Method for assembling large aspect ratio probe

A technology with a large aspect ratio and an assembly method, which is applied in scanning probe technology, scanning probe microscopy, measuring devices, etc., can solve problems such as scratches, and achieve cost saving, excellent mechanical properties, and non-wearing effects

Inactive Publication Date: 2019-11-29
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the probe must contact the surface under certain pressure, the contact pressure per unit area of ​​the surface to be tested is very high. If the hardness of the surface to be tested is low, the probe will often scratch the surface to be tested, so this method is not applicable Micro-nano surfaces processed on soft metals such as copper and aluminum
In addition, most of the probes currently used are made of metal tungsten or diamond, and there is no reliable process to make the length-to-diameter ratio of the probes large enough, which is helpless for the measurement of fine structures with high aspect ratios.

Method used

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  • Method for assembling large aspect ratio probe

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] 1) Hydrophilic treatment of needle tip

[0039] First, rinse the needle tip with ethanol for 8 minutes; configure the hydrophilic solution according to the volume ratio of ammonia water: hydrogen peroxide: deionized water = 1:1:5, with a total volume of 250 mL. Clamp the needle tip on the fixture and put it into a beaker, pour 125mL of the hydrophilic solution into the beaker and cover it, put the beaker into an oil-bath insulation pot to keep the heating temperature at 80°C, and take it out after constant heating for 1.5h.

[0040] 2) Configuration of carbon nanotube mixed solution

[0041] Use a measuring cylinder to measure 3-aminopropyltriethoxysilane and isopropanol solution respectively, and configure 250mL mixed solution A according to the ratio of 1:9; disperse the multi-walled carbon nanotube powder evenly in the isopropanol solvent , the dispersion concentration is 0.00025mg / mL, then add the above mixed solution A to fully ultrasonically disperse, and the ult...

Embodiment 2

[0046] 1) Hydrophilic treatment of needle tip

[0047] First, rinse the needle tip with ethanol for 5 minutes; configure the hydrophilic solution according to the volume ratio of ammonia water: hydrogen peroxide: deionized water = 1:1:5, with a total volume of 50 mL. Clamp the needle tip on the fixture and put it into a beaker, pour 25mL of the hydrophilic solution into the beaker and cover it, put the beaker into an oil-bath insulation pot to keep the heating temperature at 75°C, and take it out after constant heating for 0.5h.

[0048] 2) Configuration of silicon oxide nanowire mixed solution

[0049] Use a graduated cylinder to measure 3-aminopropyltriethoxysilane and isopropanol solution respectively, and configure 25mL of mixed solution A according to the ratio of 1:8; disperse the silicon oxide nanowire powder evenly in the isopropanol solvent, The dispersion concentration is 0.00004 mg / mL, and then the above mixed solution A is added to fully ultrasonically disperse, a...

Embodiment 3

[0053] 1) Hydrophilic treatment of needle tip

[0054] First, rinse the needle tip with ethanol for 10 minutes; configure the hydrophilic solution according to the volume ratio of ammonia water: hydrogen peroxide: deionized water = 1:1:5, with a total volume of 500 mL. Clamp the needle tip on the fixture and put it into a beaker, pour 250mL of the hydrophilic solution into the beaker and cover it, put the beaker into an oil-bath insulation pot to keep the heating temperature at 85°C, and take it out after constant heating for 2 hours.

[0055] 2) Configuration of ZnO nanorod mixed solution

[0056] Use a measuring cylinder to measure 3-aminopropyltriethoxysilane and isopropanol solution respectively, and configure 500mL of mixed solution A according to the ratio of 1:10; uniformly disperse the zinc oxide nanorod powder in the isopropanol solvent, The dispersion concentration is 0.0005mg / mL, and then the above mixed solution A is added to fully ultrasonically disperse, and the...

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PUM

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Abstract

The invention discloses a method for assembling a large aspect ratio probe, wherein the probe comprises an atomic force microscope probe and a nanostructure located at the probe tip, and the method for assembling the probe comprises the following steps of firstly subjecting the atomic force microscope probe to hydrophilic treatment, and then placing the atomic force microscope probe after the hydrophilic treatment in a mixed solution in which one-dimensional nano-materials are dispersed for assembling to obtain a large aspect ratio probe, wherein probes with different large aspect ratios can be obtained by adjusting the concentration of the one-dimensional nano-material mixed solution. The method for assembling the large aspect ratio probe provided by the invention is simple and easy to implement with no need of complicated and expensive equipment, saves costs, has high-precision measurement capability for the measurement of microstructures with complex high aspect ratios, and overcomes the problem that the imaging of high-aspect-ratio microstructures with atomic force ordinary silicon probes is easy to produce imaging artifacts.

Description

technical field [0001] The invention belongs to the technical field of micro-nano manufacturing and measurement, and in particular relates to an assembly method of a probe with a large aspect ratio. Background technique [0002] With the continuous advancement of modern microfabrication technology, various new microcircuits, micro-optical components, micromachines, etc. have an urgent need for surface topography measurement. These structures widely rely on complex microstructures with high aspect ratios. For the measurement of complex microstructures with high aspect ratios, direct or indirect microscopic magnification is generally required, which requires higher lateral and longitudinal resolutions. Compared with the measurement of smooth surfaces, it is more difficult to measure the real shape and position deviation of complex microstructures with high aspect ratio. [0003] At present, there are mainly two types of measurement methods: non-contact method and contact meth...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q70/00G01B11/02G01B11/22G01B11/24
CPCG01B11/02G01B11/22G01B11/24G01Q70/00
Inventor 杨树明程碧瑶李少博杨晓凯王飞
Owner XI AN JIAOTONG UNIV
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