29 results about "Ion density" patented technology

Methods include introducing an ion quantity into an ion accumulation region, wherein the ion accumulation region, which can comprise a structure for lossless ion manipulations (SLIM) device allowing creation of a static or traveling wave electric field that moves ions towards an ion wall controllably blocking a movement of the ion quantity past the ion wall, wherein the ion wall is produced by one or more ion wall electrodes of an electrode arrangement, and directing the ion quantity in a direction towards the ion wall to increase a density of the ion quantity adjacent to the ion wall, such that the quantity of ions becomes space charge separated based on mobility along the direction and adjacent to the ion wall. Related apparatus provide space charge driven mobility separations.

The present invention relates to an ion source device with adjustable plasma density, belonging to the field of semiconductor equipment. A coil is wound around the outside of a discharge chamber of the ion source device with adjustable plasma density; a radio frequency module is connected to the coil; a gas duct is introduced into the ion source chamber and communicates with the discharge chamber; a grid is provided on the same-direction open end faces of the ion source chamber and the discharge chamber; the discharge chamber is composed of two large-diameter discharge chambers and a small-diameter discharge chamber of non-uniform diameters; the large-diameter discharge chamber and the small-diameter discharge chamber are communicated; one end face of the large-diameter discharge chamber is an open end face, and the open end face faces the grid. The present invention relates to an ion source device with adjustable plasma density, which can bombard the middle area and edge area of ​​a wafer independently and as a whole by using coils at different positions, so as to adjust the plasma density distribution of the discharge chamber and ensure etching uniformity.

The application provides an ion beam forming module for flat glass, an ion implantation system and a method, wherein the ion beam forming module for flat glass comprises ion source combination units, ion beam mass and charge ratio analysis magnetic field units, expansion magnet combination units and collimating magnet combination units which are sequentially connected; the ion source combination units comprise a plurality of ion source devices arranged side by side, and the input end of the ion source device is connected with an energy supply and material supply device; the expansion magnet combination units comprise a plurality of groups of expansion magnets, and the position of each group of expansion magnets corresponds to the two sides of the ion beam generated by one ion source device; the collimating magnet combination units are located at the intersection of a plurality of ion beams generated by the plurality of ion source devices after deflection by the ion beam mass and charge ratio analysis magnetic field units. The parallel strip-shaped ion beam obtained by the scheme has a very high effective height, and the beam width of the ion beam is small, the ion density is high and the uniformity is good.

The invention discloses an ion mobility spectrum measurement method based on an I-U characteristic curve of a single-section Gedes tube, and the method comprises the steps: building a measurement platform, and enabling to-be-measured ions to pass through the single-section Gedes tube under the driving of laminar airflow with the flow velocity of u0; changing a bias voltage U applied to the single-section type Gedes tube, and measuring a corresponding corona ion current I to obtain an I-U characteristic curve of the single-section type Gedes tube; on the basis of the curve slope of the I-U characteristic curve, calculating ion densities corresponding to ions with different migration rates; and generating an ion mobility spectrum according to all the ions with different mobility and the corresponding ion densities, and calculating the average ion mobility based on the ion mobility spectrum.

The application discloses a kind of particle evolution simulation methods based on multi-component plasma radiation effect in tokamak, belong to magnetic confinement controlled nuclear fusion technical field.Firstly, the evolution of impurity density distribution, electron density distribution and ion density distribution is calculated, then continuous radiation and linear radiation are calculated, and then a variety of plasma radiation is accurately added inside magnetic island.Calculating the magnetic field configuration under the plasma radiation correction, and continue to calculate the evolution of plasma total radiation and related parameters under advanced magnetic field configuration, so repeated calculation, achieve the simulation effect of long time evolution.The application realizes the calculation of impurity, electron and ion real-time dynamic distribution, and can also calculate the evolution of a variety of plasma radiation under real three-dimensional magnetic field configuration, and then obtain the plasma related parameter profile at any time;Meanwhile, the spatial distribution of plasma radiation and the situation of magnetohydrodynamic instability under advanced magnetic field configuration are more accurately described.

