46 results about "Oblique illumination" patented technology

The invention relates to the technical field of seed crystal detection, in particular to a seed crystal detection method and system based on image recognition. The invention discloses a seed crystal detection system based on image recognition. The system comprises a seed crystal image sequence acquisition module, a defect distribution extraction module, a feature enhancement module, a shadow processing module and a seed crystal defect recognition module. According to the invention, a multi-angle image sequence is obtained by fixing the seed crystal on the rotary carrying table and combining multiple illumination modes such as radial, tangential and oblique illumination modes, so that the outer contour of the seed crystal and different types of defect characteristics can be comprehensively represented, and multiple defect forms such as cracks, edge breakage and recesses can be detected and covered; high-gradient areas are extracted based on image edge features and uniformly projected to an edge defect distribution diagram, focusing detection of defect concentration areas is achieved, and the accuracy and efficiency of defect positioning are improved.

The invention is suitable for the technical field of wafer detection, and provides a wafer detection system and a detection method thereof.The wafer detection system comprises a multi-axis motion platform, an optical imaging system and a control and processing unit, and the multi-axis motion platform is used for bearing a wafer and driving the wafer to rotate, translate and move in the focusing direction; the optical imaging system is used for imaging the surface of a wafer and supports switching of multiple illumination modes, the illumination modes comprise bright field illumination, dark field illumination and oblique illumination, and the control and processing unit is electrically connected with the multi-axis motion platform and the optical imaging system. According to the system, multi-angle and multi-dimensional image data of the same suspected defect point can be obtained through wafer attitude regulation and control of the multi-axis motion platform and cooperative switching of multiple illumination modes of the optical imaging system; and on the basis, four types of quantitative characteristics of motion adhesiveness, three-dimensional contour, multi-modal optical response and multi-view morphological stability for representing the physical essence of the defect are extracted, so that the real defect and the false defect are distinguished.

The invention discloses a laminated scanning imaging system and an imaging algorithm based on inclined illumination multi-angle rotation fusion, and relates to the technical field of computational optical imaging. A sample is obliquely illuminated and scanned through a coherent light source, and a series of diffraction information of the sample to be detected in the illumination direction is obtained; and then rotating the angle of the sample to change the illumination direction, repeating the steps to obtain a series of diffraction information at multiple angles, and based on the diffraction information at multiple angles, performing reconstruction through an iterative algorithm to obtain a complex amplitude image of the to-be-detected sample. According to the invention, by means of inclined illumination and sample rotation, multi-angle diffraction information of the sample to be measured is fused in an algorithm, and a high-resolution reconstruction result is obtained. Meanwhile, the technology does not require height superposition of scanning positions at different angles, and has very strong experimental feasibility.

An illumination system for dark-field imaging may include one or more illumination sources providing temporally incoherent light with a first spatial profile, and two or more lens assemblies configured to direct the light from the one or more illumination sources as two or more illumination beams to a buried target along optical paths outside an objective lens of an imaging sub-system. The two or more illumination beams may fully overlap at the buried target to provide a common illumination field. The lens assemblies limit numerical apertures of the illumination beams to prevent specular reflection of the illumination beams from entering the objective lens. A respective one of the two or more lens assemblies includes a homogenizer to provide that a respective one of the two or more illumination beams has a second spatial profile with higher spatial uniformity than the first spatial profile according to a selected metric.

The invention discloses an illumination light spot coincidence adjusting system and method, and belongs to the technical field of defect detection, and the method comprises the following steps: adjusting a first focusing lens, a second focusing lens and a collecting lens to make the distances between the primary optical axes of the three lenses and a mounting surface equal; the focus offset of O3 and O1 is calculated, and the multi-degree-of-freedom quantitative adjustment displacement is determined based on the included angle between the oblique illumination light beam and the vertical illumination light beam. According to the illumination light spot coincidence adjustment method, reference calibration is carried out by taking focal plane coincidence as a core, and multi-degree-of-freedom quantitative adjustment displacement is derived based on a geometrical relationship, so that quantitative adjustment of a first focusing lens, a second focusing lens and a collection lens is realized, and light spot coincidence of an inclined illumination light path and a vertical illumination light path is realized; compared with an existing method, the method has the advantages that the defects that traditional adjustment depends on artificial experience, the adjustment process has no definite quantitative basis, the light spot coincidence precision is low and the stability is poor are overcome, and the coincidence precision and the adjustment efficiency of the light spots of the double illumination light paths in bright and dark field fusion imaging are improved.

