320 results about "Waveguide array" patented technology

The invention discloses a calibration system in an active channel of a waveguide array phased-array antenna, and relates to the technical field of calibration in the active channel. Comprising a calibration judgment module, a waveguide directional coupling module, an amplitude-phase detection module and a digital domain optimization module, the calibration judgment module realizes intelligent triggering calibration through real-time monitoring of a multi-dimensional environment and performance parameters, and ensures that a calibration process is started only when the system state is deteriorated; the waveguide directional coupling module ensures that the calibration signal is accurately injected into each channel, and realizes cross polarization suppression through a polarization grid filter; the amplitude-phase detection module realizes high-precision measurement of amplitude, phase, group delay and polarization parameters of feedback signals of each channel by using superheterodyne and IQ demodulation technologies; and the digital domain optimization module calculates and updates the complex compensation weight of each channel through real-time digital signal processing and a self-adaptive algorithm, and realizes comprehensive and accurate calibration in combination with temperature-frequency interpolation and nonlinear pre-distortion compensation.

The invention discloses a waveguide array gas sensing system for high-sensitivity multi-gas detection. The waveguide array gas sensing system comprises a waveguide substrate, and a waveguide Bragg grating, a phase shift Bragg grating, a micro-ring resonator, a Mach-Zehnder interferometer, a waveguide array, an electric field regulation and control module and a signal processing unit which are arranged on the waveguide substrate. Through the waveguide array structure, topological optical protection adsorption and other technologies, the sensitivity and selectivity of methane, carbon dioxide and other gases are effectively improved, and accurate detection can be achieved in a complex environment; according to the invention, a topological optical principle is adopted, signal loss caused by environmental noise or surface defects is reduced, and the stability of the sensor is improved; according to the invention, automatic calibration and temperature and humidity compensation of the system are realized, and autonomy and operation convenience of the system are enhanced; the system has high environment adaptability and can stably work under different temperature and humidity conditions.

The invention discloses an optical chip-optical fiber coupler based on a collimating grating penetrating through a substrate, which belongs to the technical field of photoelectric chips and comprises a substrate, an inverted optical chip is arranged on the substrate, and the optical chip comprises at least one optical device, an optical waveguide array for realizing input and output and a collimating grating array. The collimating grating array is provided with a gradually changing period and duty ratio, so that light output from the optical waveguide array is diffracted to the substrate through the collimating grating array and is propagated to the back surface of the optical chip as basically collimated light; an optical coupling element array is arranged at the position, corresponding to emergent light of the collimating grating array, of the back face of the optical chip to couple light to an optical fiber array. By the adoption of the structure, high-efficiency coupling of the optical chip and the optical fiber array is achieved, and compared with a common grating coupler and an edge coupler, the coupler has higher coupling efficiency and alignment tolerance, is easier to manufacture and can be widely applied to the fields of optical IO, photoelectric sealing (CPO) and the like of large-scale photoelectric integrated chips.

The invention discloses a visual point array laser hair growth treatment hand tool, which comprises a hand tool main body, an optical waveguide array treatment head, an illumination module, an image capture module and an image processing module, and is characterized in that the hand tool main body is internally provided with an image identification module, the image processing module, an image display module, an early warning module and a main control board; the image processing module identifies scalp surface features under the treatment head position; the image processing module performs single-point segmentation on the scalp feature picture under the treatment position of the treatment head; the segmented single picture is compared with the feature image in the storage module, image feature information is recognized, features are judged according to target information, and whether treatment is needed or not is marked in the treatment selection display module. According to the treatment hand tool, the specific condition of a treatment area is monitored in real time in the use process; equipment operators are reminded to avoid inapplicable treatment working points; and for the working point which is misjudged by the operator, the equipment gives an early warning to remind the operator to re-assess the treatment area.

The invention discloses a medium metasurface reverse optimization method based on a space coupling mode theory, and relates to the field of optics, and the method comprises the following steps: building a cut-off waveguide array based on a metasurface, calculating a guided mode and a propagation constant of each waveguide according to the cut-off waveguide array, and coupling adjacent waveguides through a coupling matrix, a waveguide array is obtained; an input light field is coupled into a waveguide array, propagation of light in waveguides is simulated based on a spatial coupling mode theory model, and near-field intensity distribution is converted into far-field intensity distribution by using a Rayleigh-Sommerfeld diffraction theory; and calculating the difference between the target intensity and the far-field intensity through a loss function, evaluating the effect of the current metasurface design, and gradually adjusting the geometric parameters of the waveguide unit through an optimization algorithm. According to the method, the problems of efficient modeling and optimization in metasurface design are solved through the space coupling mode theoretical model.