The present invention discloses an accident-tolerant Cr / Nb nano-multilayer coating and a preparation method thereof. The Cr / Nb nano-multilayer coating is deposited on a clean silicon substrate by magnetron sputtering. The principle is that Ar gas generates high-density Ar+ after glow discharge. Under the action of the electric field, the Ar+ is strongly attracted to the negative electrode and bombards the metal Cr DC target and the metal Nb DC target at a high rate, forming a collision cascade process to sputter target atoms and secondary electrons. The Cr and Nb atoms ultimately move in opposite directions to deposit on the silicon substrate at the anode. The secondary electrons move in an orthogonal electromagnetic field in a direction perpendicular to the electric and magnetic fields, circulating in the form of cycloids, increasing the ionization rate of Ar, the ion density and energy, and thus achieving high-rate sputtering. The method regulates the microstructure of the accident-tolerant Cr / Nb nano-multilayer coating by controlling the modulation ratio, thereby improving the oxidation resistance of the Cr / Nb nano-multilayer coating.

The present invention discloses a method for predicting the evolution of erosion morphology of an ion thruster grid, comprising: obtaining the size of a single-hole beam downstream of an accelerating grid through experimental measurement; selecting a pair of screen grids and an accelerating grid hole as objects of numerical simulation research; obtaining an initial plasma density upstream of the screen grid based on a relationship between beam current and plasma density upstream of the screen grid; obtaining a Debye length based on upstream plasma density calculation and selecting a size of a simulation grid; obtaining a neutral gas density at each grid node in a simulation area based on a neutral gas collision model; establishing a grid corrosion morphology evolution model, starting beam calculation, simulating and obtaining the single-hole beam size, performing feedback adjustment based on experimental values, and determining a final upstream ion density; processing the collision process between ions and the grid, starting corrosion calculation, and obtaining an accurate grid corrosion rate; reducing grid mass based on the corrosion rate, eliminating grid nodes, and realizing a change in the grid morphology.

This invention discloses a gas supply system for a miniature radio frequency ion thruster, belonging to the field of electric propulsion technology, and relating to rarefied gas flow in plasma propulsion. By placing a gas distribution structure at the working fluid inlet in the ionization chamber and arranging the disc of the gas distribution structure coaxially with the ionization chamber, the propellant entering the ionization chamber is uniformly distributed after passing through the gas distribution structure, increasing the average density of the propellant in the ionization chamber. This results in higher absorption efficiency of radio frequency energy by the miniature radio frequency ion thruster, more uniform plasma distribution, and higher ion density in the plume, significantly improving the performance and operational stability of the miniature radio frequency ion thruster. Furthermore, the gas distribution structure is simple, with both the disc and cylinder being cylindrical, reducing manufacturing difficulty and increasing economic efficiency compared to existing technologies. The gas supply system for the miniature radio frequency ion thruster of this invention solves the problems of complex structure and low propellant density in existing gas supply structures.

The application provides a target material support and relates to the technical field of coating equipment. The target material on the target material base is aligned with the ion source by rotating the steering part connected with the steering shaft part and driving the steering support by the steering shaft part. During the process of bombarding the target material on the target material base by the ion source, the lifting assembly on the target material base performs lifting with a lifting distance less than 1 cm, drives the target material base to lift with a lifting distance less than 1 cm, and makes the ion beam always keep at 90 degrees in the beam path between the ion source, the target material on the target material base and the workpiece disc above the target material. The ion density in the middle of the high-energy ion beam is large, the ion density in the outer periphery is small, the target material is not in the form of annular depression after continuous sputtering under the kinetic energy bombardment, the target material surface is no longer a flat structure, and the phenomenon of uneven deposition of target material atoms in the sputtering process is avoided, so that the coating of the workpiece and the substrate surface is uniform.