The utility model relates to the technical field of optical systems, in particular to an oblique illumination embossment microscopic imaging system based on a phase difference light path, which comprises a light source, an adjustable oblique illumination phase difference baffle plate, a collecting lens, a sample platform, a phase difference objective lens and an imaging device, the sample platform is located at the position of a rear focal plane of the collecting lens, the phase difference objective lens is located below the sample platform, the center line of the phase difference objective lens coincides with the center line of the collecting lens, the imaging device is located below the phase difference objective lens, and the adjustable inclined illumination phase difference shielding plate comprises a phase difference ring plate, a phase difference ring and a light shielding plate. Parameters of the phase difference ring are matched with multiples of the phase difference objective lens, and the shading plate is installed on the phase difference ring plate in a sliding mode. The system provided by the utility model can realize continuous adjustment, and is good in relief observation effect, high in universality, simple in structure and low in cost.

The application discloses a multispectral imaging system with deep ultraviolet oblique optical slicing capability, comprising a core lens assembly, a coaxial reflector and a guide ring-shaped illumination system; the core lens assembly comprises one or more lens elements; the coaxial reflector is located at the top of the core lens assembly and is arranged around the core lens assembly; the implementation scheme of the guide ring-shaped illumination system comprises a light source and a hollow reflecting surface, a ring-shaped light source and a ring-shaped light guide, the position of the light guide is adapted to the position of the core lens assembly, the position between the light source and the light guide is adapted, oblique illumination of the illumination light including deep ultraviolet is realized by adding the coaxial reflecting surface around the core lens for close-range focusing, and thus oblique illumination is realized, and the coaxial oblique illumination design overcomes the physical limitation of external off-axis light sources and is compatible with high-NA lenses.

The invention discloses a device and a method for simultaneously measuring abrasion of a tool nose and a rear tool face of a turning tool in place, and relates to the technical field of tool state monitoring. The device comprises a backlight source, a sidelight source, a precision displacement table and a microscope; the backlight source is arranged on the back surface of the detected cutter and is used for providing projection illumination; the side light source is arranged on one side of the rear tool face of the detected tool and irradiates the rear tool face obliquely and downwards so as to provide oblique illumination; the microscope is arranged on the precise displacement table in a sliding mode and can move at a constant speed in the direction of the optical axis of the microscope. According to the invention, simultaneous and accurate detection of the wear states of the tool nose cutting edge and the rear tool face can be realized.

A lighting system and a bioanalytical instrument comprising the same are disclosed. The lighting system comprises two or more interleaved mirrors configured to split an incoming light beam into at least two sub-beams, and a guiding module configured to guide the sub-beams to provide oblique illumination to an area. Compared to conventional lighting systems for bioanalytical instruments, the lighting system is capable of improving illumination efficiency, reducing background signal and improving image uniformity.

The invention discloses a large numerical aperture quantitative phase microscopy system and method based on a KK relation. The system comprises an illumination module, a microscope objective, a lens cone lens, a visual field limiting module, a first thin lens, a linear polarizer, a second thin lens, a first phase type spatial light modulator, a third thin lens, a second phase type spatial light modulator, a fourth thin lens and a polarization camera which are arranged in sequence, and the illumination module performs transmission type oblique illumination on a sample; the visual field limiting module is used for carrying out space limitation on an illumination field and a scattering field; the linear polarizer is used for decomposing a light field into an X polarization component and a Y polarization component; the first phase-type spatial light modulator is used for modulating the Y polarization illumination field and the Y polarization scattering field; the second phase-type spatial light modulator is used for performing phase modulation on the Y polarization scattered field; the polarization camera is used for obtaining intensity distribution and hologram distribution of the illumination field. According to the invention, the sample can be subjected to label-free, high-resolution and high-stability in-situ quantitative detection.

An illumination system for dark-field imaging may include one or more illumination sources providing temporally incoherent light with a first spatial profile, and two or more lens assemblies configured to direct the light from the one or more illumination sources as two or more illumination beams to a buried target along optical paths outside an objective lens of an imaging sub-system. The two or more illumination beams may fully overlap at the buried target to provide a common illumination field. The lens assemblies limit numerical apertures of the illumination beams to prevent specular reflection of the illumination beams from entering the objective lens. A respective one of the two or more lens assemblies includes a homogenizer to provide that a respective one of the two or more illumination beams has a second spatial profile with higher spatial uniformity than the first spatial profile according to a selected metric.