The invention relates to an ultra-low side lobe row feed array. The main types of current engineering include a traveling wave waveguide array and passive row feed with unequal power division feed. Due to the existence of an azimuth frequency scanning angle, zenith scanning blind spots exist, the larger the frequency deflection angle is, the larger the scanning dome blind area is, and azimuth beams are fixed, so that multiple beams cannot be formed; although the beam points to the normal direction, the defect of large loss exists. Aiming at the defects in the prior art, the invention provides the ultra-low side lobe dual-polarization active row feed array with variable unit number and unequal power division, a form based on an unequal unit active subarray is adopted, dual-polarization active row feed is realized, and the ultra-low side lobe dual-polarization active row feed array has the characteristics of ultra-low side lobe, low cost and low loss.

The present application discloses a light beam scanning system. The system comprises a beam splitting apparatus, an optical waveguide array, a light beam combining member, a light beam adjusting apparatus and a phase adjusting apparatus. The beam splitting apparatus receives a laser light beam, and divides the laser light beam into a plurality of sub-beams and then emits the sub-beams; the optical waveguide array is used to receive the plurality of sub-beams and transmit the plurality of sub-beams to a predetermined waveguide emergent end; the light beam combining member is connected to the optical waveguide array; the light beam adjusting apparatus is used to expand and collimate the light beam emitted from the light beam emergent surface to form a scanning light beam; the phase adjusting apparatus is used to adjust the relative phase distribution of the sub-waveguides.

A method for implementing multiple logical phi-bit large scale unitary operations in an acoustic waveguide array analogous to quantum circuits includes: inducing a π phase jump rotation operation by changing driving conditions, and interpreting detected signals in terms of a multiple phi-bit representation which maps the state of multiple phi-bits in their supporting nonlinear acoustic metastructure and their representations as complex state vectors in exponentially scaling Hilbert spaces. This allows evaluation of a target operation (such as a Fourier Transform) by exploiting how the array simultaneously rotates phases of detected signals in response to changes in driving conditions, and by enforcing an equivalence between a result of a transformation from the target operation and a result of the transformation from the π phase jump rotation operation.

The invention provides a quantum storage device and a quantum storage method based on an optical resonant cavity. The quantum storage device comprises a light generation module which emits pump light and a light signal; the electric pulse generation module generates an electric pulse signal corresponding to the optical signal according to a preset storage mode; the storage module comprises a rare earth doped crystal, a first reflecting film on a first surface of the storage module and a second reflecting film on a second surface of the rare earth doped crystal form an optical resonant cavity, and a preset included angle is formed between the first surface and the second surface so as to change the resonant frequency of the optical resonant cavity; the optical waveguide array is arranged in the third surface of the rare earth doped crystal; the electrical waveguide array is arranged on the third surface and is electrically connected with the electrical pulse generation module, and the absorption band structure of the rare earth ions is changed through electrical pulse signals; an optical signal is coupled into the optical resonant cavity through the optical waveguide array and interacts with the rare earth ions in the optical resonant cavity, so that the population of the rare earth ions is excited to an optical upper energy level, and the optical signal is stored.

The invention relates to the technical field of integrated optical waveguide preparation, in particular to a manufacturing method of a three-dimensional optical waveguide glass chip, which comprises the following steps: forming a two-dimensional structure of an optical waveguide on the surface of a glass chip wafer through an ion exchange process; and performing depth-controllable waveguide burying on the optical waveguide on the surface of the processed glass chip wafer by using the matrix electrode chip wafer to finally obtain the three-dimensional optical waveguide glass chip. Wherein the electrodes in the matrix electrode chip can be one-dimensional matrix electrodes and / or two-dimensional matrix electrodes, and specifically, a proper matrix electrode chip structure can be designed according to whether the depth distribution of the optical waveguide array needing to be buried is consistent or not. According to the invention, an electric field is regulated and controlled by adopting a matrix electrode method, and the optical waveguide in the two-dimensional optical waveguide glass chip wafer is buried in a depth difference controllable manner, so that the manufacturing of the three-dimensional optical waveguide glass chip is realized. The manufacturing method has the advantages of being wide in application range, low in production cost, high in manufacturing precision and the like.