The present invention relates to the field of controlled nuclear fusion in nuclear energy applications. The title of the present invention is a positive-ion circular-collision nuclear fusion reactor. The technical problems to be solved by the present invention are: the nuclear fusion reaction times are short and the energy gains Q are less than 1. Our technical solution is: using an accelerator to accelerate hydrogen isotope positive ions to (0.1-3) Mev, and then inducing nuclear fusion reactions by circular collision. In the past, it was believed that the probability of inducing nuclear fusion by collision was less than 0.0001. We simultaneously employ five technical schemes to solve the problem of low probabilities of positive ion collision-induced nuclear reactions: 1. using the accelerator to accelerate the positive ions to (0.1-3) Mev; 2. using circular collision to induce nuclear fusion; 3. enabling collision in a collision area having a large cross section; 4. enabling collision in a long collision area; and 5. using a plurality of sets of electromagnetic lenses to focus ion beams to increase the ion density. In the present invention, energy generated by nuclear fusion is converted into heat energy in an energy conversion area, and then high-pressure steam is generated for power generation.

The invention provides a negative ion density feedback control method for a radio frequency negative ion source, which belongs to the field of plasmas and comprises the following steps: measuring relative negative ion density online in real time by using a branching ratio method through a non-intrusive optical emission spectrum diagnosis technology, establishing an optical observation light path to collect emission spectrum signals, and processing the emission spectrum signals through a branching optical fiber and a narrow-band optical filter to obtain negative ion density. Extracting a Ballast system characteristic spectral line, and calculating the relative negative ion density; an interference source is analyzed, an electromagnetic shielding method is combined with the design principle of a band elimination filter, interference suppression is carried out on experimental signals and control signals, and the precision of feedback and control signals is improved; a negative ion density feedback control algorithm based on a closed-loop control theory is constructed, a radio frequency power source is used as a controlled object, the closed-loop control theory is referred to according to plasma load characteristics, and closed-loop feedback control over the negative ion density is achieved. According to the invention, the stability of the negative ion density under long-pulse-width operation can be maintained.

The invention provides a calibration system and a calibration method for an electro-optical crystal electric field measuring device, and belongs to the technical field of power grid environment protection, and the calibration system comprises a temperature and humidity box which is used for controlling the temperature and humidity of a calibration area; the electrostatic field generation unit is used for generating an electrostatic field E0; the ion current generation unit is used for generating ion current; the ion mobility measuring device is used for measuring the ion density in the calibration area; the electro-optical crystal measuring device is used for acquiring the electric field of the photoelectric crystal in the electrostatic field; the voltage measuring unit is used for respectively measuring voltages on the ion current electrode and the high-voltage electrode; and the ion flow measuring unit is used for measuring the size of the ion flow and collecting the measured ion flow. The device has the advantages that the ion flow generation unit and the temperature and humidity cooperative control module are introduced, the ion migration effect and the temperature fluctuation scene under the actual working condition are reproduced in the calibration process, the calibration environment is made to fit the ionization, temperature and humidity conditions of a power transmission and transformation project site, and the applicability of the measuring device in the real environment is remarkably improved.

This invention provides a two-dimensional triangular lattice rare-earth-based titanate polycrystalline material, its preparation method, and its applications. The chemical formula of the rare-earth-based titanate polycrystalline material is Ba6M2Ti4O. 17 The space group is P63 / mmc, where M is one or more of Nd, Gd, and Yb. The novel two-dimensional triangular lattice rare-earth-based titanate polycrystalline material provided by this invention has a compact structure, a simple preparation process, and its frustrated structure of localized electron spins significantly reduces the minimum cooling temperature to the tens of millikons. Furthermore, it exhibits high magnetic ion density and large cooling capacity, making it an excellent magnetic refrigerant.

