The invention discloses a
plasma parameter diagnosis method,
system and equipment based on transmission
signal wave impedance characteristics and a medium. The method comprises the steps of calculating a reciprocal of a
plasma equivalent relative
dielectric constant and separating a real part and an imaginary part by collecting attenuation and phase shift generated by a uniform
plasma, determining the position of a transmission
signal wave impedance invariant point, and determining the impedance invariant point of the transmission
signal wave by combining the real part and the imaginary part of the reciprocal of the equivalent relative
dielectric constant and the positive and negative properties of a first derivative thereof.
Correctness verification and screening are carried out on transmission
signal wave impedance invariant points, the
electron density and the
collision frequency of the uniform plasma are diagnosed, and the result has high accuracy and reliability. The
system, the equipment and the medium are used for realizing the method. On the premise that the diagnosis precision is not lost, the working frequency of the adopted incident electromagnetic
waves is greatly smaller than that of a traditional
microwave transmission method, the
frequency band data can be fully utilized, and the cost of diagnosis equipment is saved.