The invention relates to the technical field of semiconductor devices, in particular to a semiconductor laser device, which comprises a substrate; the ridge waveguide array comprises a fundamental mode waveguide array and a coupling waveguide array, the fundamental mode waveguide array comprises N fundamental mode waveguides, the coupling waveguide array comprises a plurality of coupling waveguides, and at least one coupling waveguide is provided with an optical loss structure; an electrical isolation structure; the coupling waveguide array is located on one side of the fundamental mode waveguide array, and the number of the coupling waveguides is N-1; or, the two coupling waveguide arrays are located on the two opposite sides of the fundamental mode waveguide array respectively, and the number of the coupling waveguides in each coupling waveguide array is N-1; or, the two coupling waveguide arrays are located on the two opposite sides of the fundamental mode waveguide array respectively, and the total number of the coupling waveguides of the two coupling waveguide arrays is N-1. The semiconductor laser device is at least beneficial to realizing high-power output of the fundamental mode of the semiconductor laser device.

The invention relates to the technical field of semiconductor lasers, in particular to a multi-wavelength semiconductor laser. Comprising a semiconductor PN junction, and an inclined array waveguide region, a beam splitting MMI structure, a gain array waveguide, a beam combining MMI structure and a super-symmetric waveguide array which are sequentially arranged on the surface of the semiconductor PN junction in the longitudinal mode light beam transmission direction; the inclined array waveguide region comprises Bragg reflection gratings and inclined array waveguides, the Bragg reflection gratings are arranged on ridge surfaces of inlet ends of the inclined array waveguides, cavity lengths of waveguides in the inclined array waveguides are different, and the Bragg reflection gratings are parallel; seed sources output by the inclined array waveguide region are injected into the beam splitting MMI structure, and the seed sources are uniformly distributed and coupled into each waveguide of the gain array waveguide; the gain array waveguide is a parallel waveguide; the super-symmetric waveguide array is used for providing further gain to a fundamental mode and loss to a high-order mode. The antenna has the advantages of simple preparation, high gain, high single-mode performance, small size and high integration.

The invention relates to the field of millimeter wave radars, and discloses a 45-degree polarized array waveguide antenna for a millimeter wave radar, which comprises a metal groove layer; a slot array element layer; the slot array element layer and the metal slot layer are connected in a vertical lamination mode; the metal groove layer is provided with a plurality of radiation grooves; radiation grooves with the same number are formed in the metal groove layer at the corresponding positions of the slot array elements; the radiation slot indirectly increases the effective radiation aperture area of the antenna. The invention provides a method for solving the problems of low array pattern sidelobe, low gain and wide beam width of the N-element waveguide array antenna in a miniaturized application scene.

The invention discloses a femtosecond laser processing-based silicon optical chip-optical fiber coupled spot-size conversion chip and a preparation method thereof, the femtosecond laser processing-based silicon optical chip-optical fiber coupled spot-size conversion chip comprises a silicon optical chip, a spot-size converter and an optical fiber array, one end of the spot-size converter is aligned with the optical fiber array, and the other end of the spot-size converter is aligned with the silicon optical chip; preparing a waveguide in the waveguide layer in the quartz glass by using a femtosecond laser direct writing system; grinding the end surfaces of the cladding, the waveguide layer and the optical fiber by using abrasive paper with different mesh numbers in sequence, polishing by using a polishing agent, immersing in a beaker filled with absolute ethyl alcohol for cleaning, and drying after cleaning; and placing on a platform with a 45-degree inclination angle, and controlling the three-axis displacement platform to enable the femtosecond laser focus to scan in an end face coupling area of the optical fiber and the first waveguide array according to a designed path so as to obtain the thickness and the cross section width of the waveguide. According to the invention, the silicon optical chip and the optical fiber array can realize spot-matched optical signal transmission, the performance is reliable and stable, and the industrialization development of the silicon optical technology can be realized.

