Preparation process for tunneling scanning microscope probe with reverse exponent shape and depth-to-length-diameter ratio

A technology of scanning tunneling and preparation technology, which is applied in the field of preparation technology of scanning tunneling microscope probes with high aspect-to-diameter ratio, and can solve problems such as complex devices, lack of probe preparation technology, and poor controllability of probes

Inactive Publication Date: 2011-09-14
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the previous research results and preparation process have not systematically studied the influence mechanism of tungsten wire immersion depth, voltage signal, electrolyte concentration, power-off time and other parameters on the probe preparation effect during the preparation process, and there is a lack of mature and systematic exploration. Needle preparation process, poor controllability of parameters such as the contour shape of the prepared probe, needle tip curvature radius, length-to-diameter ratio, and the preparation device is complicated, and the success rate of preparation is not high, especially in the case of high length-to-diameter ratio probes. The production process is still blank

Method used

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  • Preparation process for tunneling scanning microscope probe with reverse exponent shape and depth-to-length-diameter ratio
  • Preparation process for tunneling scanning microscope probe with reverse exponent shape and depth-to-length-diameter ratio
  • Preparation process for tunneling scanning microscope probe with reverse exponent shape and depth-to-length-diameter ratio

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Experimental program
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Effect test

Embodiment 1

[0023] The preparation device of the scanning tunneling microscope probe with inverted exponential shape and high length-to-diameter ratio is as follows: figure 1 shown.

[0024] 1) Straighten a tungsten wire with a mass percent purity of 99.9999% and a diameter of 0.25mm and cut it into a 10mm tungsten wire segment as the anode, wind a 0.5mm platinum wire into a platinum ring with a diameter of 8mm as the cathode, and use a concentration of 1mol / L of KOH solution as electrolyte;

[0025] 2) Put the platinum ring on the liquid surface of the electrolyte and ground it, put the tungsten wire segment through the center of the platinum ring and immerse it in the electrolyte, apply a voltage signal to electrolyze the tungsten wire segment, when the slope of the electrolysis current curve is greater than 0.8mA / ms , the voltage signal is automatically cut off, and the electrolyzed tungsten wire segment is soaked in hydrofluoric acid solution or acetone solution for 1 minute to remo...

Embodiment 2

[0031] The preparation device of the scanning tunneling microscope probe with inverted exponential shape and high length-to-diameter ratio is as follows: figure 1 shown.

[0032] 1) Straighten a tungsten wire with a mass percent purity of 99.9999% and a diameter of 0.50 mm and cut it into a 15 mm tungsten wire segment as an anode, wind a 1 mm platinum wire into a platinum ring with a diameter of 10 mm as a cathode, and use a concentration of 3 mol / L of KOH solution as electrolyte;

[0033] 2) Put the platinum ring on the liquid surface of the electrolyte and ground it, put the tungsten wire segment through the center of the platinum ring and immerse it in the electrolyte, apply a voltage signal to electrolyze the tungsten wire segment, when the slope of the electrolysis current curve is greater than 0.8mA / ms , the voltage signal is automatically cut off, and the electrolyzed tungsten wire segment is soaked in hydrofluoric acid solution or acetone solution for 2 minutes to re...

Embodiment 3

[0038] The preparation device of the scanning tunneling microscope probe with inverted exponential shape and high length-to-diameter ratio is as follows: figure 1 shown.

[0039] 1) Straighten the tungsten wire with a mass percentage purity of 99.9999% and a diameter of 0.3 and cut it into 12 tungsten wire segments as the anode, wind a 0.8 platinum wire into a platinum circle with a diameter of 9 mm as the cathode, and use KOH with a concentration of 2mol / L solution as electrolyte;

[0040] 2) Put the platinum ring on the liquid surface of the electrolyte and ground it, put the tungsten wire segment through the center of the platinum ring and immerse it in the electrolyte, apply a voltage signal to electrolyze the tungsten wire segment, when the slope of the electrolysis current curve is greater than 0.8mA / ms , the voltage signal is automatically cut off, and the electrolyzed tungsten wire segment is soaked in hydrofluoric acid solution or acetone solution for 1-2 minutes to ...

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Abstract

The invention discloses a preparation process for a tunneling scanning microscope probe with reverse exponent and depth-to-length-diameter ratio. The process comprises the following steps: taking tungsten wire as the material for manufacturing the probe, immersing the tungsten wire into alkaline electrolytic solution to be taken as anode, winding a corrosion-resistance platinum wire on the periphery of the tungsten wire to be taken as cathode, sequentially adopting pulse width voltage signals with adjustable current and duty ratio to determine the immersing depth, the electrolytic voltage, solution concentration and the like of the tungsten wire, detecting the electrolytic current in real time, and automatically shunting down the voltage signals, thus stopping the electrolysis process when the slope of curve of the electrolytic current is larger than 0.8mA/ms. The process can be utilized for manufacturing tunneling scanning microscope probe with a reverse-exponent outline, wherein the radius of the probe tip is smaller than 20nm, and the length-to-diameter ratio is higher than 100-1, so that a tunneling scanning microscope has the capability of achieving the atomic-scale image resolution ratio, and measuring the depth-to-width ratio micro-nano structure.

Description

technical field [0001] The invention relates to a preparation process of a probe, in particular to a preparation process of a scanning tunneling microscope probe with an inverted exponential shape and a high length-to-diameter ratio. Background technique [0002] Scanning Tunneling Microscope (STM) mainly utilizes the tunneling current caused by the quantum tunneling effect of the nanometer gap between the needle tip and the sample to have an exponential relationship with the gap to realize the local detection of the sample, and thus achieve the surface microstructure of new materials. Atomic resolution. The radius of curvature of the tip of the STM probe directly affects the quality and resolution of the STM image. If the tip had only one stable atom instead of multiple tips, the tunneling current would be stable and images with atomic resolution could be obtained. At the same time, the length-to-diameter ratio of the probe determines the ability of STM to measure high-as...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25F3/08G01Q60/16
Inventor 居冰峰陈远流张威廉孟冬钟薇薇
Owner ZHEJIANG UNIV
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