The invention provides an intelligent positioning method and device for a cross brace of a cable-stayed bridge driven by construction state data. The method comprises the steps that phase-locked collection of camera exposure and double-angle oblique illumination is achieved based on a linear speed encoder and a cutterhead phase; executing speed compensation and geometric shearing on the continuous frames to obtain a space-time registration sequence; extracting a sub-pixel edge curve and generating a narrow-band region of interest along a normal direction; calculating a flicker ratio and a relative phase difference between alternating illumination frames, and generating a burr saliency map by combining a normal gradient and fine tooth period energy along the edge direction; inputting the saliency map and the normal brightness profile into a convolutional neural network, and outputting a pixel-level burr probability, an amplitude proxy amount and a period score; and self-adaptive threshold judgment is carried out by combining the linear speed, the tension and the foil thickness, and an alarm is given by associating with a cutter phase. The detection method and system provided by the invention realize high detection rate, low false alarm and millisecond-level delay under the conditions of high light reflection and linear speed greater than or equal to 200m / min, and are suitable for multi-tool-path online quality control and process linkage.

A synthetic aperture quantitative phase imaging method based on a hybrid of digital holography and Fourier ptychography. A programmable LED array which is annularly arranged is mounted on an off-axis digital holographic system for providing oblique illumination at varying angles; accurate noise-containing low-frequency information of an object is obtained by means of digital holography and is used as initial estimation; and then, high-frequency information of the object is reconstructed by means of a Fourier ptychographic algorithm based on intensity measurement, so as to realize synthetic aperture quantitative phase imaging. Using the accurate low frequency provided by holography as initial estimation ensures the accuracy of phase retrieval and wavefront aberration reconstruction, without strictly meeting matching illumination conditions, and reduces the number of intensity graphs required by Fourier ptychography; and a non-interferometric phase retrieval method based on Fourier ptychography improves the imaging resolution to an incoherent diffraction limit, and also effectively solves the problem of inherent speckle noise in digital holography.

This invention discloses an illumination device for solving the concave liquid surface effect in well plate imaging, belonging to the field of microscope light source technology. The device includes an inverted microscope illumination source and several annular light sources distributed in a dome-like pattern around it. The inverted microscope illumination source is composed of a central light source, a collimating lens, and a condenser lens in sequence. The annular light sources contain multiple LED beads, and the size of the rings matches the diameter of the microwells in a common cell culture plate, with adjustable angles. Through the synergistic effect of traditional vertical illumination and dome-shaped oblique illumination, this invention effectively improves the imaging quality of well plates, adapts to microwell plates of different diameters, is easy to operate, and highly practical, providing strong support for cell observation and other related work.

An example microscope includes a pump laser for providing a first illumination to a sample. A laser array provides a second illumination to the sample. The laser array may include a plurality of laser elements, each providing oblique illuminations to the sample. An illumination collecting source collects the first illumination and the second illumination from the sample. The illumination collecting source may capture transient 3D refractive index (RI) variations in the sample due to the first illumination and second illumination.

An overlay metrology system may receive an image of an overlay target on a sample in accordance with a metrology recipe, wherein the image is generated by illuminating via oblique illumination an overlay target comprising a plurality of Moire structures with one or more pairs of illumination beams, wherein portions of the image associated with one or more Moire structures of the plurality of Moire structures having periodicity along a measurement direction are formed via Moire diffraction orders from one of the one or more pairs of the illumination beams having a dipole separation axis orthogonal to the measurement direction, wherein the plurality of Moire structures include Moire structures comprising two or more gratings with overlapping regions. The overlay metrology system may determine overlay measurements associated with relative positions of sample layers based on the image of the overlay target.

The invention provides a technology capable of improving detection sensitivity of defects. The semiconductor manufacturing apparatus includes: (a) an image capturing device that captures an image of a bare chip; (b) an illumination device for oblique light illumination having a rectangular light-emitting surface, the illumination device being provided such that the long side of the light-emitting surface faces one side of the bare chip, and being provided so as to irradiate illumination light obliquely at a first predetermined angle with respect to the optical axis of the imaging device; and (c) a control unit configured so as to be able to adjust a direction in which the illumination light is irradiated with respect to the one side of the bare chip in a plan view.

The application discloses a passenger flow statistical method and device based on oblique illumination detection, equipment and a storage medium, and relates to the technical field of image processing, which comprises the following steps: obtaining a video stream based on an oblique illumination mode; performing frame-by-frame analysis on the video stream by using a target detection model to obtain a plurality of boundary box coordinates; assigning a unique ID to the boundary box coordinates, performing trajectory tracking processing based on the ID, and obtaining continuous motion trajectory data corresponding to the ID; and analyzing the continuous motion trajectory data by using a passenger flow statistical strategy to obtain passenger flow statistical data of a target region. The video stream is obtained by using the oblique illumination mode, and the target detection, trajectory tracking and passenger flow statistical strategy are combined, so that accurate, real-time and dynamic passenger flow statistics and behavior analysis are realized.

