The application discloses a kind of three-
dimensional precision measurement systems in accordance with Abbe principle, including three-dimensional
macro stage,
six degrees of freedom micro stage,
laser length measurement angle measurement
system, three-dimensional mirror group, low expansion measurement frame, two-dimensional fine adjustment mechanism, trigger probe or
cutting tool and connecting mechanism;
Laser length measurement angle measurement
system realizes
six degrees of freedom measurement of object table, three-axis
laser interferometer is as x direction, y direction, z direction length reference, ensures that measurement beams are perpendicular to each other and intersect at measurement trigger point by two-dimensional fine adjustment mechanism, locks the relative position of three-axis length reference and trigger point, establishes three-dimensional measurement
system, and working mode is object table movement, measurement system is fixed, ensure that any measured point is always located on length reference or extension line during movement process.In the application, angle meter real-time feedback object table angular motion, control micro stage to carry out angular
motion error compensation,
macro-micro collaborative motion realizes the measurement effect of large
stroke and
high resolution, and measurement is realized by triggering measured object.