting displayer with the light sensing function comprises at least one light-emitting diode, at least one thin film transistor, at least one light sensing module and a connecting layer, wherein the light-emitting diode is formed on a first substrate, the thin film transistor and the light sensing module are electrically connected to and are formed on a second substrate, the connecting layer is connected with the first substrate and the second substrate, so that the light-emitting diode is electrically connected with the thin film transistor, light is emitted by the light-emitting diode, the light sensing module is located on the light-emitting path of the light-emitting diode, and the thin film transistor and the light-emitting diode are relatively staggered in position. According to the light-emitting displayer with the light sensing function, by means of the use characteristics of the light-emitting diode, the light intensity of the light-emitting diode is detected and controlled, and the problems of short service life of an organic light-emitting diode and color cast of a displayed image can be effectively solved.

The invention relates to a seismic sensor array device and a data collecting method. The device comprises seismic sensors, a collecting card and a computer; by rolling and advancing of a pedrail, the seismic sensors are arranged on the pedrail, thus forming a seismic sensor array; the corresponding seismic sensor array on contact part of the pedrail and a probing surface receives the contact surface seismic wave signal, converts the vibration signal into an electric signal, and subsequently transmits the signal to the computer or a seismic recorder for recording in a cabled way by the collecting card and a sliding connector, or wirelessly transmits the signal to the computer or the seismic recorder for recording by a wireless communication device; the seismic sensor array advances by rolling, alternately contacts the probing surface and realizes quick measurement. By the arrangement of sensor touchdown shoes, the sensor and the probing surface are more closely coupled. The device can adapt to the detection on complex ground surfaces and severe condition area and can be also applicable to the detection on moon surface, building foundation surface or other solids.

A workpiece measuring apparatus has an external module provided outside an NC device to acquire position data of one or more movable axes of a movable unit having a measuring head attached thereto. The position data of the measuring head is acquired at the same time interval as that for the distance measurement by the measuring head. The position of the workpiece is acquired by calculation from the acquired distance measurement data and the position data of the measuring head. The continuous shape of the workpiece can be measured by performing continuous measurement while moving the measuring head. Therefore, no modification or change is required such as adding a new function to the NC device. In addition, the present invention is applicable to any machine tool equipped with an NC device of any configuration, without being restricted by constraints of the NC device.

The invention relates to a confocal optical scanner, in particular to a multiple-pinhole confocal optical scanner. The confocal optical scanner is mainly characterized in that an opaque illuminating sliding block and an opaque imaging sliding block, on which a plurality of nonopaque pinholes are arrayed, are driven to slide in a reciprocating way at set constant speed so as to scan a sample, the pinholes on the illuminating sliding block coincide with the pinholes on the illuminating sliding block on by one in the projective center formed on the sample through a pinhole lens group and an objective lens of a microscope, the pinholes are regularly arrayed on the illuminating sliding block and the opaque imaging sliding block, any two adjacent rows of pinholes keep the equal row distance, and any two columns of pinholes keep the equal column distance. Because the illuminating sliding block and the opaque imaging sliding block, on which a plurality of nonopaque pinholes are arrayed, are driven to slide in a reciprocating way at set constant speed so as to scan the sample, the confocal optical scanner has high speed, zero stray light background noise and uniform illumination intensity and can be easily synchronized with the camera exposure control.

A master device and a slave device are each constituted of a transmitting section; a receiving section; and a control section including a three-dimensional position calculation section for calculating a three-dimensional position of the transmitting section of the counterpart master device or that of the counterpart slave device and an element drive section for driving an MEMS element. First, the master device outputs transmission light having comparatively narrow directivity, and the transmission light is two-dimensionally scanned. Next, the receiving section of the slave device receives that transmission light, calculates the transmission direction of the master device from the position of a spot of transmitted light on a light-detecting element array, and transmits the transmission light in that direction. At this point in time, scanning of the transmission light from the master device is stopped, and subsequently communication is initiated.

The invention discloses an automatic vulnerability detection system based on port identification, includes a port quick scan module, a port protocol identification module, an asset classification storage module, a vulnerability verification module, an asset visualization display module, fast-scans that asset IP segment through the port fast-scan module, and outputs the result to the port protocolidentification module for fine service version fingerprint identification, classifies and stories the result after identification according to IP, port, service version in an asset classification storage module, and adds the filtered specific digital assets to the vulnerability validation module to begin vulnerability validation, at last, the t results are output and deliver to the operation and maintenance personnel for repair. The automatic vulnerability detection system and the automatic vulnerability detection method based on the port identification of the invention can complete the safetydetection of the enterprise assets within one hour of the vulnerability outbreak, greatly reduce the emergency response time and the human cost, and ensure that the enterprise completes the vulnerability discovery and repair before being attacked to the maximum extent.

A system and method for removing photoresist or other organic compounds from semiconductor wafers is provided. Non-fluorinated reactant gases (O2, H2, H2O, N2 etc.) are activated in a quartz tube by a medium pressure surface wave discharge. As the plasma jet impinges on a substrate, volatile reaction products (H2O, CO2, or low molecular weight hydrocarbons) selectively remove the photoresist from the surface. The medium pressure also enables high gas temperatures that provide an effective source of heat in the reactive zone on the wafer that enhances etch rates and provides a practical means of removing ion implanted photoresist.

The invention relates to a micro LED light-emitting display array pixel unit structure and a fabrication method thereof. The micro LED light-emitting display array pixel unit structure comprises a display pixel unit body, wherein the display pixel unit body comprises a light-emitting diode, a light-emitting diode driving circuit and a lead, wherein the light-emitting diode is manufactured by integration of an epitaxial wafer grown on a substrate, and the lead is used for connecting the outside. Three parts required by manufacturing of the display pixel unit are integrated with the epitaxial wafer by a semiconductor processing technology, the pixel light-emitting unit and the control circuit are integrated, so that the welding process with complicated process and low reliability is omitted,the fabrication process is simple, and active driving of a micro LED display array can be achieved without independently fabricating a pixel driving circuit; and moreover, the integration density andthe reliability of the micro LED display array are effectively improved, the display effect with high-speed scanning, high definition and high quality can be achieved, the demand of next-generation display application is satisfied, and industrialization is promoted.

The invention discloses an electro-optical phased array laser radar based on a lithium niobate film. The input end of a 1*N optical beam splitter is connected with an external light source. The outputend is connected with a light emitter array through an optical waveguide array and then outputs. An integrated electronic control system is arranged on the optical waveguide array. The 1*N optical beam splitter receives input laser, and the input laser is divided into multiple paths to enter the optical waveguide array. The integrated electronic control system acts on the optical waveguide arrayto perform phase modulation on multiple optical waveguides therein. The optical waveguide array completes light beam transmission and transmits and outputs multiple light beams from the light emitterarray. According to the invention, the electro-optical effect of a lithium niobate material is combined; the phase difference between waveguide modes is changed to regulate the exiting light angle; the high-speed response characteristic of electro-optical modulation is used to realize high-speed scanning of outgoing light beams; and the laser radar has the advantages of convenient design, convenient extension, compact structure and the like.

The invention provides an optical stimulation apparatus including a light source; a scanning unit that scans light from the light source; and an objective optical system that images the light scanned by the scanning unit onto a specimen. The scanning unit includes an acousto-optic device that varies the diffraction angle in response to a vibration frequency input thereto.