The present application relates to the field of machine vision detection, and discloses a stress mark detection method and a stress mark detection device, which comprises: forming a detection light spot on a detected surface, wherein the detection light spot is formed by oblique illumination of illumination light on the detected surface; collecting reflected light from the detected surface to form a 2D detection image, and the angle between the reflected light and the detected surface is not greater than 10 degrees; processing the 2D detection image to obtain a gray scale image, and judging whether the illuminated area has a stress mark based on the gray scale image. The stress mark detection method and the stress mark detection device can effectively detect smaller stress marks and improve detection accuracy.

The invention discloses a large-size uniform rectangular oblique irradiation lane light supplementing system which comprises a light supplementing module, an optical sensing module and a lane. The optical sensing module and the light supplementing module are installed on a road signal rod side by side, and the distance between the optical sensing module and the ground is the irradiation height. The light supplementing module comprises a light source and a free-form surface lens, the incident surface of the free-form surface lens is a hemispherical surface, and the emergent surface of the free-form surface lens is a free-form surface; the optical sensing module comprises an imaging unit, a control unit and a communication unit, the field angle of the optical sensing module covers a target area of a lane, and the optical sensing module is used for collecting information of the target area; the lane receives the high-uniformity rectangular light spots after light distribution of the free-form surface lens; according to the free-form surface lens design of the light supplement lamp, the preferable free area surface is smooth in surface type and easy to machine, and rectangular light spots are high in shape conformity, high in lighting effect and good in uniformity.

The invention discloses an iterative non-interference quantitative phase imaging method based on a Cramo-Clike relationship, and the method comprises the steps: enabling a programmable LED array which is annularly arranged to be installed on an inverted bright-field microscope, providing inclined illumination for angle transformation, collecting a series of intensity images under a matched illumination condition, and carrying out the detection of the intensity images through a Cramo-Clike relationship. And the complex amplitude of the object is reconstructed as an initial value by using the Cramo-Clike relationship. And updating the real part of the complex amplitude in a logarithm domain through iteration, thereby recovering the complex amplitude distribution of the large-phase sample. According to the method, any object approximation process is not involved, the convergence speed can be greatly increased by using the object complex amplitude reconstructed by the Cramo-Cif relation as initial estimation, the reconstruction of a large-phase object can be realized only by a small amount of iteration, and the method exceeds the limitation of first-order Born and Ritov approximation in a non-interference quantitative imaging technology.

The invention discloses an illumination device and method for solving the concave liquid surface effect of pore plate imaging, and belongs to the technical field of microscope light sources, the device comprises an inverted microscopic illumination light source and a plurality of annular light sources which are distributed in a dome mode with the inverted microscopic illumination light source as the center, and the inverted microscopic illumination light source is composed of a middle light source, a collimating lens and a collecting lens in sequence; the annular light source comprises a plurality of LED lamp beads, the size of a ring is matched with the diameter of a micropore of the general cell culture plate, and the angle is adjustable. Through the synergistic effect of traditional vertical illumination and dome oblique illumination, the device can effectively improve the imaging quality of the pore plate, is suitable for microporous plates with different diameters, is simple and convenient to operate and high in practicability, and can provide powerful support for cell observation and other work.

An illumination system (1), especially for medical applications, is provided which, using a light source (20) as a starting point and a beam splitter (11) in a free-beam optical unit, forms two illumination light arms (5a, 5b), by which a respective oblique illumination (25a, 25b), preferably an adaptive respective oblique illumination, can be realized. In the process, the arising illumination field (2) can be adapted to a current field of view of an associated imaging system (3) by an adjustable beam shaping optical unit (6) in the respective illumination light arm (5a, 5b).

An overlay metrology system may include an overlay metrology tool suitable for measurement of an overlay target on a sample, the overlay target including one or more grating structures with patterned features distributed along one or more measurement directions. The overlay metrology tool may include an objective lens and an illumination pathway to illuminate the overlay target with two or more oblique illumination lobes distributed among one or more illumination distributions such that, for each of the measurement directions, diffraction orders of the one or more illumination distributions by the overlay target that are collected by the objective lens exclusively include a 0-order diffraction lobe and a single first-order diffraction lobe from at least one of the two or more illumination lobes. The overlay metrology tool may further include at least one detector to image the sample and a controller to generate overlay measurements based on the images.