The invention discloses an adjustable filter based on a phase modulator array grating structure, which is characterized in that incident light is coupled to a first polarization rotation separator through a first end face coupler, and the incident light is separated into two beams of orthogonal polarized light; two beams of orthogonal polarized light are split through a first power separator and a second power separator respectively to obtain first polarized light and second polarized light, the first polarized light and the second polarized light are transmitted forwards and backwards in a phase shifter-waveguide array respectively, and phase modulation is performed through the phase shifter-waveguide array in the transmission process; the first polarized light and the second polarized light after phase modulation are combined through a second power separator and a first power separator to obtain third polarized light and fourth polarized light, and the third polarized light and the fourth polarized light are subjected to polarization state recovery through a second polarization rotation separator to obtain emergent light. And outputting through the second end face coupler. The embodiment of the invention realizes large-range adjustable filtering of light with specific wavelength, and can be applied to the technical field of filters.

The invention relates to the technical field of microelectronic devices, and provides a flexible self-supporting vertical optical waveguide array and a preparation method and application thereof. According to the flexible self-supporting vertical optical waveguide array and the preparation method thereof, an ultraviolet-curable SU-8 polymer is used as an optical waveguide material, a vertical optical waveguide array is prepared on a substrate by using simple coating, photoetching and ICP etching processes, then a flexible supporting layer is prepared, and the substrate is removed, so that the flexible self-supporting vertical optical waveguide array is obtained. The flexible self-supporting vertical optical waveguide array provided by the invention can solve the photoelectric crosstalk problem of an image sensor, improves the detection sensitivity in a weak light environment, has excellent flexibility, and can realize conformal fitting with the surface of the image sensor; moreover, the flexible self-supporting vertical optical waveguide array does not depend on the pixel size of the image sensor, the preparation process is independent of the preparation process of the image sensor, the universality is high, and the flexibility is good.

The invention relates to the technical field of optical sensing, in particular to a metasurface waveguide array based on a silicon carbide substrate and a spectrum sensing system. The system comprises a coupling modulation module, a waveguide transmission module and a spectral analysis module, the coupling modulation module realizes multi-physical field coupling modulation through a nonlinear coupling superposition principle of a thermo-optical effect and an electro-optical effect; the waveguide transmission module selectively activates waveguide channel combination based on a neural network prediction model and dynamically optimizes transmission parameters through an online reinforcement learning algorithm; the spectral analysis module performs environment compensation correction on the spectral characteristic parameters and outputs a corrected recognition result; according to the invention, multi-physics field coupling modulation, intelligent waveguide channel selection and environment adaptive compensation technologies are innovatively combined, the problems of insufficient precision and poor adaptability of a traditional spectrum sensing system in a complex environment are solved, and high-precision and adaptive spectrum sensing is realized.

Disclosed are apparatus and methods for optical interconnections that include the integration of a photonics die (pDie) and an electronic die (eDie) with a socket layer, waveguides and fiber connectors to enable high bandwidth communications. In one embodiment, an exemplary optical interconnect device includes an electronic die coupled to a photonics die and integrated with a substrate, a socket, a board, a pair of micro-lenses and a mirror coupled to a waveguide, which can be embedded in the board. In another embodiment, the waveguide is embedded in a socket layer and coupled to a fiber connector. In these embodiments, the exemplary optical interface device can be coupled one more other optical interconnect devices via a waveguide array and / or a fiber array.

A device for improving auditory acuity of a patient includes an array of waveguides for directing light to the auditory nerve. The array of waveguides is disposed in a flexible structure. A deployment mechanism deploys the structure such that the waveguides are aligned with the auditory nerve. The flexible structure has a shape that is changeable during introduction into the cochlea so as to adapt the shape to a shape of the cochlea.

A multi-unit wavelength selective switch (WSS) is disclosed. The WSS includes a plurality of WSS units, each WSS unit comprising a waveguide array for providing a light beam for propagation in the multi-unit WSS, and for receiving, in a wavelength-selective manner, the light beam propagated in the multi-unit WSS. A polarizing collimator splits each light beam into polarized collimated first and second sub-beams propagating in the multi-unit WSS along separate optical sub-paths. The polarized sub-beams of each light beam may be redirected by separate redirector arrays, e.g. liquid crystal on silicon (LCoS) arrays of a redirector array assembly specific to each light beam launched into the multi-unit WSS. Using separate redirector arrays to handle polarization sub-beams provides for a greater flexibility of optical configuration, allowing the use of inexpensive, off-the-shelf redirector arrays.