The invention provides a simulation method and device for a streamer development process in a gas medium, electronic equipment and a storage medium, and belongs to the technical field of high-voltage streamer generation and emulation.The method comprises the steps that the electron mobility is calculated according to gas components; calculating electric field distribution; according to the electric field distribution and the electron mobility, the average electron velocity is solved; generating a random number as the electron speed of the subdivision grid by using the elastic collision probability distribution; updating an electron position by using a microscopic electron migration equation to obtain electron density, and solving a macroscopic ion drift equation to obtain updated positive ion density and negative ion density; and calculating collision reaction among different particles by using an improved stochastic dynamics analysis method to obtain re-updated electron density, positive ion density and negative ion density, carrying out iterative calculation until the set simulation time is reached, and outputting a result. According to the method, the randomness of the discharge process can be simulated, the time step length is not limited by CFL conditions, and the calculation efficiency is higher.

This application relates to the field of space electric propulsion technology, specifically to a method for establishing a variable boundary simulation model of an ion thruster gate assembly. The method includes: Step 1: dividing the gate into regions; Step 2: selecting the object to be studied within each region; Step 3: calculating the upstream ion density of each object; Step 4: calculating the corresponding Debye length and determining the maximum values ​​of the calculation region in the lateral and radial directions; Step 5: handling collisions between atoms; Step 6: establishing a simulation calculation model; Step 7: calculating the gate morphology; Step 8: correcting the gate simulation calculation model; and Step 9: completing the establishment of the variable boundary simulation model of the ion thruster gate assembly. This application utilizes the sputtering etching morphology obtained from simulation calculations to update and improve the simulation calculation model in real time, enabling more accurate prediction of the thruster's operational lifespan, significantly shortening the product development cycle and reducing development costs.

An inductively coupled plasma apparatus 110 for producing an ion beam comprises a plasma chamber having an open ended body 118 and an end plate 120, a control grid 114 for extracting ions from the plasma chamber, and a dielectric window 124. The dielectric window comprises an outer region 124a seated around a periphery of an aperture of the end plate, and an inner region 124b extending into a plasma containment space to form a trough, hollow or recess. A radiofrequency (RF) induction device 128 (e.g. RF coil) for inductively generating a plasma is located in a space defined by the trough. The spacing between the outer region of the dielectric window and the outer surface of the end plate, and the position of the RF induction device in the trough, may both be adjustable. The invention may result in a more homogenous distribution of ion densities across the ion beam produced. A dielectric element and a magnetic configured for location in the plasma confinement space is also disclosed.

The present invention discloses an ion source device with adjustable plasma density, comprising a discharge chamber, a spiral coil and an ion source chamber coaxially arranged from the inside to the outside; a metal foil is arranged on the outer wall of the discharge chamber, and the metal foil can shield the inner edge magnetic field strength of the discharge chamber, neutralize the high plasma density caused by the skin effect, and make the plasma density in the discharge chamber uniform. The width W of the metal foil ranges from 1 to 20 mm, and the thickness T of the metal foil ranges from 0.1 mm to t, where t is the skin depth; the thickness T and surface area of ​​the metal foil are selected according to the difference between the edge plasma density and the central area plasma density in the discharge chamber. The present invention adds a Faraday structure outside the discharge chamber, distributes power to the Faraday structure, and adjusts the plasma density according to different working conditions, thereby effectively improving the etching uniformity.

The application provides a simulation method and device for streamer development in a gas medium, electronic equipment and a storage medium, and belongs to the technical field of high-voltage streamer generation and simulation, comprising the following steps: calculating electron mobility according to a gas component; calculating an electric field distribution; solving an average electron velocity according to the electric field distribution and the electron mobility; generating a random number by using an elastic collision probability distribution as an electron velocity of a profiled grid; updating an electron position by using a micro electron migration equation to obtain an electron density, and solving a macro ion drift equation to obtain updated positive ion density and negative ion density; calculating collision reactions between different particles by using an improved random dynamics analysis method to obtain the electron density, the positive ion density and the negative ion density which are updated again; iteratively calculating until a set simulation time is reached, and outputting a result. The application can simulate the randomness of a discharge process and the time step is not limited by a CFL condition, and the calculation efficiency is higher.

