192 results about "Magnetic lens" patented technology

A broad-spectrum, high spatial and time resolution contact-field optical microscope comprises a fiber optical taper, a vacuum chamber, a photocathode, a magnetic lens photoelectron image enlarger, a micro-channel plate image intensifier, a phosphor screen and a CCD. Sample is placed directly in contact with a smaller sampling face of the optical taper. Light which is emitted, reflected or transmitted by the sample is launched into each of the fiber core ends on the sampling face and conveyed by the optical fibers to a larger imaging face of the optical taper, thereby presenting an enlarged image at the imaging face. The image is converted into a photoelectron image by photocathode which is deposited on the surface of the imaging face. The photoelectron image is further enlarged by magnetic lenses and intensified by micro-channel plate. The enlarged and enhanced electron image is displayed on phosphor screen and coupled through faceplate to CCD.

PCT No. PCT/US96/09906 Sec. 371 Date Mar. 9, 1998 Sec. 102(e) Date Mar. 9, 1998 PCT Filed Jul. 6, 1996 PCT Pub. No. WO96/41362 PCT Pub. Date Dec. 19, 1996Disclosed are lens apparatus in which a beam of charged particlesis brought to a focus by means of a magnetic field, the lens being situated behind the target position. In illustrative embodiments, a lens apparatus is employed in a scanning electron microscopeas the sole lens for high-resolution focusing of an electron beam, and in particular, an electron beam having an accelerating voltage of from about 10 to about 30,000 V. In one embodiment, the lens apparatus comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. In other embodiments, the lens apparatus comprises a magnetic dipole or virtual magnetic monopole fabricated from a variety of materials, including permanent magnets, superconducting coils, and magnetizable spheres and needles contained within an energy-conducting coil. Multiple-array lens apparatus are also disclosed for simultaneous and/or consecutive imaging of multiple images on single or multiple specimens. The invention further provides apparatus, methods, and devices useful in focusing charged particle beams for lithographic processes.

The present invention provides a compact electron lens causing little aberration, and a charged particle beam apparatus such as a scanning electron microscope that is super compact and offers a high resolution. An upper magnetic pole and a sample-side magnetic pole are magnetically coupled to the respective poles of a permanent magnet that is made of a highly strong magnetic material such as a rare-earth cobalt system or a neodymium-iron-boron system, that is axially symmetrical, and that has a hole in the center thereof. An inner gap is created on the side of a center axis. Thus, a magnetic lens is formed axially. Moreover, a semi-stationary magnetic path that shields an outside magnetic field and has the magnetic reluctance thereof regulated is disposed outside. The sample-side magnetic pole and magnetic path defines a region where magnetic reluctance is the highest outside the permanent magnet. A space defined by the permanent magnet, upper magnetic pole, sample-die magnetic pole, and semi-stationary magnetic path is filled with a filling made of a non-magnetic material. Thus, an objective lens is constructed.

System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.

The invention discloses a femtosecond electron diffraction device that includes light resource, electron generate and control system, sample room, electron measuring and imaging system, vacuum system and five shafts control system. The electron generating and controlling system includes photo cathode, anode, magnetic lens, X direction deflecting plate and Y direction deflecting plate. The invention decreases the distance from the cathode to sample and improves the time resolving power. The invention could be used to measure the structure dynamic information of transmission diffraction and reflection diffraction of the sample.

A charged particle system comprises a particle source for generating a beam of charged particles and a particle-optical projection system. The particle-optical projection system comprises a focusing first magnetic lens (403) comprising an outer pole piece (411) having a radial inner end (411′), and an inner pole piece (412) having a lowermost end (412′) disposed closest to the radial inner end of the outer pole piece, a gap being formed by those; a focusing electrostatic lens (450) having at least a first electrode (451) and a second electrode (450) disposed in a region of the gap; and a controller (C) configured to control a focusing power of the first electrostatic lens based on a signal indicative of a distance of a surface of a substrate from a portion of the first magnetic lens disposed closest to the substrate.

An apparatus configured to control a magnetic field strength of a magnetic lens is provided. The apparatus may include a magnetic sensor configured to generate an output signal responsive to a first magnetic field strength of the magnetic lens. The apparatus may also include a control circuit coupled to the magnetic sensor and the magnetic sensor. The control circuit may be configured to receive the output signal from the magnetic lens and to receive an input signal responsive to a predetermined magnetic field strength. The control circuit may be further configured to generate a control signal responsive to the output signal and the input signal. Additionally, the control circuit may be configured to apply a current to the magnetic lens such that a second magnetic field strength may be generated within the magnetic lens closer to the predetermined magnetic field strength than the first magnetic strength.

The present invention illustrates various methods of attaching a pair of eyeglass lenses or a lens shield to an eyeglass frame using magnets or magnetically attractive material. The magnetic attachment methods are beneficial because they allow the user to have interchangeable lenses or shields for indoor and outdoor use, enhancing their visual acuity during work or play. The lenses may be tinted, prescription, protective eyewear, or plano. The magnetic lenses are convenient and user friendly, allowing intuitive, tool-less interchangeability with no need to twist or stress the frame. These methods of attachment require no specific instructions or tools when the user replaces lenses.