The invention discloses a waveguide structure for generating complex coupling strength and a design method thereof, and belongs to the technical field of integrated optoelectronic devices, and the method comprises the steps: designing a waveguide structure meeting the requirement of a complex coupling coefficient according to an expression of an equivalent coupling coefficient caused by an artificial standard field of a double-waveguide coupling system transmitted along a z direction; and according to the obtained waveguide function meeting the complex coupling coefficient requirement, constructing different waveguide structures, and carrying out modeling simulation on the constructed different waveguide structures. Artificial standard field modulation is introduced into a waveguide structure, and a direct coupling coefficient between optical waveguides is expanded from a real number domain to a complex number domain; the artificial standard field is used for carrying out geometric structure modulation on the optical system so as to influence photon transmission in the optical system; a proper optical waveguide structure is designed by using an equivalent coupling coefficient calculation formula, and a complex coupling coefficient is obtained, so that complex photon state conversion and light intensity regulation and control in the optical waveguide array can be realized by using the complex coupling coefficient.

The invention provides a reconfigurable half-wavelength emission optical phased array. The reconfigurable half-wavelength emission optical phased array comprises a cascaded Mach-Zehnder interferometer optical switch, a parallel modulator array and a dense waveguide superlattice half-wavelength edge emission array combined with an artificial standard field. The dense waveguide superlattice half-wavelength edge emission array combined with the artificial standard field comprises a sine bending waveguide array with the width changing alternately. According to the invention, state switching among multiple paths of light output is realized through an electric modulation / thermal modulation optical switch based on a Mach-Zehnder interferometer structure, a germanium ion doped non-volatile modulation optical switch based on the same structure, or a phase change material non-volatile modulation optical switch based on the same structure; selection and quantity control of working light path channels are realized, and finally light field regulation and control of a far field are realized; by combining a dense waveguide superlattice half-wavelength edge emission array of an artificial standard field, far-field 180-degree aliasing-free scanning is realized, and the light spot size, the view field range and the resolution are controllable.

The invention relates to an optical signal receiving and transmitting device, in particular to an optical one-dimensional phased-array antenna based on an integrated photon technology and a signal receiving and transmitting method and a parameter calculation method thereof, and aims to solve the problem that adjacent waveguides of an existing optical one-dimensional phased-array antenna have serious signal crosstalk. The waveguide array comprises two auxiliary waveguide arrays which are respectively arranged at the upper end and the lower end of a linear waveguide array, wherein each auxiliary waveguide array comprises K auxiliary waveguides; each auxiliary waveguide comprises a second end, and the second end of each auxiliary waveguide is connected with the inner end of the corresponding optical antenna; and each auxiliary waveguide is used for receiving and transmitting the optical signal diffused into the auxiliary waveguide due to coupling in the corresponding linear waveguide to the corresponding optical antenna, or diffusing part of the optical signal received by the optical antenna into the corresponding linear waveguide through coupling. According to the invention, signal crosstalk between antennas is thoroughly eliminated, and the antenna units are identical, so that perfect interference can be achieved.

The invention relates to the related technical field of silicon photon chips, in particular to a high-speed silicon optical engine method and device for a silicon optical module, and the method comprises the steps: obtaining basic technical parameters of an optical fiber connection product with the silicon optical module; the refractive index distribution and the waveguide section size of the silicon optical waveguide are configured, and a multi-mode waveguide array is constructed; an electro-optical modulator array is integrated in a multi-mode waveguide array, and the coupling efficiency of waveguides and optical fibers is adjusted in real time through dynamic impedance matching; meanwhile, the high-speed electric drive circuit is used for driving the electro-optical modulator array and optimizing rising edge characteristics / falling edge characteristics of signals, and power consumption adjustment is carried out on the high-speed electric drive circuit. The technical problem that the optical signal quality is reduced due to the fact that the silicon optical waveguide design mostly adopts fixed parameters and mode crosstalk is prone to occurring in a high-speed transmission scene is solved, and the technical effects that the waveguide refractive index is dynamically configured, the multi-mode waveguide array is constructed, the mode crosstalk is effectively reduced, the transmission loss is reduced, and the optical signal transmission quality is improved are achieved.