The invention provides a subKelvin magnetic refrigeration material as well as a preparation method and application thereof. The chemical formula of the sub-Kelvin magnetic refrigeration material is LiSrRE2 (BO3) 3, and RE represents a rare earth element. A series of sub-Kelvin magnetic refrigeration materials LiSrRE2 (BO3) 3 provided by the invention have a magnetic hexamer structure, the combination of high magnetic ion density and extremely low magnetic sequence temperature is realized, and experiments prove that the materials show ultralow adiabatic demagnetization refrigeration temperature, can be applied to the sub-Kelvin field, and have the characteristics of easiness in synthesis, stable performance, low cost and the like. The magnetic refrigeration working medium can be used as a magnetic refrigeration working medium with a novel geometric anti-contusion structure, so that the magnetic refrigeration working medium is suitable for wider application scenes.

The present invention belongs to the field of controlled nuclear fusion under civil nuclear energy. Provided is a positive ion cyclic collision nuclear fusion reactor. The technical problems to be solved by the present invention are: the nuclear fusion reaction time being short and the energy gain Q being less than 1. The technical solution is to use an accelerator to accelerate hydrogen isotope positive ions to 0.03-3 Mev, and then perform cyclic collision to induce a nuclear fusion reaction. In the past, it was believed that the probability of producing nuclear fusion by means of collision was less than 0.0001, and thus this approach was not used. Here, five technical solutions are used at the same time to solve the problem of the probability of collision-induced nuclear fusion being low: 1, using an accelerator to accelerate positive ions to 0.03-3 Mev; 2, inducing nuclear fusion by means of cyclic collision; 3, performing collision in a collision region with a large cross section; 4, performing collision in a long collision region; and 5, using an electromagnetic lens to focus an ion beam to increase the ion density. In the present invention, energy generated by nuclear fusion is converted into thermal energy in an energy conversion region, and then high-pressure steam is generated for power generation.

A method of plasma processing includes generating a plasma by coupling a source power pulse to a plasma processing chamber containing a substrate holder configured to support a substrate. The plasma includes first ions having a first mass and second ions having a second mass greater than the first mass. An ion density ratio of the second ions to the first ions is a first ratio. The method further includes, after a delay between the source power pulse and a delayed bias power pulse, applying a delayed bias power pulse to the substrate holder to deliver an energetic ion flux of the second ions to the substrate. The delay is selected based on diffusion time constants of the first ions and the second ions such that the ion density ratio of the second ions to the first ions is a second ratio greater than the first ratio.

The invention relates to the technical field of simulation modeling of power equipment, in particular to an equivalent circuit modeling and parameter calculation method for a sheath stage after arc of a vacuum circuit breaker. The invention provides a technical path for extracting instantaneous microcosmic parameters through PIC-MCC simulation and calculating time-varying circuit parameters in real time according to the instantaneous microcosmic parameters. Therefore, the equivalent circuit model is not a static'black box 'any more, but is a'transparent model' capable of accurately reproducing a post-arc complex dynamic process, and the problem that a traditional model is insufficient in precision is fundamentally solved. According to the method, a direct and computable mathematical relationship is established between the microscopic ion density and speed and the macroscopic circuit parameter conductance and capacitance, the physical image is clear, and the theoretical preciseness and engineering interpretation of the model are greatly enhanced. Through sufficient experimental verification, the reliability and practicability of the method and the model thereof are powerfully proved, and a solid foundation is laid for direct application of the method and the model thereof to product research and development.