An exemplary embodiment of the present disclosure provides a quantitative phase imaging method, comprising: imaging a sample to obtain one or more raw captures; inputting the one or more raw captures into a deep learning neural network (DLNN); generating, using the DLNN, a quantitative phase image of the sample based on the one or more raw captures; and outputting the quantitative phase image.

A method and system for operating an optical arrangement includes a light source, an objective lens proximate to a sample, an ocular lens proximate to an image capture device, a first optical subassembly including a first optical subassembly configured to transmit a first light source signal from the light source to the sample through the objective lens, the first optical subassembly further configured to transmit a first fluorescent signal from the sample to the image capture device, a second optical subassembly including a fixed portion and a movable portion, and configured to transmit a second light source signal from the light source to the sample in an oblique illumination through an off-center portion of the objective lens, the movable portion movable relative to an optical axis of the ocular lens and configured to transmit a second fluorescent signal from the sample to the image capture device at an oblique angle to the objective lens.

The invention discloses a passenger flow statistical method, device and equipment based on oblique illumination detection and a storage medium, and relates to the technical field of image processing, and the method comprises the steps: obtaining a video stream based on an oblique illumination mode; analyzing the video stream frame by frame through the target detection model to obtain a plurality of bounding box coordinates; a unique ID is distributed to the bounding box coordinates, trajectory tracking processing is carried out based on the ID, and continuous motion trajectory data corresponding to the ID is obtained; the continuous movement track data is analyzed through the passenger flow statistical strategy to obtain the passenger flow statistical data of the target area, the video stream is obtained through the oblique illumination mode, and accurate, real-time and dynamic passenger flow statistics and behavior analysis are achieved in combination with target detection, track tracking and the passenger flow statistical strategy.

Disclosed herein are a surgical microscope system and a surgical microscope. The surgical microscope system includes a microscope imaging module (01) and a lighting module (02), wherein: the microscope imaging module (01) includes an objective lens (11), a dichroic beam splitting lens (12), a zoom unit (13), a beam splitter (14), a lens tube (15) and an eyepiece set (16) disposed along a main optical axis (L1); the lighting module (02) includes a coaxial lighting unit (21) and an angled lighting unit (22), the coaxial lighting unit (21) includes a first light source (211) and a first field stop (212), the first field stop (212) is disposed between a first light source (211) and a dichroic beam splitting lens (12), and coaxial lighting beams emitted from the first light source (211) pass through the first field stop (212), are reflected by the dichroic beam splitting lens (12), then pass through the objective lens (11), and reach an observed object surface (M) along a direction of a main optical axis (L1) and form a first optical spot; angled lighting beams emitted from the angled lighting unit (22) are reflected by the dichroic beam splitting lens (12), then pass through the objective lens (11), and reach the observed object surface (M) along a direction including a preset angle with respect to the main optical axis (L1) and form a second optical spot; the first optical spot is adjustable in size.

An illumination system for dark-field imaging may include one or more illumination sources providing temporally incoherent light with a first spatial profile, and two or more lens assemblies configured to direct the light from the one or more illumination sources as two or more illumination beams to a buried target along optical paths outside an objective lens of an imaging sub-system. The two or more illumination beams may fully overlap at the buried target to provide a common illumination field. The lens assemblies limit numerical apertures of the illumination beams to prevent specular reflection of the illumination beams from entering the objective lens. A respective one of the two or more lens assemblies includes a homogenizer to provide that a respective one of the two or more illumination beams has a second spatial profile with higher spatial uniformity than the first spatial profile according to a selected metric.

The invention relates to the technical field of optical systems, in particular to an oblique illumination embossment microscopic imaging system based on a phase difference light path, which comprises a light source, an adjustable oblique illumination phase difference baffle plate, a collecting lens, a sample platform, a phase difference objective lens and an imaging device, the sample platform is located at the position of a rear focal plane of the collecting lens, the phase difference objective lens is located below the sample platform, the center line of the phase difference objective lens coincides with the center line of the collecting lens, the imaging device is located below the phase difference objective lens, and the adjustable inclined illumination phase difference shielding plate comprises a phase difference ring plate, a phase difference ring and a light shielding plate. Parameters of the phase difference ring are matched with multiples of the phase difference objective lens, and the shading plate is installed on the phase difference ring plate in a sliding mode. The system provided by the invention can realize continuous adjustment, and is good in relief observation effect, high in universality, simple in structure and low in cost.