The invention discloses a waveguide array antenna array surface for reducing array surface sidelobe level and an assembling method thereof. The waveguide array antenna array surface comprises a mounting bottom plate and a plurality of waveguide antenna units, the multiple waveguide antenna units are arranged on the mounting bottom plate in an array mode, the number of the waveguide antenna units in each row is equal, odd-numbered rows are aligned with odd-numbered rows, even-numbered rows are aligned with even-numbered rows, the even-numbered rows and the odd-numbered rows are arranged in a staggered mode, and a preset gap is reserved between any two adjacent waveguide antenna units. The preset gap is smaller than half of a reflecting plate of the waveguide antenna unit; a flexible conductive piece is connected between the reflecting plate of each waveguide antenna unit and the reflecting plate of the next adjacent waveguide antenna unit in the same row; and a flexible conductive piece is connected between the reflecting plate of each waveguide antenna unit and the reflecting plate of the corresponding waveguide antenna unit in the next adjacent row. According to the invention, the problems that the sidelobe level is increased and the receiving sensitivity is reduced due to the array plane block design are solved, and the efficiency of the radar is improved.

The invention provides a path planning method and device, electronic equipment and a computer readable storage medium, and relates to the technical field of path planning. The method comprises the following steps: acquiring environment information required by path planning; determining a Hamiltonian model according to the environment information; determining evolution time of quantum random walk based on a Hamiltonian model; and based on the evolution time and a Hamiltonian model, obtaining an evolution result of the photons after quantum random walking in the waveguide array, and determining an optimal path according to the evolution result. Due to the adoption of a quantum random walking mechanism, path exploration can be carried out in parallel in a quantum superposition state, so that a plurality of paths are searched and evaluated at the same time, and the calculation complexity of path planning is remarkably reduced; moreover, the quantum random walk can more effectively explore the global path space through the quantum interference effect, and the problem that a traditional algorithm is easy to fall into local optimum is avoided, so that the global optimal path is more accurately found, and efficient and global optimal path planning is realized.

We combine an array of waveguides having different lengths with a reconfigurable integrated optical network that allows full customization of the filter function after fabrication to provide optical filters. This customization can also optimize filter performance, compensating for fabrication errors or imprecision. This network can also self-configure automatically to the problem. Hence this approach provides a new class of compact, convenient, high-performance and highly customizable optical filters that are also suitable for mass manufacture on integrated photonics platforms.

The invention relates to the field of semiconductor lasers, in particular to a high-power narrow-linewidth hybrid integrated laser, which comprises a wide waveguide laser gain chip and a silicon-based external cavity photon chip, and is characterized in that the silicon-based external cavity photon chip comprises a tip multi-section edge coupler, a bus waveguide, at least three cascaded micro-ring resonators and a feedback assembly; the tip multi-section edge coupler comprises a tip waveguide array and a conical combined waveguide, the tip waveguide array is composed of inverted conical waveguides arranged side by side, and the width of the input end face of each inverted conical waveguide is smaller than that of the output end face of each inverted conical waveguide; and the width of the conical combined waveguide is gradually reduced from the input end to the output end. The invention solves the industrial problem that high power and narrow linewidth are difficult to consider in the hybrid integrated laser, has the advantages of high output power, extremely narrow linewidth, wide tuning range, high coupling efficiency, good process tolerance, high integration level and the like, and provides a high-performance light source for the next generation of coherent optical communication, laser radar and precision measurement system.

The application relates to the technical field of lasers, in particular to a semiconductor laser for a quantum gyroscope and a preparation method thereof. The semiconductor laser for the quantum gyroscope comprises a stacking structure, the stacking structure comprises an N-type substrate, an N-type cladding layer, an N-type waveguide layer, an active region, a first P-type waveguide layer and a waveguide structure which are stacked in a first direction in sequence, and the waveguide structure comprises a low-duty-cycle V-shaped groove grating, a multimode interference coupling beam splitting waveguide, a gain waveguide array, a multimode interference coupling beam combining waveguide, a high-duty-cycle V-shaped groove grating and a micro-tapered waveguide which are arranged and connected in a second direction in sequence. The application is favorable for realizing the semiconductor laser for the quantum gyroscope with high power and narrow linewidth under the premise of reducing the complexity of the device structure.

The invention provides a laser array generating device and an addressing readout device, and the laser array generating device comprises a housing which is internally provided with a cavity; the conversion unit is located in the cavity and is suitable for obtaining n beams of target laser according to the initial laser, the first waveguide array chip is located in the cavity and comprises a first substrate and n first waveguides formed on the first substrate, the ith first waveguide in the n first waveguides is configured to transmit the ith beam of target laser, and the nth first waveguide is configured to transmit the nth beam of target laser. And n beams of target laser are output through the n first waveguides to form a laser array.