The application relates to a magnetic confinement fusion plasma temperature diagnosis method, device and equipment, wherein the method comprises the following steps: establishing a neutron yield database, including a thermonuclear fusion neutron yield database and a beam-target reaction neutron yield database; collecting ion density and total neutron yield of external experimental equipment; assuming that only beam-target reaction exists in an initial stage, obtaining an initial temperature estimation value based on the ion density and the total neutron yield; obtaining first neutron yield and second neutron yield based on the initial temperature estimation value and the ion density, and obtaining theoretical total neutron yield; comparing the difference between the total neutron yield and the theoretical total neutron yield until convergence, obtaining the temperature estimation value as the plasma temperature; and outputting a diagnosis result as an initial temperature of the next moment to realize time sequence evolution analysis. The scheme fully utilizes the thermonuclear fusion and beam-target reaction database, effectively distinguishes the contributions of the two types of reactions to the neutron yield, and avoids the limitations of a traditional single reaction model.

A system and method for the precise and uniform material removal or delayering of a large area of a sample is provided. The size of the milled area is controllable, ranging from sub-millimeter to multi-millimeter scale and the depth resolution is controllable on the nanometer scale. A controlled singularly charged ion beam is scanned across the sample surface in such a manner to normalize the ion density distribution from the sample center toward the periphery to realize uniform delayering.

The invention belongs to the field of magnetic confinement controlled nuclear fusion, and discloses a numerical calculation method and system for phase space distribution function evolution of helium ions in magnetic confinement deuterium-tritium fusion, and the method comprises the steps: carrying out the numerical stability verification based on a self-adaptive CFL condition, and determining a proper step size value, carrying out discretization processing on the input data by utilizing a multi-dimensional grid; establishing a Fokker-Planck equation containing friction, energy diffusion, position space transport and helium ion generation source items, and converting the Fokker-Planck equation into a difference format capable of being solved in a recursive manner through a finite difference method; in the calculation process, a corresponding boundary condition is set in combination with physical reality, a difference format of a boundary area is corrected, self-consistent updating is carried out on the main ion density based on a quasi-neutral condition, and information of evolution of a helium ion phase space distribution function along with time is obtained; and introducing an energy boundary judgment method related to the equivalent temperature of helium ash, distinguishing the helium ash from high-energy particles, and outputting a result of evolution of density profiles of the helium ash and the high-energy particles along with time.

A system and method for the precise and uniform material removal or delayering of a large area of a sample is provided. The size of the milled area is controllable, ranging from sub-millimeter to multi-millimeter scale and the depth resolution is controllable on the nanometer scale. A controlled singularly charged ion beam is scanned across the sample surface in such a manner to normalize the ion density distribution from the sample center toward the periphery to realize uniform delayering.

A method of plasma processing includes generating plasma by coupling a source power pulse to a plasma processing chamber containing a substrate holder configured to support a substrate. The plasma includes first ions having a first mass and second ions having a second mass greater than the first mass. The ion density ratio of the second ions to the first ions is a first ratio. The method further includes delivering an energetic ion flux of second ions to the substrate by applying a delayed bias power pulse to the substrate holder after a delay between the source power pulse and the delayed bias power pulse. The delay is chosen based on the diffusion time constants of the first ions and the second ions so that the ion density ratio of the second ions to the first ions is a second ratio that is greater than the first ratio.

The utility model relates to the technical field of liquid crystal ion density testing, and discloses a liquid crystal ion density testing device for liquid crystal material preparation, which comprises a spring wire, a grip fixedly connected to the bottom of the spring wire, a connecting block fixedly connected to the bottom end of the grip, and a mounting ring fixedly connected to the bottom end of the connecting block. The device further comprises a testing device, a fixing mechanism, a clamping mechanism and an extruding mechanism. The testing device is arranged at the output end of the spring wire. Through a supporting spring, a positioning rod is convenient to move in a positioning hole, so that an extension cylinder and a mounting ring are convenient to fix or separate, a conduction rod can be conveniently replaced, a threaded cylinder is rotated anticlockwise, so that the threaded cylinder drives an extrusion ring to extrude a guide block, and the guide block drives a rotating plate to rotate in a movable groove; in this way, a rotating plate can drive a rubber pad to clamp and fix the outer wall of a conduction rod, and the conduction rod cannot slide up and down in a connecting block in the walking process of a worker.