The invention provides an electron gun device for generating a high-brightness femtosecond electronic impulse. The electron gun device comprises an incident window, a sealing component, a vacuum cavity, a photocathode, a grid, an anode, an observation window, a molecular pump, a pre-stage dry pump, an electronic focusing magnetic lens, an RF (Radio Frequency) electronic compression cavity, an RF signal generating device, an x-direction electronic deflector, a y-direction electronic deflector and an electronic scanning plate. Through the invention, the broadening function of the space charge effect on longitudinal pulse duration of an electronic beam impulse is effectively suppressed; the problem that the divergence of the electronic beam is increased due to electric field distortion at a small hole of the anode is solved; and the horizontal and longitudinal electronic impulses have super-high resolution factors, and the real-time detection on super-high time resolution and space resolution of ultrafast processes such as molecular reaction dynamics can be performed.

An apparatus for inspecting a sample includes a sample holder for holding the sample; a multi beam charged particle generator for generating an array of primary charged particle beams; an electro-magnetic lens system for directing the array of primary charged particle beams into an array of separate focused primary charged particle beams on the sample; a multi-pixel photon detector arranged for detecting photons created by the focused primary charged particle beams when the primary charged particle beams impinge on the sample or after transmission of said primary charged particle beams through the sample; and an optical assembly for conveying photons created by at least two adjacent focused primary charged particle beams of the array of separate focused primary charged particle beams to distinct and/or separate pixels or to distinct and/or separate groups of pixels of the multi-pixel photon detector.

An apparatus of plural charged particle beams with multi-axis magnetic lens is provided to perform multi-functions of observing a specimen surface, such as high-throughput inspection and high-resolution review of interested features thereof and charge-up control for enhancing image contrast and image resolution. In the apparatus, two or more sub-columns are formed and each of the sub-columns performs one of the multi-functions. Basically the sub-columns take normal illumination to get high image resolutions, but one or more may take oblique illuminations to get high image contrasts.

A swinging objective retarding immersion lens system and method therefore which provide a low voltage electron beam with high beam current, relatively high spatial resolution, a relative large scan field, and high signal collection efficiency. The objective lens includes a magnetic lens for generating a magnetic field in the vicinity of the specimen to focus the particles of the particle beam on the specimen, an electrode having a potential for providing a retarding field to the particle beam near the specimen to reduce the energy of the particle beam when the beam collides with the specimen; a deflection system including a plurality of deflection units situated along the beam axis for deflecting the particle beam to allow scanning on the specimen with large area, at least one of the deflection units located in the retarding field of the beam, the remainder of the deflection units located within the central bore of the magnetic lens; and a annular detection unit with a relatively small aperture, located underneath the primary beam define aperture, to capture secondary electron (SE) and backscattered electrons (BSE).

The invention provides a 600kw gas discharge electronic gun comprising an upper gun cover, a middle gun body and a bottom gun base. An electronic gun core and an anode are arranged in the gun body. A focusing coil and a deflection scanning coil are arranged under the anode, and a focusing magnetic lens is provided. The electronic gun core, the anode, the focusing coil and the deflection scanning coil are all provided with a cooling water path. An electronic gun core which is composed of cathode blocks is arranged in a cold cathode cylinder. The electronic gun core is externally connected with a control system through a cable. A closed air chamber is formed around the electronic gun core and the anode. An open-loop control type inflation system is provided. The inflation system can be used to inflate hydrogen and oxygen into the closed air chamber. According to the invention, the manufacturing and using cost can be greatly reduced, and advantages of easy operation, low working strength and high working efficiency can be realized.

The invention relates to an apparatus and method for inspecting a sample. The apparatus comprises a generator for generating an array of primary charged particle beams (33), and a charged particle optical system with an optical axis (38). The optical system comprises a first lens system (37, 310) for focusing all primary beams (33) into a first array of spots in an intermediate plane, and a second lens system (313, 314) for focusing all primary beams (33) into a second array of spots on the sample surface (315). The apparatus comprises a position sensitive backscattered charged particle detector (311) positioned at or near the intermediate plane. The second lens system comprises an electromagnetic or electrostatic lens which is common for all charged particle beams. Preferably the second lens system comprises a magnetic lens for rotating the array of primary beams (33) around the optical axis (38) to position the second array of charged particle spots with respect to the first array at an angle.

A swinging objective retarding immersion lens system and method therefore which provide a low voltage electron beam with high beam current, relatively high spatial resolution, a relative large scan field, and high signal collection efficiency. The objective lens includes a magnetic lens for generating a magnetic field in the vicinity of the specimen to focus the particles of the particle beam on the specimen, an electrode having a potential for providing a retarding field to the particle beam near the specimen to reduce the energy of the particle beam when the beam collides with the specimen; a deflection system including a plurality of deflection units situated along the beam axis for deflecting the particle beam to allow scanning on the specimen with large area, at least one of the deflection units located in the retarding field of the beam, the remainder of the deflection units located within the central bore of the magnetic lens; and an annular detection unit with a relatively small aperture, located underneath the primary beam define aperture, to capture secondary electron (SE) and backscattered electrons (BSE).