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3results about How to "Improve measurement performance" patented technology

Chuck assembly and measuring device

The application provides a chuck assembly and a measuring device. The chuck assembly comprises a chuck, a plurality of support columns for supporting a wafer are arranged on one side of the chuck facing the wafer, and a plurality of air nozzles capable of forming an air cushion are arranged on the side of the chuck. The plurality of support columns form a plurality of concentric support rings with the rotation center of the chuck as the center. The plurality of air nozzles form a plurality of concentric air nozzle rings with the rotation center as the center. At least one support ring is arranged between any two adjacent air nozzle rings. In the embodiment of the application, the chuck assembly can effectively improve the anti-interference ability, the test stability, and the measurement accuracy.
Owner:NANJING ZHONGAN SEMICON EQUIP LTD

Portable drilling measuring instrument

ActiveCN224282617UReal-time visual detectionreduce demandSurveyConstructionsMeasuring instrumentEngineering
A portable drilling measuring instrument comprises a receiving rod, a mobile power source is arranged on the outer surface of one side of the receiving rod, the outer surface of the receiving rod and the same side of the mobile power source are connected with a wireless range finder in a magnetic attraction mode, the wireless range finder is provided with a panel and a laser lamp, and the light emitting direction of the laser lamp is parallel to the center line of the receiving rod. A fixed seat is arranged on the outer surface of the other side of the receiving rod, and an inclinometer is arranged on the fixed seat; a lighting camera, an inclinometer and an infrared distance meter are integrated, through modular combination of the measuring end, the measuring rod and the receiving end, measurement of parameters such as the drilling depth and the inclination angle can be completed at a time, real-time visual detection of the rock condition in a hole is synchronously achieved, and compared with a traditional single measuring mode, the working efficiency is improved, the personnel requirement is reduced, and the cost is reduced. The whole set of equipment is light in weight, easy to carry and suitable for rapid measurement of multiple scenes such as tunnels and mines.
Owner:中国水电建设集团十五工程局有限公司 +1